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1.
公开(公告)号:EP2962331A4
公开(公告)日:2016-11-09
申请号:EP14756491
申请日:2014-02-27
发明人: TSU RAPHAEL , DIETZ NIKOLAUS , FERGUSON IAN
IPC分类号: H01L43/06 , C23C16/30 , H01L21/205 , H01L29/06 , H01L29/15 , H01L29/20 , H01L29/205 , H01L29/267 , H01L31/0304 , H01L31/0352 , H03K3/011
CPC分类号: H01L29/0688 , H01L29/15 , H01L29/2003 , H01L29/205 , H01L29/267 , H01L31/03044 , H01L31/035236 , H03K3/011 , Y02E10/544
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2.HIGH PRESSURE CHEMICAL VAPOR DEPOSITION APPARATUSES, METHODS, AND COMPOSITIONS PRODUCED THEREWITH 审中-公开
标题翻译: 高压CVP设备,方法,因此产生的复合物公开(公告)号:EP2464760A4
公开(公告)日:2013-08-28
申请号:EP10808760
申请日:2010-08-12
发明人: DIETZ NIKOLAUS
CPC分类号: C30B25/14 , C23C16/303 , C23C16/45502 , C23C16/45523 , C23C16/45544 , C23C16/4584 , C23C16/52 , C30B25/165 , C30B29/403 , G05D11/135 , H01L21/0254 , H01L33/32
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