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公开(公告)号：EP3411513A1
公开(公告)日：2018-12-12
申请号：EP17703720.7
申请日：2017-02-03
发明人： MORGNER, Henry , METZNER, Christoph , HIRSCH, Daniel , ZYWITZKI, Olaf , DECKER, Ludwig , WERNER, Torsten , SIEPCHEN, Bastian , SPÄTH, Bettina , VELAPPAN, Krishnakumar , KRAFT, Christian , DROST, Christian
CPC分类号： C23C14/0629 , C23C14/0021 , C23C14/02 , C23C14/562 , C23C16/306 , H01L31/02963 , H01L31/206
摘要： The invention relates to a method for depositing a CdTe layer on a substrate (2) in a vacuum chamber (1) by means of physical gas phase deposition, in which the substrate (2) is heated to a coating temperature before the deposition process and then guided past a vessel (3) in which CdTe (4) is converted into a vapour state, a gaseous component with an increased pressure (compared to the vacuum in the vacuum chamber) flowing through at least one inlet (5), against the substrate (2) surface to be coated, such that the gaseous component is adsorbed on the substrate (2) surface to be coated before the substrate (2) is guided past the at least one vessel (3).
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公开(公告)号：EP1029105B1
公开(公告)日：2004-02-04
申请号：EP98954899.5
申请日：1998-11-06
发明人： SCHILLER, Siegfried , GOEDICKE, Klaus , FIETZKE, Fred , ZYWITZKI, Olaf , SJÖSTRAND, Mats , LJUNGBERG, Björn , ALFREDSSON, Viveka , HILDING, Thomas
CPC分类号： C23C14/081 , C23C14/352 , Y10T407/27 , Y10T428/24975 , Y10T428/25 , Y10T428/252 , Y10T428/265
摘要： The present invention describes a coated cutting tool for metal machining. The coating is composed of one or more layers of refractory compounds of which at least one layer consists of fine-grained, crystalline gamma -phase alumina, Al2O3, with a grain size less than 0.1 mu m. The Al2O3-layer is deposited with a bipolar pulsed DMS technique (Dual Magnetron Sputtering) at substrate temperature in the range 450 DEG C to 700 DEG C, preferably 550 DEG C to 650 DEG C, depending on the particular material of the tool body to be coated. The alumina layer is very strongly textured in the (440)-direction. The Al2O3-layer is virtually free of cracks and halogen impurities and the Al2O3-layer gives the cutting edge of the tool an extremely smooth surface finish, which results in an improved surface finish also of the workpiece being machined. When the coated cemented carbide cutting tools are used in the machining of steel or cast iron, several important improvements compared to prior art have been observed.
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公开(公告)号：EP3645285A1
公开(公告)日：2020-05-06
申请号：EP18734214.2
申请日：2018-06-26
申请人： Dupont Teijin Films U.S. Limited Partnership , Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
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