Invention Grant
- Patent Title: Wrap around gate field effect transistor (WAGFET)
-
Application No.: US15163375Application Date: 2016-05-24
-
Publication No.: US09882000B2Publication Date: 2018-01-30
- Inventor: Stephen J. Sarkozy , Yaochung Chen , Richard Lai
- Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATION
- Applicant Address: US VA Falls Church
- Assignee: Northrop Grumman Systems Corporation
- Current Assignee: Northrop Grumman Systems Corporation
- Current Assignee Address: US VA Falls Church
- Agency: Miller IP Group, PLC
- Agent John A. Miller
- Main IPC: H01L29/49
- IPC: H01L29/49 ; H01L29/06 ; H01L29/22 ; H01L29/423 ; H01L29/40 ; H01L29/66

Abstract:
A field effect transistor (FET) including a substrate, a plurality of semiconductor epitaxial layers deposited on the substrate, and a heavily doped gate layer deposited on the semiconductor layers. The FET also includes a plurality of castellation structures formed on the heavily doped gate layer and being spaced apart from each other, where each castellation structure includes at least one channel layer. A gate metal is deposited on the castellation structures and between the castellation structures to be in direct electrical contact with the heavily doped gate layer. A voltage potential applied to the gate metal structure modulates the at least one channel layer in each castellation structure from an upper, lower and side direction.
Public/Granted literature
- US20170345895A1 WRAP AROUND GATE FIELD EFFECT TRANSISTOR (WAGFET) Public/Granted day:2017-11-30
Information query
IPC分类: