Invention Grant
- Patent Title: Methods for forming wrap around contact
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Application No.: US15231967Application Date: 2016-08-09
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Publication No.: US09935172B2Publication Date: 2018-04-03
- Inventor: Chan Syun David Yang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L29/78 ; H01L29/66 ; H01L21/263 ; H01L21/311 ; H01L29/08 ; H01L29/40 ; H01L29/45 ; H01L27/088 ; H01L21/8234 ; H01L21/265 ; H01L29/165

Abstract:
Some embodiments of the present disclosure relate to a contact formed to a source or drain region of a “finned” field-effect transistor (FinFET). An epitaxial material is formed over the source or drain region, which includes a diamond-shaped cross-section with top and bottom surfaces. A capping layer is formed over the top and bottom surfaces. The source or drain region is subjected to a first etch to remove the capping layer surrounding the top surfaces of the diamond-shaped cross-section. A protective layer is formed within the top surfaces. A second etch of the capping layer is performed to remove the capping layer surrounding the bottom surfaces of the diamond-shaped cross-section, while using the protective layer to prevent etching of the top surfaces by the second etch. A contact is formed to the source or drain region, which surrounds the source or drain region on the top and bottom surfaces.
Public/Granted literature
- US20160351671A1 METHODS FOR FORMING WRAP AROUND CONTACT Public/Granted day:2016-12-01
Information query
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