Invention Grant
- Patent Title: Apparatus for forming gas blocking layer and method thereof
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Application No.: US13769108Application Date: 2013-02-15
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Publication No.: US09732419B2Publication Date: 2017-08-15
- Inventor: MunPyo Hong , You Jong Lee , Yun-Sung Jang , Jun Young Lee
- Applicant: Korea University Research and Business Foundation
- Applicant Address: KR Seoul
- Assignee: KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION
- Current Assignee: KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION
- Current Assignee Address: KR Seoul
- Agency: McDermott Will & Emery LLP
- Priority: KR10-2010-0078762 20100816
- Main IPC: C23C14/35
- IPC: C23C14/35 ; H01J37/34 ; C23C16/44 ; C23C16/22 ; C23C14/22 ; C23C14/34 ; B05D1/00 ; C23C14/08 ; C23C16/00 ; H01J37/32 ; H01L51/52

Abstract:
A gas blocking layer forming apparatus comprises a vacuum chamber that provides a space where a chemical vapor deposition process and a sputtering process are performed; a holding unit that is provided at a lower side within the vacuum chamber and mounts thereon a target object on which an organic/inorganic mixed multilayer gas blocking layer is formed; a neutral particle generation unit that is provided at an upper side within the vacuum chamber and generates a neutral particle beam having a high-density flux with a current density of about 10 A/m2 or more; and common sputtering devices that are provided at both sides of the neutral particle generation unit, wherein each common sputtering device has a sputtering target of which a surface is inclined toward a surface of the target object.
Public/Granted literature
- US20130161184A1 APPARATUS FOR FORMING GAS BLOCKING LAYER AND METHOD THEREOF Public/Granted day:2013-06-27
Information query
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