公开(公告)号：EP3010943A4

公开(公告)日：2017-04-26

申请号：EP14840642

申请日：2014-08-27

申请人： CANON KK

发明人： KITAGAWA KENJI ,  ITO TOSHIKI ,  YONEZAWA SHIORI ,  KAWASAKI YOUJI

IPC分类号： C08F2/44 ,  H05K3/28

CPC分类号： C08K5/0008 ,  B29C43/02 ,  B29K2105/0002 ,  B29L2011/00 ,  B29L2031/34 ,  C08F2/44 ,  C08F2/48 ,  C08J5/18 ,  C08J2347/00 ,  C08K5/06 ,  G03F7/0002 ,  G03F7/027 ,  C08F2222/1013 ,  C08F2220/185 ,  C08F2220/1875

公开(公告)号：EP3172247A4

公开(公告)日：2018-03-21

申请号：EP15824327

申请日：2015-07-22

申请人： CANON KK

发明人： ITO TOSHIKI ,  HONMA TAKESHI ,  YONEZAWA SHIORI ,  OTANI TOMONORI ,  IWASHITA KAZUMI

IPC分类号： G03F7/00 ,  C08F2/46 ,  C08F20/20 ,  G03F7/027 ,  G03F7/029 ,  H01L21/027 ,  H01L21/3065

CPC分类号： C08F220/18 ,  B05D3/06 ,  B05D3/12 ,  C08F2/48 ,  C08F222/10 ,  C08F222/1006 ,  C08F2222/102 ,  G02B1/04 ,  G03F7/0002 ,  G03F7/027 ,  G03F7/029 ,  H01L21/0273 ,  H01L21/0274 ,  H01L21/4846 ,  H05K3/06 ,  H05K3/064

摘要： A photocurable composition contains a polymerizable compound; and a photopolymerization initiator, in which the photocurable composition contains a compound represented by General Formula (1) shown below as the polymerizable compound, and in which, in General Formula (1), Ar represents a monovalent aromatic group which may have a substituent, R1 represents an alkyl group which may have a substituent or a hydrogen atom, R2 represents an alkyl group having (m + n) valences which may have a substituent, m is an integer of 2 or more, and n is an integer of 1 or more.

公开(公告)号：EP3000122A4

公开(公告)日：2016-12-28

申请号：EP14818779

申请日：2014-06-19

申请人： CANON KK

发明人： HONMA TAKESHI ,  ITO TOSHIKI ,  YONEZAWA SHIORI ,  CHIBA KEIKO ,  YAMASHITA KEIJI

IPC分类号： H01L21/027 ,  B29C33/60 ,  B29C59/02 ,  C08F2/44 ,  C08F2/50 ,  C08F220/18 ,  C08K5/05

CPC分类号： B29C59/026 ,  B29C33/62 ,  B29C59/002 ,  B29C59/005 ,  B29K2033/08 ,  B29K2105/0005 ,  C08F2/44 ,  C08F2/50 ,  C08F220/18 ,  C08F222/1006 ,  C08K2201/00 ,  C08L33/08 ,  G03F7/0002 ,  H01L21/0271 ,  H01L21/266 ,  C08F2220/1875 ,  C08F2222/1013

摘要： In an imprint method in a condensable gas atmosphere, the force (mold releasing force) required to separate a mold from a resist cured film (mold release) has been large. A photocurable composition for performing imprint in an atmosphere containing a condensable gas includes a component (A) which is a (meth)acrylate monomer, a component (B) which is a photopolymerization initiator; and a component (C) which is a mold releasing agent. The saturated solubility of the component (C) in the condensable gas at 5 degrees (Celsius) and 1 atm is 50% by weight or more, the condensable gas being in a liquid state at 5 degrees (Celsius) and 1 atm.

公开(公告)号：EP3000121A4

公开(公告)日：2016-12-28

申请号：EP14818475

申请日：2014-06-19

申请人： CANON KK

发明人： YONEZAWA SHIORI ,  ITO TOSHIKI ,  YAMASHITA KEIJI ,  CHIBA KEIKO ,  KAWASAKI YOUJI

IPC分类号： H01L21/027 ,  B29C59/02 ,  C08F2/44 ,  C08F2/50 ,  C08F20/50 ,  C08K5/05

CPC分类号： B29C59/005 ,  B29C59/002 ,  B29C59/022 ,  B29C59/026 ,  B29C2059/023 ,  B29K2033/08 ,  B29K2105/0005 ,  C08F2/44 ,  C08F2/50 ,  C08L33/08 ,  G03F7/0002 ,  C08F2220/1875 ,  C08F2222/1013

摘要： An imprint method that uses a condensable gas process has a problem in that the surface of a resist cured film is rough. This is resolved by a photocurable composition used for performing imprint in an atmosphere containing a condensable gas. The photocurable composition contains a component (A) which is a (meth)acrylate monomer, a component (B) which is a photopolymerization initiator, and a component (C) which is a mold releasing agent. A saturated solubility of the component (C) in the condensable gas at 5 degrees (Celsius) and 1 atm is 5% by weight or less, the condensable gas being in a liquid state at 5 degrees (Celsius) and 1 atm.

