DEVICE AND HANDLING SYSTEM FOR MEASUREMENT OF MOBILITY AND SHEET CHARGE DENSITY IN CONDUCTIVE SHEET MATERIALS
    91.
    发明公开
    DEVICE AND HANDLING SYSTEM FOR MEASUREMENT OF MOBILITY AND SHEET CHARGE DENSITY IN CONDUCTIVE SHEET MATERIALS 有权
    设备和处理系统,用于测量导电片材上迁移率和薄膜电荷密度

    公开(公告)号:EP1779124A1

    公开(公告)日:2007-05-02

    申请号:EP05779739.1

    申请日:2005-08-10

    IPC分类号: G01R27/04 G01R27/32

    摘要: An apparatus (10) for contactless measurement of sheet charge density and mobility includes a microwave source (16), a circular waveguide (50) for transmitting microwave power to a sample (59), such as a semiconductor wafer or panel for flat panel displays, at a measurement location, a first detector (18) for detecting the forward microwave power, a second detector (23) for detecting the microwave power reflected from the sample, and a third detector (95) for detecting the Hall effect power. An automatic positioning subsystem (700) is also provided for allowing automatic positioning of a wafer (59) within the test apparatus (10). The positioning system (700) includes a first end effector (706) and a rotator-lifter (704). The first end effector (706) can grasp a sheet element (59) and move it to a desired position within the test apparatus (10), while the rotator lifter (704) provides incremental adjustment of a theta angle of the sheet element (59) to allow automated mapping of an entire sheet element without the need for manual adjustment of the position of the sheet element. A second end effector (716) can be mounted opposite the first end effector (706) and can be used to automatically position the sheet element (59) within a sheet resistance testing module (718) located at an opposite end of the apparatus (10).

    摘要翻译: 对于片材的电荷密度和流动性的非接触式测量的装置(10)包括用于传输微波功率到样品(59)的微波源(16),圆形波导管(50):诸如半导体晶圆或面板用于平板显示器 ,在测量位置,第一检测器(18),用于检测前向微波功率,用于检测微波功率的第二检测器(23)从所述样品,和用于检测霍尔效应力的第三检测器(95)反射。 因此自动定位子系统(700),用于允许所述测试设备(10)内的晶片(59)的自动定位。 定位系统(700)包括第一端部执行器(706)和转子压脚提升(704)。 第一端部执行器(706)可以掌握的片材元件(59),并将其移动至测试设备(10)内的期望的位置,而旋转体升降器(704)提供所述板件的一个THETA角度的增量调节(59 ),以允许整个工作表元素的自动映射,而不需要用于片材元件的位置的手动调节。 第二端部执行器(716)可以被安装在第一端部执行器(706),并且可以被用于将片材元件(59)位于在所述装置的相对端处的薄层电阻测试模块(718)内自动定位相反(10 )。

    Method and system for monitoring the impedance of an AC power line
    93.
    发明公开
    Method and system for monitoring the impedance of an AC power line 有权
    方法和系统,用于监控线路的阻抗为AC功率传输

    公开(公告)号:EP1643256A1

    公开(公告)日:2006-04-05

    申请号:EP05021349.5

    申请日:2005-09-29

    IPC分类号: G01R27/16 G01R27/04

    CPC分类号: G01R27/16

    摘要: A technique is disclosed for determining inductive and resistive components of power line impedance. A measurement circuit switches a burden or drain resistor between power line conductors to cause a droop or sag in a voltage waveform. The voltage waveform is sampled prior to inclusion of the resistor in the circuit, as well as after to identify the droop. The short circuit between the power lines is then removed by opening the circuit and a capacitor in the test circuitry causes a resonant ring due to the inductive component of the power line impedance. Based upon the period or frequency of the resonant ring, and upon the voltage measurements with and without the resistor in the circuit, the inductive and resistive components of power line impedance can be computed.

