公开(公告)号：EP1150318A1

公开(公告)日：2001-10-31

申请号：EP99959858.4

申请日：1999-12-16

申请人： NEC Corporation

发明人： SUZUKI, Kenichiro ,  ARA, Youichi ,  CHEN, Shuguang

IPC分类号： H01H59/00 ,  B81B3/00 ,  B81C1/00

CPC分类号： B81B3/0072 ,  B81B2203/0118 ,  H01H1/20 ,  H01H59/0009 ,  Y10T29/4916

摘要： To realize a micro switch which can be mass-produced, is low-cost, and is high-performance.
The micro switch includes: a supporting member 7 provided on a substrate 1 in such a manner as to be adjacent to the gap between two signal lines and to have a predetermined height with respect to the substrate 1; a flexible beam member (cantilever arm 8) provided in such a manner as to project from the supporting member almost horizontally to the above substrate surface and to extend so far that its part faces the above gap; a contact electrode 5 provided on the substrate 1 side of the beam member at least in such a position so as to face the gap, and a lower electrode 4 provided on the substrate 1 in such a manner as to face part of the beam member. A part of the beam member, ranging from the portion at which it is connected to the above supporting member 7 to the portion facing the above lower electrode 4, is allowed to be conductive to function as an upper electrode 9. And the thermal expansion coefficients of the beam member are allowed to be almost symmetric in the thickness direction perpendicular to the above substrate 1 surface, at least in a region ranging from the portion at which it is connected to the above supporting member 7 to the vicinity of the portion facing the above lower electrode 4.

摘要翻译： 实现可批量生产的微型开关，成本低，性能高。 微型开关包括：支撑构件7，其设置在与两个信号线之间的间隙相邻并且相对于基板1具有预定高度的方式设置在基板1上; 柔性梁构件（悬臂8），其以从支撑构件几乎水平地突出到上述基板表面的方式设置并延伸到其部分面向上述间隙; 设置在梁构件的基板1侧的接触电极5至少在与该间隙相对的这样的位置上;以及下部电极4，其以与梁构件的一部分相对的方式设置在基板1上。 梁构件的从连接到上述支撑构件7的部分到面向上述下部电极4的部分的一部分被允许导电以用作上部电极9.并且热膨胀系数 至少在从连接到上述支撑构件7的部分到面向上述基板1表面的部分附近的区域中，至少在与该基板1表面垂直的厚度方向上几乎对称。 在下电极4上方