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    Method of printed circuit panel manufacture
    2.
    发明公开
    Method of printed circuit panel manufacture 失效
    印刷电路板制造方法

    公开(公告)号：EP0574893A3

    公开(公告)日：1996-01-10

    申请号：EP93109615.0

    申请日：1993-06-16

    申请人： International Business Machines Corporation

    发明人： Duffy, Thomas Patrick ,  Hecht, Lewis C, ,  Sulger,Merritt Preston ,  Thiele, Ernst Emil ,  Pierson, Mark Vincent ,  Williams, Lawrence Edward

    IPC分类号： H01L21/00 ,  H05K13/02 ,  H05K13/00

    CPC分类号： H01L21/67236 ,  H01L21/67772

    摘要： Disclosed is a method of manufacturing a printed circuit panel. The method is carried out without a cleanroom, but in a clean room environment. The first step is to place a thin, non-rigid panel in a suitable fixture system, for example, for transfer and also for processing. The system includes a peripheral frame fixture for surrounding and supporting the in-process circuit panel layer, and a a loading chuck for mounting the in-process circuit panel layer in the peripheral frame fixture. The peripheral frame fixture includes a bottom plate (175) having a central opening to expose the circuit panel layer, a top frame (179) having a corresponding central opening to expose the opposite surface of the circuit panel layer, and compressive means, as screws, bolts, or the like, for applying a z-axis compressive force to the bottom plate, the top frame, and a panel layer therebetween. The loading chuck includes a peripheral edge for receiving the bottom plate of the peripheral frame fixture.
    A vacuum table is within the area bounded by the peripheral edge of the loading chuck and the peripheral frame of the peripheral frame fixture, and is coplanar with them. The vacuum table includes slidable bearing surfaces (131), with vacuum apertures (133) for drawing a vacuum to hold the panel in place, and slide actuators for moving the slidable bearing surfaces to apply x-y-axis tension to a panel on the bearing surfaces.
    The fixtured panel is then placed in an air tight transfer container, which has a substantially contaminant free atmosphere. The walls of the transfer container are fabricated out of substantially particulate free, unfilled polymers, such as polycarbonate. One of the end walls is an access wall. The access wall has an opening surrounded by a ferromagnetic gasket. This gasketed opening is adapted to receive a ferromagnetic door panel. The transfer container has a sealed door at one end. The transfer container is then brought into a sealable, substantially airtight interlock with a process enclosure. This process enclosure also has a substantially contaminant free atmosphere, and a sealed door at one end. An airtight seal is formed between the transfer container and the process enclosure, and also between the surfaces of the two doors. This is to avoid introducing surface contaminants into the process enclosure and transfer container atmospheres. Next, the two doors are opened simultaneously. This is to allow the transfer of at least one panel and its fixture from the transfer container into the process enclosure. Inside the process enclosure the panel is transferred to a process station for a manufacturing process. Finally, the panel and its fixture are transferred from the process enclosure into the transfer container. This may be the same container or a different container. The doors of the process enclosure and the transfer container are then closed and sealed. Also disclosed is a manufacturing system having isolated islands of "clean room" environment connected by inter-process transfer containers for transfering in-process workpieces. The system has airlock transfer ports between the process enclosures and the inter-process transfer containers. The make and break airlock transfer ports have facing sealable doors in the process enclosure and the transfer container. These doors are in air sealable facing recesses of the process enclosure and the transfer container. At least one peripheral gasket surrounds the recesses and the pair of doors. This provides a substantially clean room environment in the airlock. The sealable door in the interprocess transfer container is fabricated of a ferromagnetic material and is seated on a ferromagnetic gasket, while the sealable door in the process enclosure has a controllable electromagnetic clamp.

    Method of printed circuit panel manufacture
    5.
    发明公开
    Method of printed circuit panel manufacture 失效
    Herstellungsverfahrenfürgedruckte Schaltungen。

    公开(公告)号：EP0574893A2

    公开(公告)日：1993-12-22

    申请号：EP93109615.0

    申请日：1993-06-16

    申请人： International Business Machines Corporation

    发明人： Duffy, Thomas Patrick ,  Hecht, Lewis C, ,  Sulger,Merritt Preston ,  Thiele, Ernst Emil ,  Pierson, Mark Vincent ,  Williams, Lawrence Edward

    IPC分类号： H01L21/00 ,  H05K13/02 ,  H05K13/00

    CPC分类号： H01L21/67236 ,  H01L21/67772

    摘要： Disclosed is a method of manufacturing a printed circuit panel. The method is carried out without a cleanroom, but in a clean room environment. The first step is to place a thin, non-rigid panel in a suitable fixture system, for example, for transfer and also for processing. The system includes a peripheral frame fixture for surrounding and supporting the in-process circuit panel layer, and a a loading chuck for mounting the in-process circuit panel layer in the peripheral frame fixture. The peripheral frame fixture includes a bottom plate (175) having a central opening to expose the circuit panel layer, a top frame (179) having a corresponding central opening to expose the opposite surface of the circuit panel layer, and compressive means, as screws, bolts, or the like, for applying a z-axis compressive force to the bottom plate, the top frame, and a panel layer therebetween. The loading chuck includes a peripheral edge for receiving the bottom plate of the peripheral frame fixture.
    A vacuum table is within the area bounded by the peripheral edge of the loading chuck and the peripheral frame of the peripheral frame fixture, and is coplanar with them. The vacuum table includes slidable bearing surfaces (131), with vacuum apertures (133) for drawing a vacuum to hold the panel in place, and slide actuators for moving the slidable bearing surfaces to apply x-y-axis tension to a panel on the bearing surfaces.
    The fixtured panel is then placed in an air tight transfer container, which has a substantially contaminant free atmosphere. The walls of the transfer container are fabricated out of substantially particulate free, unfilled polymers, such as polycarbonate. One of the end walls is an access wall. The access wall has an opening surrounded by a ferromagnetic gasket. This gasketed opening is adapted to receive a ferromagnetic door panel. The transfer container has a sealed door at one end. The transfer container is then brought into a sealable, substantially airtight interlock with a process enclosure. This process enclosure also has a substantially contaminant free atmosphere, and a sealed door at one end. An airtight seal is formed between the transfer container and the process enclosure, and also between the surfaces of the two doors. This is to avoid introducing surface contaminants into the process enclosure and transfer container atmospheres. Next, the two doors are opened simultaneously. This is to allow the transfer of at least one panel and its fixture from the transfer container into the process enclosure. Inside the process enclosure the panel is transferred to a process station for a manufacturing process. Finally, the panel and its fixture are transferred from the process enclosure into the transfer container. This may be the same container or a different container. The doors of the process enclosure and the transfer container are then closed and sealed. Also disclosed is a manufacturing system having isolated islands of "clean room" environment connected by inter-process transfer containers for transfering in-process workpieces. The system has airlock transfer ports between the process enclosures and the inter-process transfer containers. The make and break airlock transfer ports have facing sealable doors in the process enclosure and the transfer container. These doors are in air sealable facing recesses of the process enclosure and the transfer container. At least one peripheral gasket surrounds the recesses and the pair of doors. This provides a substantially clean room environment in the airlock. The sealable door in the interprocess transfer container is fabricated of a ferromagnetic material and is seated on a ferromagnetic gasket, while the sealable door in the process enclosure has a controllable electromagnetic clamp.