    摘要翻译: 的技术是游离缺失盘电力线阻抗的确定性采矿电感和电阻的部件。 测量电路开关电源线导体之间的负担或漏极电阻引起的电压波形的下垂或下陷。 包含在电路中的电阻器的,以及后识别下垂之前的电压波形进行采样。 电源线之间的短路,然后通过在测试电路断开电路和电容器除去引起谐振环由于电力线阻抗的电感元件。 基于谐振环的周期或频率,并在有和没有在电路电阻上的电压测量值,电力线的阻抗的电感和电阻的部件可以被计算。

    DATA COMMUNICATIONS TERMINAL AND METHOD OF ADJUSTING A POWER SIGNAL GENERATED THEREFROM
    96.
    发明公开
    DATA COMMUNICATIONS TERMINAL AND METHOD OF ADJUSTING A POWER SIGNAL GENERATED THEREFROM 审中-公开
    通信终端和方法用于设置即生成功率信号

    公开(公告)号:EP0976203A4

    公开(公告)日:2002-08-28

    申请号:EP98964796

    申请日:1998-12-18

    申请人: MOTOROLA INC

    摘要: A data communications terminal (102) includes an antenna circuit (106) for delivering a power signal to a portable data device. The terminal further encompasses a method for automatically adjusting the power seen by the portable data device without any communications feedback from the portable data device by monitoring an impedance characteristic for the antenna circuit. When a change in the monitored impedance characteristics is detected, the data communications terminal adjusts a power level for the power signal delivered to the portable data device.

    Procédé et dispositif pour la mesure d'impédance d'antenne
    97.
    发明公开
    Procédé et dispositif pour la mesure d'impédance d'antenne 审中-公开
    Verfahren und Vorrichtung zum Messen der Antennenimpedanz

    公开(公告)号:EP1079233A1

    公开(公告)日:2001-02-28

    申请号:EP00402316.4

    申请日:2000-08-18

    申请人: THOMSON-CSF

    发明人: Berranger, Robert

    IPC分类号: G01R27/04

    CPC分类号: G01R29/10 G01R27/04

    摘要: Le dispositif comprend :

    un transformateur courant/tension (1) couplé par son enroulement primaire entre un dispositif d'accord (2) d'une antenne (3) et la sortie d'un amplificateur (4) d'alimentation de l'antenne (3)
    un premier (5a) et un deuxième (5b) dispositif de transposition de fréquence numérique en bande de base couplé respectivement à la sortie de l'amplificateur (4) et à l'enroulement secondaire du transformateur (1),
    et un dispositif de calcul (7) pour calculer l'impédance de l'antenne (3) à partir des signaux fournis par le premier (5a) et le deuxième (5b) dispositif de transposition de fréquence.

    Applications : Emetteurs HF large bande.

    摘要翻译: 两个变频器(5a,5b)从天线放大器(4)和天线电路中的电流/电压变压器(1)的次级绕组接收信号。 转移器将相位和正交分量(I,Q)提供给计算器(7),并且开关(8)使得能够首先在天线上进行测量,然后在参考阻抗(9)上进行测量。 这些测量的比率决定了天线阻抗

    NMR TUNING PROCEDURE
    99.
    发明授权
    NMR TUNING PROCEDURE 失效
    NMR调谐程序

    公开(公告)号:EP0192708B1

    公开(公告)日:1992-04-01

    申请号:EP85904378.8

    申请日:1985-08-26

    摘要: Tuning of an RF probe (10) by comparison with a 50 ohm terminator. A Fourier transform NMR spectrometer is used in the comparison operation. The spectrometer comprises an oscillator (30) modulated by a modulator (32) and a signal is directed through duplexer (34) to a probe (10). The signal output of the probe presented to duplexer (34) is directed to an RF amplifier (38). Phase sensitive detector (40) operates on a reference phase derived from the RF oscillator (30) and the RF amplifier output signal to resolve the RF amplifier signal into phase quadrature components by incorporating two phase detectors fed with reference signals at the same frequency but differing in phase by 90o. For a signal frequency exactly equal to the reference frequency, the quadrature detection method provides independent determination of two quadrature components of the signal. Analog to digital conversion (42) operates on the phase sensitive detector outputs and the digital signals are available for further processing by processor apparatus (44). The present timing procedure measures two parameters, phase and amplitude, rather than the single parameter techniques of prior art such as signal peaking, reflected wave nulling and the like. The two channels of the quadrature resolving receiver are ideally suited for processing of the relevant information and storage in the spectrometer memory. During operation according to the present invention on the modulator (32) may be considered bypassed in the operational sense. The RF carrier is applied through the duplexer to the probe (10) or a probe substitute in the preferred form of a standard 50 ohm termination.