公开(公告)号：EP4443482A1

公开(公告)日：2024-10-09

申请号：EP21966041.2

申请日：2021-12-02

申请人： ACM Research (Shanghai) Inc. ,  ACM Research (Lingang), Inc. ,  ACM Research Korea Co., Ltd. ,  Cleanchip Technologies Limited

发明人： WANG, Hui ,  ZHANG, Shan ,  SHEN, Hui ,  LV, Ce ,  ZHOU, Dongcheng ,  KIM, John ,  PARK, Jae Sung ,  WANG, Jian ,  WANG, Jun ,  JIA, Shena ,  ZHANG, Xiaoyan ,  KIM, Yy

IPC分类号： H01L21/673 ,  C23C16/458

CPC分类号： C23C16/458 ,  H01L21/673

摘要： A high-temperature tube furnace comprises: a process tube (1) with a top cover (101) arranged on the top end thereof, the top cover (101) being provided with through holes (1011); a gas supply pipe (2) communicating with the through holes (1011) of the top cover (101) of the process tube (1), process gas being introduced into the process tube (1) through the gas supply pipe (2) and the through holes (1011) of the top cover (101) of the process tube (1); a wafer boat (3) arranged in the process tube (1), and comprising a supporting frame (301) and supporting plates (302), the supporting plates (302) being distributed in multiple layers along the length direction of the supporting frame (301) and used for supporting multiple substrates (w), each substrate (w) being placed on one supporting plate and each supporting plate supporting the entire bottom of the substrate (w). The multiple layers of supporting plates (302) are provided, and each supporting plate (302) supports the entire bottom of a substrate (w), thus avoiding defects of lattices in the substrates (w) caused by downward deformation of the substrates (w) during a high temperature process of 1200°C or above, and improving the yield of chips.

公开(公告)号：EP4431633A1

公开(公告)日：2024-09-18

申请号：EP23217887.1

申请日：2023-12-19

申请人： Honeywell International Inc.

发明人： MEHR, Mehrad ,  JADIDIAN, Bahram

IPC分类号： C23C16/04 ,  C23C16/44 ,  C23C16/458 ,  C23C16/54 ,  B05C13/02 ,  B05C15/00 ,  D06M23/00

CPC分类号： C23C16/545 ,  C23C16/4412 ,  C23C16/045 ,  C23C16/54 ,  C04B35/80 ,  C04B35/62857 ,  C04B35/62884 ,  C23C16/458 ,  B05C15/00 ,  D06M23/00 ,  B05C13/02

摘要： The disclosure describes continuous vacuum processing of a fiber tow. Continuous vacuum processing includes passing a fiber tow through a plurality of vacuum chambers and operating at least two vacuum chambers of the plurality of vacuum chambers at a different level of vacuum pressure than each other.

公开(公告)号：EP3931366B1

公开(公告)日：2024-07-31

申请号：EP20706535.0

申请日：2020-03-02

IPC分类号： C23C14/50 ,  C23C14/56 ,  C23C16/458

CPC分类号： C23C14/505 ,  C23C14/566 ,  C23C16/458

公开(公告)号：EP4368746A1

公开(公告)日：2024-05-15

申请号：EP23203149.2

申请日：2023-10-12

申请人： General Electric Company

发明人： TETI, Guido ,  HAYASHI, Steven Robert ,  BUI, Pierre-Andre ,  SERAFIN, Wiktor ,  SMITH, Timothy Patrick ,  RUUD, James Anthony

IPC分类号： C23C16/458 ,  C23C16/52 ,  C23C16/54 ,  C04B35/628 ,  C04B35/80

CPC分类号： C23C16/458 ,  C23C16/52 ,  C23C16/545 ,  C04B35/62884 ,  C04B35/80

摘要： Frames (112) and methods are provided for coating a reinforcing fiber (104, 106') of a composite component (100). The frame (112) includes a first frame end (118A) having a first cross-sectional shape, the first cross-sectional shape including one or more contact locations (124), the reinforcing fiber (104, 106') contacting the first frame end (118A) at the one or more contact locations (124), wherein a ratio of a length of the reinforcing fiber (104, 106') within a minimum distance from the frame (112) to the minimum distance is within a range of 0.2 to 20.

公开(公告)号：EP4361309A1

公开(公告)日：2024-05-01

申请号：EP23203050.2

申请日：2023-10-11

申请人： General Electric Company

发明人： KILYK, Thomas John ,  MANTKOWSKI, Thomas Edward ,  RAINWATER, Micah Thomas

IPC分类号： C23C16/10 ,  C23C16/12 ,  C23C16/458 ,  C23C10/08 ,  C23C30/00 ,  F01D5/28

CPC分类号： C23C16/10 ,  C23C16/12 ,  C23C16/458 ,  F05D2230/9020130101 ,  F05D2230/31320130101 ,  F05D2300/13120130101

摘要： A deposition support apparatus (20) and method (100) for coating a component (10), the deposition support apparatus (20) including a mask container (22) defining an interior (30) and having an opening (34) providing access to the interior (30). A barrier plate (36) with a component aperture (38) wherein the component (10) extends through the component aperture (38) with a first portion (54) of the component (10) located within the interior (30) and a second portion (56) of the component (10) extending above the at least one barrier plate (36).

公开(公告)号：EP2674513B1

公开(公告)日：2018-11-14

申请号：EP13183579.5

申请日：2010-05-12

申请人： SiO2 Medical Products, Inc.

发明人： Felts, John T. ,  Abrams, Robert S. ,  Fisk, Thomas E.

