利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

601 条记录 (耗时 0.02 秒)

    Flexible tape probe
    6.
    发明公开
    Flexible tape probe 失效
    柔性胶带探头

    公开(公告)号：EP0475050A3

    公开(公告)日：1993-06-09

    申请号：EP91112722.3

    申请日：1991-07-29

    申请人： International Business Machines Corporation

    发明人： Bregman, Mark F. ,  Hoffman, Paul R. ,  Ledermann, Peter G. ,  Moskowitz, Paul A. ,  Pollak, Roger A. ,  Reiley, Timothy C. ,  Ritter, Mark B.

    IPC分类号： G01R31/18 ,  G01R31/28

    CPC分类号： G01R1/0735

    摘要： A system for testing chips uses a patterned tape having a patterned array of cantilevered contact leads. The tape serves as an interface between the chip under test and a testing unit by providing conductive leads from the I/O terminals on the chip to an off-chip measuring system. The leads on the array may have balls, tips or other shapes on the end to provide contact with the terminals and compensate for height differences. The tape is a single frame or has a series of arrays each positioned around an opening where the chip will be located when a particular pattern is positioned over that chip for test. The pattern on the tape may be the same array or a different array. The tape is indexed to a new pattern when the old one is damaged or no longer needed. Alignment with the chip is by optical sensing and physical pin movement. The tape may have a flap protruding into an aperture and deflectable to provide for planar contact of the leads to the device under test.

    摘要翻译： 用于测试芯片的系统使用具有悬臂式接触引线的图案化阵列的图案化带。 磁带作为被测芯片与测试单元之间的接口，通过从芯片上的I / O端子提供到芯片外测量系统的导线。 阵列上的引线可以在端部上具有球，尖端或其他形状以提供与端子的接触并补偿高度差异。 磁带是单个框架或者具有一系列阵列，每个阵列围绕开口定位，当特定图案位于该芯片上以进行测试时，芯片将位于该开口处。 磁带上的图案可能是相同的阵列或不同的阵列。 当旧的磁带损坏或不再需要时，磁带将被索引到新的模式。 与芯片的对准是通过光学感应和物理引脚移动。 带可以具有突出到孔中的折片，并且可偏转以提供引线与待测器件的平面接触。

    High area capacitor formation using material dependent etching
    7.
    发明公开
    High area capacitor formation using material dependent etching 失效
    产生与使用Materialabhangigen蚀刻高表面的电容器。

    公开(公告)号：EP0539685A1

    公开(公告)日：1993-05-05

    申请号：EP92114415.0

    申请日：1992-08-24

    申请人： International Business Machines Corporation

    发明人： Oehrlein, Gottlieb S. ,  Rubloff, Gary W. ,  Patel, Vishnubhai V. ,  Grill, Alfred ,  Hodgson, Rodney T.

    IPC分类号： H01L21/3205 ,  H01L21/334 ,  H01L27/108 ,  H01L29/92

    CPC分类号： H01L27/10852 ,  H01L21/3065 ,  H01L27/10817 ,  H01L28/87 ,  H01L29/945

    摘要： The invention provides a capacitor having increased capacitance comprising one or more main vertical trenches (16) and one or more lateral trenches (18) extending off the main vertical trench. The capacitor has alternating first and second regions (12, 14), preferably silicon and non-silicon regions (for example, alternating silicon and germanium or alternating silicon and carbon regions). The etch characteristics of the alternating regions are utilized to selectively etch lateral trenches thereby increasing the surface area and capacitance of the capacitor. A method of fabricating the capacitors is also provided.

    摘要翻译： 本发明提供了增加的包括一个或多个主垂直沟槽（16），一个具有一个电容器的电容和或多个横向沟槽（18）延伸离开主垂直沟槽。 电容器具有交替的第一和第二区域（12,14），优选硅和非硅的区域（例如，交替的硅和锗或交替的硅和碳的区域）。 交替区域的蚀刻特性被用来选择性地蚀刻横向沟槽从而增加了电容器的表面面积和电容。 因此提供了一种制造电容器的方法。