Invention Grant
- Patent Title: Quartz upper and lower domes
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Application No.: US14132215Application Date: 2013-12-18
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Publication No.: US09768043B2Publication Date: 2017-09-19
- Inventor: Anzhong Chang , Paul Brillhart , Surajit Kumar , Satheesh Kuppurao , Mehmet Tugrul Samir , David K. Carlson , Steve Aboagye , Anh N. Nguyen , Kailash Kiran Patalay , Joseph M. Ranish , Oleg Serebryanov , Dongming Iu , Shu-Kwan Lau , Zuoming Zhu , Herman Diniz
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: A21B2/00
- IPC: A21B2/00 ; H01L21/67 ; C23C16/455

Abstract:
Embodiments of the present disclosure relate to a dome assembly. The dome assembly includes an upper dome including a central window, and an upper peripheral flange engaging the central window at a circumference of the central window, wherein a tangent line on an inside surface of the central window that passes through an intersection of the central window and the upper peripheral flange is at an angle of about 8° to about 16° with respect to a planar upper surface of the peripheral flange, a lower dome comprising a lower peripheral flange and a bottom connecting the lower peripheral flange with a central opening, wherein a tangent line on an outside surface of the bottom that passes through an intersection of the bottom and the lower peripheral flange is at an angle of about 8° to about 16° with respect to a planar bottom surface of the lower peripheral flange.
Public/Granted literature
- US20140199056A1 QUARTZ UPPER AND LOWER DOMES Public/Granted day:2014-07-17
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