Invention Grant
- Patent Title: Deep trench isolation fabrication for BSI image sensor
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Application No.: US14935819Application Date: 2015-11-09
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Publication No.: US09728570B2Publication Date: 2017-08-08
- Inventor: Yen-Ting Chiang , Ching-Chun Wang , Dun-Nian Yaung , Hsiao-Hui Tseng , Chih-Hui Huang , Shyh-Fann Ting , Shih Pei Chou , Sheng-Chan Li
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/146

Abstract:
The present disclosure relates to a BSI image sensor with improved DTI structures, and an associated method of formation. In some embodiments, the BSI image sensor comprises a plurality of image sensing elements disposed within a substrate corresponding to a plurality of pixel regions. A deep trench isolation (DTI) grid is disposed between adjacent image sensing elements and extending from an upper surface of the substrate to positions within the substrate. The DTI grid comprises air-gaps disposed under the upper surface of the substrate, the air-gaps having lower portions surrounded by a first dielectric layer and some upper portions sealed by a second dielectric layer.
Public/Granted literature
- US20170133414A1 DTI FOR BSI IMAGE SENSOR Public/Granted day:2017-05-11
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