Invention Grant
- Patent Title: Initiator and method for debonding wafer supporting system
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Application No.: US14788783Application Date: 2015-06-30
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Publication No.: US09875918B2Publication Date: 2018-01-23
- Inventor: Kyu-Dong Jung , Jung-Hwan Kim , Dong-Gil Lee , Tae-Je Cho , Kwang-Chul Choi
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR
- Agency: Renaissance IP Law Group LLP
- Priority: KR10-2014-0130461 20140929
- Main IPC: B32B43/00
- IPC: B32B43/00 ; H01L21/67 ; B32B38/10 ; B32B41/00

Abstract:
Provided are an initiator and a method for debonding a wafer supporting system. The initiator for debonding a wafer supporting system includes a rotation chuck having an upper surface on which a wafer supporting system (WSS), which includes a carrier wafer, a device wafer, and a glue layer for bonding the carrier wafer and the device wafer to each other, is seated to rotate the wafer supporting system, a detecting module detecting a height and a thickness of the glue layer and a laser module generating a fracture portion on the glue layer through irradiating a side surface of the glue layer with a laser on the basis of the height and the thickness of the glue layer.
Public/Granted literature
- US20160093518A1 INITIATOR AND METHOD FOR DEBONDING WAFER SUPPORTING SYSTEM Public/Granted day:2016-03-31
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