Invention Grant
US09570268B2 Electron gun, charged particle gun, and charged particle beam apparatus using electron gun and charged particle gun 有权
电子枪,带电粒子枪和使用电子枪和带电粒子枪的带电粒子束装置

Electron gun, charged particle gun, and charged particle beam apparatus using electron gun and charged particle gun
Abstract:
The purpose of the present invention is to provide a charged particle gun using merely an electrostatic lens, said charged particle gun being relatively small and having less aberration, and to provide a field emission-type charged particle gun having high luminance even with a high current. This charged particle gun has: a charged particle source; an acceleration electrode that accelerates charged particles emitted from the charged particle source; a control electrode, which is disposed further toward the charged particle source side than the acceleration electrode, and which has a larger aperture diameter than the aperture diameter of the acceleration electrode; and a control unit that controls, on the basis of a potential applied to the acceleration electrode, a potential to be applied to the control electrode.
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