Invention Grant
- Patent Title: Apparatus and process for producing a crystal of semiconductor material
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Application No.: US14711942Application Date: 2015-05-14
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Publication No.: US09828693B2Publication Date: 2017-11-28
- Inventor: Georg Brenninger , Georg Raming
- Applicant: SILTRONIC AG
- Applicant Address: DE Munich
- Assignee: SILTRONIC AG
- Current Assignee: SILTRONIC AG
- Current Assignee Address: DE Munich
- Agency: Brooks Kushman P.C.
- Priority: DE102014210936 20140606
- Main IPC: C30B13/08
- IPC: C30B13/08 ; C30B13/20 ; C30B11/00 ; C30B13/14 ; C30B13/30 ; C30B29/06 ; C30B11/10 ; C30B15/12 ; C30B15/02

Abstract:
A crystal of semiconductor material is produced in an apparatus having a crucible with a crucible bottom and a crucible wall, the crucible bottom having a top surface, an underside, and a multitude of openings disposed between the crucible wall and a center of the crucible bottom, and elevations disposed on the top surface and the underside of the crucible bottom; and an induction heating coil disposed below the crucible for melting semiconductor material and stabilizing a melt of semiconductor material covering a growing crystal of semiconductor material. The growth process comprises generating a bed of a semiconductor material feed on the top surface of the crucible bottom and melting semiconductor material on the bed using the induction heating coil.
Public/Granted literature
- US20150354087A1 APPARATUS AND PROCESS FOR PRODUCING A CRYSTAL OF SEMICONDUCTOR MATERIAL Public/Granted day:2015-12-10
Information query
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