Invention Grant
- Patent Title: Vacuum pump with abatement function
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Application No.: US14226737Application Date: 2014-03-26
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Publication No.: US09822974B2Publication Date: 2017-11-21
- Inventor: Kohtaro Kawamura , Toyoji Shinohara , Tetsuro Sugiura , Hideo Arai , Toshiharu Nakazawa , Keiichi Ishikawa , Seiji Kashiwagi , Yasuhiko Suzuki , Takashi Kyotani
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Baker & Hostetler LLP
- Priority: JP2013-069728 20130328
- Main IPC: F23G7/06
- IPC: F23G7/06 ; F23J13/00 ; F04B37/14 ; F04C25/02 ; F23G5/32 ; F23L17/00 ; B01D53/68 ; B01D53/76

Abstract:
A vacuum pump includes a vacuum pump having a discharge port to which an abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The vacuum pump includes a cylindrical member having an exhaust gas introduction port for introducing the exhaust gas to be treated and a gas outlet port for discharging gases which have been treated, a plurality of fuel nozzles provided at a circumferential wall of the cylindrical member for ejecting a fuel, and a plurality of air nozzles provided at the circumferential wall of the cylindrical member for ejecting air so as to form a swirling flow of air along an inner circumferential surface of the circumferential wall. The air nozzles are disposed at a plurality of stages spaced in an axial direction of the cylindrical member.
Public/Granted literature
- US20140295362A1 VACUUM PUMP WITH ABATEMENT FUNCTION Public/Granted day:2014-10-02
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