发明授权
US09581512B2 Pressure sensor with deformable membrane and method of manufacture
有权
具有可变形膜的压力传感器及其制造方法
- 专利标题： Pressure sensor with deformable membrane and method of manufacture
- 专利标题（中）： 具有可变形膜的压力传感器及其制造方法
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申请号： US14522014申请日： 2014-10-23
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公开(公告)号： US09581512B2公开(公告)日： 2017-02-28
- 发明人: Chung-Hsien Lin , Rene Hummel , Ulrich Bartsch , Marion Hermersdorf , Tsung Lin Tang , Wang Shen Su , Chia Min Lin
- 申请人： InvenSense, Inc.
- 申请人地址： US CA Sunnyvale
- 专利权人： INVENSENSE, INC.
- 当前专利权人： INVENSENSE, INC.
- 当前专利权人地址： US CA Sunnyvale
- 代理机构： Duane Morris LLP
- 代理商 Amir Tabarrok
- 优先权： EP13005236 20131106
- 主分类号： G01L9/00
- IPC分类号： G01L9/00 ; G01L19/00 ; B23P19/04 ; G01L9/12 ; G01L19/14 ; B81B7/00
摘要：
A pressure sensor comprises a first substrate and a cap attached to the first substrate. The cap includes a processing circuit, a cavity and a deformable membrane separating the cavity and a port open to an outside of the pressure sensor. Sensing means are provided for converting a response of the deformable membrane to pressure at the port into a signal capable of being processed by the processing circuit. The cap is attached to the first substrate such that the deformable membrane faces the first substrate and such that a gap is provided between the deformable membrane and the first substrate which gap contributes to the port. The first substrate comprises a support portion the cap is attached to, a contact portion for electrically connecting the pressure sensor to an external device, and one or more suspension elements for suspending the support portion from the contact portion.
公开/授权文献
- US20150122042A1 PRESSURE SENSOR 公开/授权日：2015-05-07
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