Invention Grant
- Patent Title: Liquid feeding device and substrate treating device
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Application No.: US14939008Application Date: 2015-11-12
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Publication No.: US09811096B2Publication Date: 2017-11-07
- Inventor: Konosuke Hayashi , Takashi Ootagaki , Emi Matsui
- Applicant: SHIBAURA MECHATRONICS CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: SHIBAURA MECHATRONICS CORPORATION
- Current Assignee: SHIBAURA MECHATRONICS CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Volpe and Koenig, P.C.
- Priority: JP2013-102460 20130514
- Main IPC: G05D11/13
- IPC: G05D11/13 ; B05B12/00 ; G05D9/12 ; B05C5/02 ; H01L21/67 ; B05B13/02

Abstract:
A liquid feeding device that feeds a treatment liquid to a treating device and also recovers the treatment liquid for re-feeding, include feeding tanks having an exhaust passage and an overflow line, and can be switched to one of a feeding mode in which the treatment liquid is fed and a standby mode in which the feeding tank is on standby while accommodating the treatment liquid; a feeding mechanism that feeds the treatment liquid to the treating device from the feeding tank in the feeding mode among the plurality of feeding tanks; a recovery mechanism that recovers and returns the treatment liquid excessive in the treatment device to the feeding tank in the feeding mode; and an on-off mechanism provided in each of the plurality of feeding tanks to block the exhaust passage and the overflow line is provided.
Public/Granted literature
- US20160062372A1 LIQUID FEEDING DEVICE AND SUBSTRATE TREATING DEVICE Public/Granted day:2016-03-03
Information query