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公开(公告)号：EP2927746A2
公开(公告)日：2015-10-07
申请号：EP15156223.8
申请日：2015-02-24
发明人： Horikoshi, Jun
CPC分类号： G03F1/64 , G03F1/142 , G03F1/22 , G03F1/62 , G03F7/2002
摘要： There is provided a pellicle having a frame 12, a film 11 and an adhesive 13 for bonding the film 11 to the frame 12, and this adhesive 13 is a silicone compound having a low outgassing tendency and high heat resistance; in a better mode case, it can maintain its adhesive strength at temperatures 100 - 200 degrees C and it exhibits results of TML being 1.0 % or lower and CVCM being 0.1 % or lower when tested in accordance with ASTM E595-93; thus this pellicle is useful for EUV light exposure lithography.
摘要翻译： 提供了具有框架12，薄膜11和用于将薄膜11粘合到框架12上的粘合剂13的防护薄膜，该粘合剂13是具有低脱气倾向和高耐热性的硅酮化合物; 在更好的模式下，它可以在100-200℃的温度下保持其粘合强度，并且当根据ASTM E595-93测试时，其显示TML的结果为1.0％或更低，CVCM为0.1％或更低。 因此该防护薄膜可用于EUV曝光光刻。
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公开(公告)号：EP2182031A1
公开(公告)日：2010-05-05
申请号：EP09252535.1
申请日：2009-10-30
发明人： Horikoshi, Jun , Kimura, Tsuneo , Horikoshi, Jun
CPC分类号： C08L83/04 , C08G77/12 , C08G77/50 , C08K3/22 , C08L2666/44 , C08L2666/54
摘要： A flame retardant organopolysiloxane composition which exhibits excellent heat resistance, and even when exposed to high temperatures, suffers no foaming within the cured product, meaning no deterioration occurs in the waterproof and moisture-proof properties or the electrical insulation properties. The composition comprises: (A) an organopolysiloxane represented by a general formula (1) :
(wherein R 1 represents a hydrogen atom or a monovalent hydrocarbon group, R 2 represents a monovalent hydrocarbon group, each Z independently represents an oxygen atom or a divalent hydrocarbon group, a represents 0, 1 or 2, and n represents an integer of 10 or greater), (B) boehmite, and (C) an organosilicon compound represented by a general formula (2) :
R 3 b SiX 4-b (2)
(wherein R 3 represents a monovalent hydrocarbon group, X represents a hydrolyzable group, and b represents 0, 1 or 2), or a partial hydrolysis-condensation product thereof, or a combination thereof.摘要翻译： 耐热性优异的阻燃性有机聚硅氧烷组合物即使暴露在高温下也不会在固化物中发泡，因此防水防潮性或电绝缘性不发生变质。 该组合物包含：（A）由通式（1）表示的有机聚硅氧烷：其中R 1表示氢原子或一价烃基，R 2表示一价烃基，各Z独立地表示氧原子或二价 烃基，a表示0,1或2，n表示10以上的整数），（B）勃姆石，（C）由通式（2）表示的有机硅化合物：€ƒ€ƒ€ ƒ€ƒ€ƒ€ƒR 3 b SiX 4-b€ƒ€ƒ€ƒ（2）（其中R 3表示一价烃基，X表示可水解基团，b表示0， 1或2）或其部分水解缩合产物，或其组合。
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公开(公告)号：EP2927745A3
公开(公告)日：2016-07-13
申请号：EP15157728.5
申请日：2015-03-05
发明人： Horikoshi, Jun
摘要： There is provided a pellicle 1 for lithography having a frame 12, a film 11 and an agglutinant layer 13 (an adhesive to bond the pellicle on a photomask), in which the agglutinant layer 13 is doped with a luminescence material so as to facilitate the inspection of the quality of the adhesion between the agglutinant layer 13 and the photomask; preferably the luminescence material is a kind that glows in response to UV irradiation, and a preferable dosage of the luminescence material is no less than 0.01 mass % but less than 1.0 mass %.
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公开(公告)号：EP2860583A2
公开(公告)日：2015-04-15
申请号：EP14182098.5
申请日：2014-08-25
发明人： Horikoshi, Jun
摘要： There is provided a pellicle having a frame, a membrane and an agglutinant layer (adhesive to bond the pellicle on a photo mask) in which the release liner (detachable sheet) laid to the agglutinant layer for protection thereof is controlled to have a surface roughness of 5 - 30 micrometers on the side of the liner which is attached to the agglutinant layer, with a result that the releasability of the liner is improved suitably.