IPC分类号： C23C16/04 ,  C23C16/40 ,  C23C16/505 ,  C23C16/52 ,  C23C16/54 ,  G01N15/08 ,  G01N33/00

CPC分类号： A61B5/150206 ,  A61B5/154 ,  A61L31/088 ,  A61L31/10 ,  A61L31/14 ,  A61L2400/10 ,  A61L2420/02 ,  A61L2420/08 ,  B05C13/00 ,  B05C13/025 ,  B23Q7/04 ,  B23Q7/1494 ,  C23C16/045 ,  C23C16/401 ,  C23C16/458 ,  C23C16/50 ,  C23C16/505 ,  C23C16/52 ,  C23C16/54 ,  G01N15/082 ,  G01N23/2273 ,  G01N30/7206 ,  G01N33/00 ,  G01N2033/0096 ,  Y10T428/13 ,  Y10T428/1383

摘要： A vessel processing system for coating of a vessel is provided, the system comprising: a first processing station configured for performing a first processing of an interior surface of the vessel, a second processing station spaced from the first processing station and configured for performing a second processing of the interior surface of the vessel, a vessel holder comprising a vessel port configured to receive and seat an opening of the vessel for processing the interior surface of the seated vessel via the vessel port at the first processing station and at the second processing station, and a conveyor arrangement for transporting the vessel holder and the seated vessel after the first processing from the first processing station to the second processing station for the second processing of the interior surface of the seated vessel at the second processing station.

公开(公告)号：EP2251452B1

公开(公告)日：2018-07-18

申请号：EP10162756.0

申请日：2010-05-12

申请人： SiO2 Medical Products, Inc.

发明人： Abrams, Robert S. ,  Felts, John T. ,  Fisk, Thomas E. ,  Sagona, Peter J.

IPC分类号： C23C16/505 ,  G01N15/08 ,  A61B5/15

CPC分类号： A61B5/150206 ,  A61B5/154 ,  A61L31/088 ,  A61L31/10 ,  A61L31/14 ,  A61L2400/10 ,  A61L2420/02 ,  A61L2420/08 ,  B05C13/00 ,  B05C13/025 ,  B23Q7/04 ,  B23Q7/1494 ,  C23C16/045 ,  C23C16/401 ,  C23C16/458 ,  C23C16/50 ,  C23C16/505 ,  C23C16/52 ,  C23C16/54 ,  G01N15/082 ,  G01N23/2273 ,  G01N30/7206 ,  G01N33/00 ,  G01N2033/0096 ,  Y10T428/13 ,  Y10T428/1383

摘要： A vessel processing system for coating of a vessel is provided, the system comprising: a first processing station configured for performing a first processing of an interior surface of the vessel, a second processing station spaced from the first processing station and configured for performing a second processing of the interior surface of the vessel, a vessel holder comprising a vessel port configured to receive and seat an opening of the vessel for processing the interior surface of the seated vessel via the vessel port at the first processing station and at the second processing station, and a conveyor arrangement for transporting the vessel holder and the seated vessel after the first processing from the first processing station to the second processing station for the second processing of the interior surface of the seated vessel at the second processing station.

公开(公告)号：EP2539485B1

公开(公告)日：2018-06-20

申请号：EP11745450.4

申请日：2011-02-22

申请人： On-X Life Technologies Inc.

发明人： SEELEY, Mark E. ,  SOUTHARD, Fletcher D. ,  MEWHORT, Mike J. ,  ROBINSON, Joseph E. ,  LEIKAM, Roger W. ,  STARK, Jeff W. ,  BICKERTON, Brett A. ,  STUPKA, Jonathan C. ,  WILDE, David ,  WOZENCRAFT, Cephas M.

IPC分类号： C23C16/442 ,  C23C16/32 ,  B01J8/24 ,  B05C3/02 ,  C23C16/26

CPC分类号： C23C16/442 ,  A61L27/303 ,  B05D1/22 ,  B05D1/60 ,  C23C16/26 ,  C23C16/458

摘要： Arrangements are provided for assembling multiple substrates for coating within a fluidized bed coater so as to deposit a coating of uniform thickness across the entire exterior surface thereof. One embodiment includes a method for coating orthopedic implants having convex and concave surfaces with pyrocarbon by pyrolytic decomposition of a hydrocarbon.

公开(公告)号：EP3194634B1

公开(公告)日：2018-06-06

申请号：EP15771874.3

申请日：2015-09-17

申请人： Oerlikon Surface Solutions AG, Pfäffikon

发明人： VOGEL, Remo ,  STEWART, Robert Eugene ,  LAFORCE, Phillip J.

IPC分类号： C23C14/04 ,  C23C16/04 ,  C23C14/50 ,  C23C16/458

CPC分类号： B05C13/02 ,  B05C21/005 ,  B23P6/00 ,  B23P15/28 ,  B25B11/002 ,  C23C14/044 ,  C23C14/50 ,  C23C16/042 ,  C23C16/458

公开(公告)号：EP3307426A1

公开(公告)日：2018-04-18

申请号：EP16812256.2

申请日：2016-06-14

申请人： ALD Nanosolutions, Inc.

发明人： SPENCER II, Joseph, Allen ,  HALL, Robert, A.

IPC分类号： B01J8/10 ,  C23C16/44 ,  C23C16/458

CPC分类号： C23C16/45551 ,  C23C16/4408 ,  C23C16/4417 ,  C23C16/442 ,  C23C16/45504 ,  C23C16/45555 ,  C23C16/458 ,  C23C16/54

摘要： Continuous spatial atomic layer deposition is performed on a particulate substrate in a continuous reactor comprising a plurality of spatially separated, precursor dosing zones and a means for moving the particulate substrate spatially through the precursor dosing zones to apply an atomic layer deposition coating thereon. The precursor dosing zones may be used simultaneously.