Invention Grant
- Patent Title: Replacement fin process in SSOI wafer
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Application No.: US15082161Application Date: 2016-03-28
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Publication No.: US09917105B2Publication Date: 2018-03-13
- Inventor: Bruce B. Doris , Hong He , Ali Khakifirooz , Junli Wang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/70 ; H01L21/8238 ; H01L21/20 ; H01L21/36 ; H01L29/161 ; H01L29/10 ; H01L21/02 ; H01L21/306 ; H01L21/311 ; H01L21/8234 ; H01L21/84 ; H01L27/088 ; H01L29/06 ; H01L29/16 ; H01L29/66 ; H01L29/78 ; H01L27/092 ; H01L21/308

Abstract:
A method of forming replacement fins in a complimentary-metal-oxide-semiconductor (CMOS) device that includes a p-type field effect transistor device (pFET) and an n-type field effect transistor device (nFET) and a CMOS device are described. The method includes forming strained silicon (Si) fins from a strained silicon-on-insulator (SSOI) layer in both an nFET region and a pFET region, forming insulating layers over the strained Si fins, and forming trenches within the insulating layers to expose the strained Si fins in the pFET region only. The method also includes etching the strained Si fins in the pFET region to expose a buried oxide (BOX) layer of the SSOI layer, etching the exposed portions of the BOX layer to expose a bulk substrate, epitaxially growing a Si portion of pFET replacement fins from the bulk substrate, and epitaxially growing silicon germanium (SiGe) portions of the pFET replacement fins on the Si portion of the pFET replacement fins.
Public/Granted literature
- US20160225770A1 REPLACEMENT FIN PROCESS IN SSOI WAFER Public/Granted day:2016-08-04
Information query
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