Invention Grant
- Patent Title: Magnetic annealing apparatus and magnetic annealing method
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Application No.: US14836047Application Date: 2015-08-26
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Publication No.: US09851149B2Publication Date: 2017-12-26
- Inventor: Mitsuru Yamazaki , Barry Clarke , Jattie Van Der Linde , Makoto Saito , Kazuyoshi Sugawara , Toshiji Abe , Tadashi Enomoto
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Abelman, Frayne & Schwab
- Priority: JP2014-176436 20140829
- Main IPC: C30B23/02
- IPC: C30B23/02 ; F27B17/00 ; F27D99/00 ; H01L43/12 ; F27D11/12 ; H01L21/67

Abstract:
Disclosed is a magnetic annealing apparatus including a processing container that performs a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field; a substrate holder that holds the plurality of substrates substantially horizontally in the processing container; a division heater including a plurality of sub-division heaters and covering a substantially entire circumferential surface of an outer periphery of a predetermined region of the processing container along a longitudinal direction; a magnet installed to cover an outside of the division heater; and a controller configured to feedback-control a temperature of a predetermined control target heater among the plurality of sub-division heaters, and to control temperatures of the plurality of sub-division heaters other than the predetermined control target heater based on a control output obtained by multiplying a control output of the predetermined control target heater and a predetermined ratio.
Public/Granted literature
- US20160061525A1 MAGNETIC ANNEALING APPARATUS AND MAGNETIC ANNEALING METHOD Public/Granted day:2016-03-03
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