摘要翻译： 提供一种防护薄膜组件，其具有框架，膜和凝集层（粘合剂以将防护薄膜组合在光掩模上），其中放置到用于保护的凝集层的剥离衬垫（可分离片）被控制为具有表面粗糙度 在附着于凝集层的衬里侧上为5-30微米，结果衬垫的释放性得到适当改善。
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6.发明授权AN AGGLUTINANT FOR A PELLICLE, A PELLICLE USING IT AND A METHOD FOR EVALUATING A PELLICLE 有权胶水的防护薄膜，薄膜与使用DESSELBIGEN和方法用于评估的防护膜
公开(公告)号：EP3037879B1
公开(公告)日：2017-05-31
申请号：EP15003172.2
申请日：2015-11-05
发明人： Horikoshi, Jun , Yanase, Yu
IPC分类号： G03F1/64
CPC分类号： G03F1/64 , C09K11/7734 , G01N21/70
摘要： A pellicle is proposed in which the agglutinant layer which enable the pellicle to be adhered to a photomask is doped with a mechanoluminescent material so that the uniformness of the thickness of the agglutinant layer can be confirmed, when the pellicle is adhered to the photomask, by observing visually or by CCD camera for any irregularity in the pattern of the light emitted from the agglutinant layer.
摘要翻译： 防尘薄膜组件在其中提出的粘着剂层，其使所述薄膜被粘附到光掩模掺杂有机械发光材料所以做了粘着剂层的厚度的均匀岬可以确认，当防尘薄膜组件贴合于掩模，通过 视觉上或通过CCD照相机观察用于从粘着剂层发出的光的图案的任何不规则性。
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7.发明公开AN AGGLUTINANT FOR PELLICLE AND A PELLICLE USING IT 审中-公开KLEBEMITTELFÜREIN PELLIKEL UND PELLIKEL DAMIT
公开(公告)号：EP3056943A1
公开(公告)日：2016-08-17
申请号：EP15200105.3
申请日：2015-12-15
发明人： Horikoshi, Jun , Yanase, Yu
IPC分类号： G03F1/64
CPC分类号： G03F1/64 , C09J133/08 , C09J183/08 , G03F1/62
摘要： A pellicle is proposed in which the agglutinant layer which enables the pellicle to adhere to a photomask is doped with a de-foaming agent which depends on a reactive fluorine-modified silicone oil for its anti-foaming performance, and typically such reactive fluorine-modified silicone oil has a vinyl group at both ends of its molecular chain.
摘要翻译： 提出了一种防护薄膜组件，其中使防护薄膜组合物粘附到光掩模上的凝集层掺杂有取决于反应性氟改性硅油用于其消泡性能的消泡剂，并且通常这种反应性氟改性 硅油在其分子链的两端具有乙烯基。
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8.发明公开AN AGGLUTINANT FOR PELLICLE, A PELLICLE USING IT AND A METHOD FOR EVALUATING PELLICLE 有权胶水的防护薄膜，薄膜与使用DESSELBIGEN和方法用于评估的防护膜
公开(公告)号：EP3037879A1
公开(公告)日：2016-06-29
申请号：EP15003172.2
申请日：2015-11-05
发明人： Horikoshi, Jun , Yanase, Yu
IPC分类号： G03F1/64
CPC分类号： G03F1/64 , C09K11/7734 , G01N21/70
摘要： A pellicle is proposed in which the agglutinant layer which enable the pellicle to be adhered to a photomask is doped with a mechanoluminescent material so that the uniformness of the thickness of the agglutinant layer can be confirmed, when the pellicle is adhered to the photomask, by observing visually or by CCD camera for any irregularity in the pattern of the light emitted from the agglutinant layer.
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9.发明公开AN AGGLUTINANT FOR PELLICLE AND A PELLICLE INCLUDING THE SAME 审中-公开PELLIKELKLEBER UND PELLIKEL MIT DIESEM KLEBER
公开(公告)号：EP2927745A2
公开(公告)日：2015-10-07
申请号：EP15157728.5
申请日：2015-03-05
发明人： Horikoshi, Jun
摘要： There is provided a pellicle 1 for lithography having a frame 12, a film 11 and an agglutinant layer 13 (an adhesive to bond the pellicle on a photomask), in which the agglutinant layer 13 is doped with a luminescence material so as to facilitate the inspection of the quality of the adhesion between the agglutinant layer 13 and the photomask; preferably the luminescence material is a kind that glows in response to UV irradiation, and a preferable dosage of the luminescence material is no less than 0.01 mass % but less than 1.0 mass %.
摘要翻译： 提供了一种用于光刻的防护薄膜1，其具有框架12，膜11和凝集层13（粘合剂以将防护薄膜组合在光掩模上），其中凝集层13掺杂有发光材料，以便于 检查凝集层13和光掩模之间的粘附质量; 优选地，发光材料是响应于紫外线照射而发光的那种，并且发光材料的优选剂量不小于0.01质量％但小于1.0质量％。
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