摘要翻译： 使用可冷凝气体工艺的压印方法存在抗蚀剂固化膜的表面粗糙的问题。 这通过用于在含有可冷凝气体的气氛中进行印迹的光固化性组合物来解决。 光固化性组合物含有作为（甲基）丙烯酸酯单体的组分（A），作为光聚合引发剂的组分（B）和作为脱模剂的组分（C）。 5℃（1摄氏度）和1个大气压下的可冷凝气体中的成分（C）的饱和溶解度为5重量％以下，可冷凝气体在5℃（1摄氏度）和1个大气压下为液态。

公开(公告)号：EP3167477A4

公开(公告)日：2018-01-03

申请号：EP15836759

申请日：2015-08-18

申请人： CANON KK

发明人： ITO TOSHIKI ,  HONMA TAKESHI ,  YONEZAWA SHIORI

IPC分类号： H01L21/027 ,  C08F2/44 ,  C08F2/50 ,  C08F222/10 ,  C09D4/00 ,  G03F7/027

CPC分类号： H01L21/027 ,  C08F2/44 ,  C08F2/48 ,  C08F2/50 ,  C08F222/1006 ,  C09D4/00 ,  G03F7/0002 ,  G03F7/027 ,  C08F2222/1013 ,  C08F2220/185 ,  C08F2220/1875

摘要： A photocurable composition contains a polymerizable compound (A) satisfying OA=NA/(NC,A−NO,A), wherein NA, NC,A and NO,A represent the total number of atoms, the number of carbon atoms, and the number of oxygen atoms, respectively, in (A); and a non-polymerizable component (E) containing at least one compound (X) including a photopolymerization initiator (B), in a proportion of 10% to 50% relative to the total weight of (A) and (E). The component (E) has a weight average molecular weight of 250 or less. The compound (X) satisfies OX=NX/(NC,X−NO,X). NX, NC,X and NO,X represent the total number of atoms, the number of carbon atoms, and the number of oxygen atoms, respectively, in the corresponding compound (X). The composition satisfies: OA−OE>1.00; and OAE

公开(公告)号：EP3039707A4

公开(公告)日：2017-05-03

申请号：EP14840489

申请日：2014-08-22

申请人： CANON KK

发明人： HONMA TAKESHI ,  ITO TOSHIKI ,  KATO JUN ,  YONEZAWA SHIORI ,  KAWASAKI YOUJI

IPC分类号： H01L21/027 ,  B29C59/02 ,  C08F2/50 ,  C09D4/00 ,  G02B1/12 ,  G03F7/00 ,  G03F7/031 ,  H01L21/311 ,  H01L21/3115

CPC分类号： C08F2/50 ,  C09D4/00 ,  G02B1/12 ,  G03F7/0002 ,  G03F7/031 ,  H01L21/31144 ,  H01L21/31155 ,  C08F2220/1875 ,  C08F2220/185 ,  C08F2222/1013 ,  C08F2222/102

摘要： A curable composition for photoimprint at least includes a polymerizable compound component (A) and a photopolymerization initiator component (B) and satisfies expression (1) and (2): 0.800≦Er10/Er200  (1) 2.55≦Er10  (2) wherein, Er10 represents the reduced modulus (GPa) of a photocured film prepared by exposing a film of the curable composition for photoimprint to light of 10 mJ/cm2; and Er200 represents the reduced modulus (GPa) of a photocured film prepared by exposing a film of the curable composition for photoimprint to light of 200 mJ/cm2.

摘要翻译： 一种光压印用固化性组合物，其特征在于，至少含有聚合性化合物成分（A）和光聚合引发剂成分（B），满足式（1）和（2）：0.800≤Er10/ Er200（1）2.55≤Er10（2） Er10表示通过将用于光压印的可固化组合物的膜暴露于10mJ / cm 2的光而制备的光固化膜的折合模量（GPa） 并且Er200表示通过将用于光压印的可固化组合物的膜暴露于200mJ / cm 2的光而制备的光固化膜的还原模量（GPa）。

公开(公告)号：EP3017460A4

公开(公告)日：2017-03-15

申请号：EP14846207

申请日：2014-09-05

申请人： CANON KK

发明人： ITO TOSHIKI ,  HONMA TAKESHI ,  YONEZAWA SHIORI ,  KAWASAKI YOUJI

IPC分类号： H01L21/027 ,  B29C59/02 ,  B81C1/00 ,  G03F7/20

CPC分类号： G03F7/031 ,  C08F222/1006 ,  C08F2222/1013 ,  G03F7/0002 ,  G03F7/027 ,  G03F7/029