Invention Grant
- Patent Title: Endpoint determination for capillary-assisted flow control
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Application No.: US14796723Application Date: 2015-07-10
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Publication No.: US09631778B2Publication Date: 2017-04-25
- Inventor: Joseph D. Sweeney , Anthony M. Avila , Michael J. Wodjenski , Joseph R. Despres , Thomas H. Baum
- Applicant: Entegris, Inc.
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Entegris, Inc. Legal Dept.
- Agent Nidhi G. Kissoon; John E. Pillion
- Main IPC: F17D3/00
- IPC: F17D3/00 ; H01L21/67 ; F17D3/01 ; G05D7/06 ; H01J37/317

Abstract:
Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluid-utilizing apparatus such as ion implanters.
Public/Granted literature
- US20150308626A1 ENDPOINT DETERMINATION FOR CAPILLARY-ASSISTED FLOW CONTROL Public/Granted day:2015-10-29
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