Invention Grant
- Patent Title: Laser machining device and laser machining method
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Application No.: US14778673Application Date: 2014-03-13
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Publication No.: US09902017B2Publication Date: 2018-02-27
- Inventor: Daisuke Kawaguchi , Tsubasa Hirose , Keisuke Araki
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JP2013-065990 20130327
- International Application: PCT/JP2014/056723 WO 20140313
- International Announcement: WO2014/156687 WO 20141002
- Main IPC: B23K26/00
- IPC: B23K26/00 ; B23K26/06 ; B23K26/53 ; B23K26/073 ; B23K26/40 ; B28D5/00 ; B23K26/064 ; C03B33/02 ; B23K103/00

Abstract:
A laser processing device comprises a laser light source emitting the laser light, a spatial light modulator modulating the laser light emitted from the laser light source, and a converging optical system converging the laser light modulated by the spatial light modulator at the object. A plurality of rows of modified regions include at least an entrance-surface-side modified region located on the laser light entrance surface side, an opposite-surface-side modified region located on the opposite surface side of the laser light entrance surface, and a middle modified region located between the entrance-surface-side modified region and opposite-surface-side modified region. When forming the middle modified region, the spatial light modulator displays an axicon lens pattern as a modulation pattern so as to form converging points at a plurality of positions juxtaposed close to each other along a laser light irradiation direction. When forming the entrance-surface-side modified region and opposite-surface-side modified region, the spatial light modulator is restrained from displaying the axicon lens pattern as the modulation pattern.
Public/Granted literature
- US20160045979A1 LASER MACHINING DEVICE AND LASER MACHINING METHOD Public/Granted day:2016-02-18
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