Invention Grant
- Patent Title: Structure and method for the fabrication of a gallium nitride vertical cavity surface emitting laser
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Application No.: US14820258Application Date: 2015-08-06
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Publication No.: US09640947B2Publication Date: 2017-05-02
- Inventor: Casey O. Holder , Daniel F. Feezell , Steven P. DenBaars , James S. Speck , Shuji Nakamura
- Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Applicant Address: US CA Oakland
- Assignee: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Current Assignee: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Current Assignee Address: US CA Oakland
- Agency: Gates & Cooper LLP
- Main IPC: H01S5/183
- IPC: H01S5/183 ; H01S5/10 ; H01S5/343 ; B82Y20/00 ; H01S5/065 ; H01S5/00 ; H01S5/02 ; H01S5/042 ; H01S5/20 ; H01S5/32 ; H01S5/42
Abstract:
A III-Nitride based Vertical Cavity Surface Emitting Laser (VCSEL), wherein a cavity length of the VCSEL is controlled by etching.
Public/Granted literature
- US20160156155A1 STRUCTURE AND METHOD FOR THE FABRICATION OF A GALLIUM NITRIDE VERTICAL CAVITY SURFACE EMITTING LASER Public/Granted day:2016-06-02
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