    摘要翻译： 公开了一种制造印刷电路板的方法。 该方法在没有洁净室的情况下进行，但在洁净室环境中进行。 第一步是将薄的非刚性面板放置在合适的夹具系统中，例如用于传送和加工。 该系统包括用于围绕和支撑过程中电路板层的外围框架固定装置，以及用于将工艺中电路板层安装在外围框架固定装置中的装载卡盘。 外围框架固定装置包括具有中心开口以露出电路板层的底板（175），具有相应中心开口以露出电路板层的相对表面的顶部框架（179）和作为螺钉的压缩装置 ，螺栓等，用于将z轴压缩力施加到底板，顶框架和其间的面板层。 装载卡盘包括用于接收外围框架固定装置的底板的外围边缘。 真空工作台位于由装载卡盘的周边边缘和外围框架固定装置的外围框架所限定的区域内，与它们共面。 真空工作台包括可滑动的支承表面（131），具有用于拉伸真空以将面板保持在适当位置的真空孔（133），以及滑动致动器，用于移动可滑动的支承表面以将xy轴张力施加到支承表面上的面板 。 然后将固定面板放置在气密转移容器中，其具有基本上无污染的气氛。 转移容器的壁由基本上无颗粒的未填充的聚合物如聚碳酸酯制成。 其中一个端壁是进入墙。 进入壁具有由铁磁垫圈包围的开口。 该垫圈开口适于容纳铁磁门板。 转移容器在一端具有密封门。 然后将转移容器与过程外壳进入可密封的，基本上气密的互锁。 该过程外壳还具有基本上无污染的气氛，并且在一端具有密封门。 在转移容器和处理外壳之间以及两个门的表面之间形成气密密封。 这是为了避免将表面污染物引入工艺外壳并转移容器环境。 接下来，两扇门同时打开。 这是为了允许将至少一个面板及其固定装置从转移容器转移到过程外壳中。 在过程外壳内部，面板被传送到制造过程的过程站。 最后，面板及其固定装置从过程外壳转移到转移容器中。 这可能是相同的容器或不同的容器。 然后将过程外壳和转移容器的门关闭​​并密封。 还公开了一种制造系统，其具有通过过程间转移容器连接的具有“洁净室”环境的隔离岛，用于转移过程中的工件。 该系统在进程外壳和进程间转移容器之间具有气闸传送口。 制造和拆卸气闸传输端口在处理外壳和转移容器中具有面对的可密封的门。 这些门在处理外壳和转移容器的空气密封面对的凹部中。 至少一个外围垫圈围绕凹槽和一对门。 这在气闸中提供了基本洁净的房间环境。 处理间转移容器中的可密封门由铁磁材料制成并且位于铁磁性垫圈上，而过程外壳中的可密封门具有可控电磁夹具。

    Method and apparatus for forming pins of an extrudable material in a substrate
    7.
    发明公开
    Method and apparatus for forming pins of an extrudable material in a substrate 失效
    Verfahren und Vorrichtung zum Formen von Stiften aus squeeierbarem材料在einem Substrat。

    公开(公告)号：EP0287859A2

    公开(公告)日：1988-10-26

    申请号：EP88105085.0

    申请日：1988-03-29

    申请人： International Business Machines Corporation

    发明人： Fey, Donald ,  Pierson, Mark Vincent ,  Legg, John Thomas

    IPC分类号： H01R43/16 ,  H01R43/20

    CPC分类号： H01R43/20 ,  H05K1/095 ,  H05K3/10 ,  H05K3/4069 ,  Y10T29/49153 ,  Y10T29/53209

    摘要： Method and apparatus utilizing the known technique of extrusion to form a plurality of very small pins, with diameters of 0,5 mm or smaller, in a substrate (14) of electrically nonconductive material. The number of pins is 360 or more, and the electrically conductive material described in the extrusion process is copper. A pin die (12) is formed with the same number and pattern of holes as are in a blank substrate, and it is positioned over an extrusion die (13) with matching orifices (19, 20) that is fixed on an extrusion press (46). A head die (11) presses the blank substrate firmly on the pin die during the extrusion operation, and when completed, the pins are sheared and the substrate is ejected as a new blank is positioned to repeat the cycle.

    摘要翻译： 利用已知的挤出技术在不导电材料的衬底（14）中形成直径为0.5mm或更小的多个非常小的销的方法和装置。 引脚数为360以上，挤出工序中描述的导电材料为铜。 销模具（12）形成有与坯料相同数量和图案的孔，并且其被定位在具有固定在挤压机上的匹配孔（19,20）的挤出模具（13）上方 46）。 在挤出操作期间，头模具（11）将坯料基板牢固地按压在销模具上，并且当完成时，销被剪切并且基板被弹出，因为新的坯料被定位成重复该循环。