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公开(公告)号：US20150000870A1
公开(公告)日：2015-01-01
申请号：US14312265
申请日：2014-06-23
Applicant: Ebara Corporation
Inventor： Kazumasa Hosotani , Makoto Kashiwagi , Toyoji Shinohara , Kohtaro Kawamura
IPC: F02C7/08
CPC classification number: F02C7/08 , B01D53/005 , B01D53/18 , B01D53/70 , B01D53/78 , B01D2252/103 , B01D2257/2045 , B01D2257/2047 , B01D2257/2066 , B01D2257/553 , B01D2258/0216 , F23G7/065 , F23J15/04 , F23J2219/40 , F28C3/06 , F28D1/0213 , F28D1/05316 , F28D7/082 , F28D7/16 , Y02P80/156
Abstract: An exhaust gas abatement system includes an exhaust gas abatement section configured to abate exhaust gases by utilizing thermal energy and to cool the abated gases by using a liquid, a circulating section configured to circulate the liquid within a circulation path as a circulating liquid, a heat exchange tube configured to cool the circulating liquid and to executes a heat exchange between a cooling liquid which flows in an interior of the heat exchange tube and the circulating liquid which flows outside the heat exchange tube, and a circulating liquid storage portion configured to store the circulating liquid. The heat exchange tube is disposed in a heat exchange tube installation space which is in at least part of an interior of the circulating liquid storage portion.
Abstract translation: 废气消除系统包括：排气消除部，其构造为通过利用热能消除废气，并且通过使用液体来冷却排出的气体;循环部，其构造成使循环路径内的液体循环为循环液;热量 配置为冷却循环液体并在流过热交换管内部的冷却液与流过热交换管的循环液体之间进行热交换的交换管;以及循环液储存部， 循环液体。 换热管设置在至少部分循环液储存部内部的热交换管安装空间内。
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Patent Agency Ranking
公开(公告)号：US10227926B2
公开(公告)日：2019-03-12
申请号：US14312265
申请日：2014-06-23
Applicant: Ebara Corporation
Inventor： Kazumasa Hosotani , Makoto Kashiwagi , Toyoji Shinohara , Kohtaro Kawamura
IPC: F23J15/06 , F02C7/08 , B01D53/00 , F23J15/04 , F28D1/02 , B01D53/18 , B01D53/70 , B01D53/78 , F23G7/06 , F28C3/06 , F28D1/053 , F28D7/08 , F28D7/16
Abstract: An exhaust gas abatement system includes an exhaust gas abatement section configured to abate exhaust gases by utilizing thermal energy and to cool the abated gases by using a liquid, a circulating section configured to circulate the liquid within a circulation path as a circulating liquid, a heat exchange tube configured to cool the circulating liquid and to executes a heat exchange between a cooling liquid which flows in an interior of the heat exchange tube and the circulating liquid which flows outside the heat exchange tube, and a circulating liquid storage portion configured to store the circulating liquid. The heat exchange tube is disposed in a heat exchange tube installation space which is in at least part of an interior of the circulating liquid storage portion.
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公开(公告)号：US09956524B2
公开(公告)日：2018-05-01
申请号：US14289575
申请日：2014-05-28
Applicant: EBARA CORPORATION
Inventor： Toshiharu Nakazawa , Tetsuro Sugiura , Kohtaro Kawamura , Toyoji Shinohara , Takashi Kyotani , Keiichi Ishikawa , Seiji Kashiwagi , Yasuhiko Suzuki , Hideo Arai
CPC classification number: B01D53/74 , B01D53/005 , B01D2257/204 , B01D2257/2066 , B01D2257/553 , B01D2258/0216 , Y10T137/85978
Abstract: A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.
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公开(公告)号：US10143964B2
公开(公告)日：2018-12-04
申请号：US14284305
申请日：2014-05-21
Applicant: EBARA CORPORATION
Inventor： Kohtaro Kawamura , Toyoji Shinohara , Tetsuro Sugiura , Hideo Arai , Takashi Kyotani , Toshiharu Nakazawa , Keiichi Ishikawa , Seiji Kashiwagi , Yasuhiko Suzuki
Abstract: A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which at least one abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The abatement part is selected from a plurality of abatement parts having different treatment types of exhaust gas and/or different treatment amounts of exhaust gas and/or different treatment performances of exhaust gas.
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公开(公告)号：US09822974B2
公开(公告)日：2017-11-21
申请号：US14226737
申请日：2014-03-26
Applicant: EBARA CORPORATION
Inventor： Kohtaro Kawamura , Toyoji Shinohara , Tetsuro Sugiura , Hideo Arai , Toshiharu Nakazawa , Keiichi Ishikawa , Seiji Kashiwagi , Yasuhiko Suzuki , Takashi Kyotani
CPC classification number: F23J13/00 , B01D53/68 , B01D53/76 , B01D2251/102 , B01D2257/204 , B01D2257/553 , B01D2258/0216 , F04B37/14 , F04C25/02 , F04C2220/30 , F23G5/32 , F23G7/065 , F23J2219/00 , F23J2900/01007 , F23L17/00
Abstract: A vacuum pump includes a vacuum pump having a discharge port to which an abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The vacuum pump includes a cylindrical member having an exhaust gas introduction port for introducing the exhaust gas to be treated and a gas outlet port for discharging gases which have been treated, a plurality of fuel nozzles provided at a circumferential wall of the cylindrical member for ejecting a fuel, and a plurality of air nozzles provided at the circumferential wall of the cylindrical member for ejecting air so as to form a swirling flow of air along an inner circumferential surface of the circumferential wall. The air nozzles are disposed at a plurality of stages spaced in an axial direction of the cylindrical member.
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公开(公告)号：US09364786B2
公开(公告)日：2016-06-14
申请号：US14226741
申请日：2014-03-26
Applicant: EBARA CORPORATION
Inventor： Kohtaro Kawamura , Toyoji Shinohara , Tetsuro Sugiura , Hideo Arai , Takashi Kyotani , Toshiharu Nakazawa , Keiichi Ishikawa , Seiji Kashiwagi , Yasuhiko Suzuki
CPC classification number: B01D53/343 , C23C16/4412 , F04B37/06 , F04B37/14 , F23G7/065 , Y02C20/30
Abstract: A vacuum pump has a discharge port coupled to an abatement chamber for treating an exhaust gas discharged from a chamber of a manufacturing apparatus to make the exhaust gas harmless. The vacuum pump is coupled to a heat exchanger configured to heat an inert gas by using heat generated when the exhaust gas is treated to be made harmless in the abatement part. The inert gas heated by the heat exchanger is introduced into the vacuum pump.
Abstract translation: 真空泵具有联接到减排室的排出口，用于处理从制造装置的室排出的排气，使废气无害化。 真空泵联接到热交换器，该热交换器被配置为通过使废气在减排部分被处理成无害化时产生的热量来加热惰性气体。 由热交换器加热的惰性气体被引入真空泵。
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