- Patent Title: Trench metal-insulator-metal capacitor with oxygen gettering layer
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Application No.: US14572974Application Date: 2014-12-17
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Publication No.: US09653534B2Publication Date: 2017-05-16
- Inventor: Takashi Ando , Eduard A. Cartier , Michael P. Chudzik , Aritra Dasgupta , Herbert L. Ho , Donghun Kang , Rishikesh Krishnan , Vijay Narayanan , Kern Rim
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Steven J. Meyers
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L49/02 ; H01L27/108 ; H01L23/26
Abstract:
A method including forming an oxygen gettering layer on one side of an insulating layer of a deep trench capacitor between the insulating layer and a substrate, the oxygen gettering layer including an aluminum containing compound, and depositing an inner electrode on top of the insulating layer, the inner electrode including a metal.
Public/Granted literature
- US20160181353A1 TRENCH METAL-INSULATOR-METAL CAPACITOR WITH OXYGEN GETTERING LAYER Public/Granted day:2016-06-23
Information query
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