公开(公告)号：EP3640968B1

公开(公告)日：2024-06-12

申请号：EP19214475.6

申请日：2011-11-14

IPC分类号： H01J37/22 ,  H01J37/244 ,  H01J37/317 ,  H01J37/04 ,  H01J37/304 ,  B82Y10/00 ,  B82Y40/00

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/224 ,  H01J37/244 ,  H01J37/3177 ,  H01J2237/244520130101 ,  H01J2237/244620130101 ,  H01J2237/2457820130101 ,  H01J2237/3043320130101 ,  H01J37/3045

公开(公告)号：EP3655985B1

公开(公告)日：2024-05-22

申请号：EP18749076.8

申请日：2018-07-19

IPC分类号： H01J37/244 ,  H01J37/28

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/2449520130101 ,  H01J2237/244520130101 ,  H01J2237/2448520130101

公开(公告)号：EP4394841A1

公开(公告)日：2024-07-03

申请号：EP22217433.6

申请日：2022-12-31

申请人： ASML Netherlands B.V.

发明人： BEUKMAN, Arjan, Johannes, Anton ,  VAN WEPEREN, Ilse ,  SOKOLOV, Sergei ,  AKBULUT, Duygu

IPC分类号： H01J37/244

CPC分类号： H01J37/244 ,  H01J2237/244120130101 ,  H01J2237/244520130101 ,  H01J2237/2449520130101

摘要： An optical multiplexer, comprising: an optical waveguide; a plurality of resonators optically coupled with the optical waveguide; and a plurality of detectors, each detector of the plurality of detectors being associated with one of the resonators, each of the resonators being tuned to an individual resonance wavelength different from resonance wavelengths of other resonators of the plurality of resonators, wherein each detector of the plurality of detectors is configured to change an optical path length or refractive index of the associated resonator.

公开(公告)号：EP3050072B1

公开(公告)日：2024-06-19

申请号：EP14781263.0

申请日：2014-09-25

IPC分类号： H01J37/244 ,  H01J37/28

CPC分类号： H01J37/28 ,  H01J2237/16420130101 ,  H01J2237/18820130101 ,  H01J2237/2441520130101 ,  H01J2237/244520130101 ,  H01J2237/260820130101 ,  H01J37/244