Invention Grant
- Patent Title: Biased deep trench isolation
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Application No.: US15071035Application Date: 2016-03-15
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Publication No.: US09806117B2Publication Date: 2017-10-31
- Inventor: Yuanwei Zheng , Gang Chen , Duli Mao , Dyson H. Tai , Yi Ma
- Applicant: OMNIVISION TECHNOLOGIES, INC.
- Applicant Address: US CA Santa Clara
- Assignee: OmniVision Technologies, Inc.
- Current Assignee: OmniVision Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Christensen O'Connor Johnson Kindness PLLC
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L27/146

Abstract:
An image sensor includes a plurality of photodiodes disposed in a semiconductor material, and a through-semiconductor-via coupled to a negative voltage source. Deep trench isolation structures are disposed between individual photodiodes in the plurality of photodiodes to electrically and optically isolate the individual photodiodes. The deep trench isolation structures include a conductive material coupled to the through-semiconductor-via, and a dielectric material disposed on sidewalls of the deep trench isolation structures between the semiconductor material and the conductive material.
Public/Granted literature
- US20170271384A1 BIASED DEEP TRENCH ISOLATION Public/Granted day:2017-09-21
Information query
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