Invention Grant
- Patent Title: Electron microscope
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Application No.: US14916529Application Date: 2014-05-16
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Publication No.: US09679738B2Publication Date: 2017-06-13
- Inventor: Hiroaki Matsumoto , Takeshi Sato , Yoshifumi Taniguchi , Ken Harada
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2013-202951 20130930
- International Application: PCT/JP2014/063016 WO 20140516
- International Announcement: WO2015/045476 WO 20150402
- Main IPC: H01J47/00
- IPC: H01J47/00 ; H01J37/10 ; H01J37/295 ; H01J37/04 ; H01J37/26 ; G01N23/20 ; H01J37/09 ; H01J37/147 ; H01J37/153 ; H01J37/24 ; H01J37/244 ; H01J37/28 ; H01J37/05 ; H01J37/285

Abstract:
The present invention relates to a lens-less Foucault method wherein a transmission electron microscope objective lens (5) is turned off, an electron beam crossover (11, 13) is matched with a selected area aperture (65), and the focal distance of a first imaging lens (61) can be changed to enable switching between a sample image observation mode and a sample diffraction pattern observation mode, characterized in that a deflector (81) is disposed in a stage following the first imaging lens (61), and conditions for an irradiating optical system (4) can be fixed after conditions for the imaging optical system have been determined. This allows a lens-less Foucault method to be implemented in a common general-use transmission electron microscope with no magnetic shielding lens equipped, without burdening the operator.
Public/Granted literature
- US20160196952A1 Electron Microscope Public/Granted day:2016-07-07
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