TEMPERATURE COMPENSATED PLATE RESONATOR
    112.
    发明公开
    TEMPERATURE COMPENSATED PLATE RESONATOR 审中-公开
    温度补偿板谐振器

    公开(公告)号:EP3202035A1

    公开(公告)日:2017-08-09

    申请号:EP15786990.0

    申请日:2015-10-02

    IPC分类号: H03H9/02 H03H9/24

    摘要: The invention relates to a microelectromechanical resonator device comprising a support structure and a semiconductor resonator plate doped to a doping concentration with an n-type doping agent and being capable of resonating in a width-extensional resonance mode. In addition, there is at least one anchor suspending the resonator plate to the support structure and an actuator for exciting the width-extensional resonance mode into the resonator plate. According to the invention, the resonator plate is doped to a doping concentration of 1.2*1020 cm−3 or more and has a shape which, in combination with said doping concentration and in said width-extensional resonance mode, provides the second order temperature coefficient of frequency (TCF2) to be 12 ppb/C2 or less at least at one temperature. Several practical implementations are presented.

    摘要翻译: 微机电谐振器装置技术领域本发明涉及一种微电子机械谐振器装置,其包括支撑结构和利用n型掺杂剂掺杂到掺杂浓度并且能够在宽度 - 拉伸谐振模式下谐振的半导体谐振器板。 此外,至少有一个锚定件将谐振器板悬挂到支撑结构上,以及一个致动器,用于将宽度 - 拉伸谐振模式激励到谐振器板中。 根据本发明,谐振器板被掺杂至1.2×1020cm-3或更高的掺杂浓度,并且具有这样的形状,其与所述掺杂浓度结合并且在所述宽度 - 拉伸谐振模式中提供二阶温度系数 频率(TCF2)至少在一个温度下为12ppb / C2或更低。 介绍了几个实际的实现。

    FERROELECTRIC THIN FILM, SUBSTRATE WITH PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ACTUATOR, INKJET HEAD, AND INKJET PRINTER
    115.
    发明公开
    FERROELECTRIC THIN FILM, SUBSTRATE WITH PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ACTUATOR, INKJET HEAD, AND INKJET PRINTER 审中-公开
    FERRO电薄膜具有压电薄膜,压电传动器,喷墨头和喷墨基底

    公开(公告)号:EP3144987A1

    公开(公告)日:2017-03-22

    申请号:EP15792322.8

    申请日:2015-04-27

    发明人: MAWATARI Kenji

    摘要: This ferroelectric thin film comprises lead zirconate titanate niobate. In said ferroelectric thin film, the ratio (a) of number of moles of lead to the total number of moles of zirconium, titanium, and niobium is greater than or equal to 100%; the ratio (b) of the number of moles of niobium to the total number of moles of zirconium, titanium, and niobium is between 10% and 20%, inclusive; and the ratio (c) of the number of moles of zirconium to the total number of moles of zirconium and titanium is between 52% and 59%, inclusive. The film stress exhibited by the ferroelectric thin film is between 100 and 250 MPa, inclusive.

    摘要翻译: 该强电介质薄膜包括锆钛酸铅铌酸。 在所述强电介质薄膜中,(a)的铅的摩尔数相对于锆,钛,和铌的摩尔总数之比大于或等于100%; 铌的摩尔数相对于锆,钛,和铌的摩尔总数之比(b)为10%和20%(含)之间; 和锆的摩尔数相对于锆和钛的摩尔总数之比(c)是52%和59%(含)之间。 通过该铁电薄膜表现出的膜应力为100兆帕和250之间,包括端值。

    ELECTRICAL ENERGY GENERATION WITHIN A VEHICLE TIRE
    116.
    发明公开
    ELECTRICAL ENERGY GENERATION WITHIN A VEHICLE TIRE 审中-公开
    EZEUGUNG ELEKTRISCHER ENERGIE IN EINEM FAHRZEUGREIFEN

    公开(公告)号:EP3127722A1

    公开(公告)日:2017-02-08

    申请号:EP16182649.0

    申请日:2016-08-03

    申请人: NXP USA, Inc.

    IPC分类号: B60C23/04 H02K7/18

    摘要: An apparatus for installation within a tire for a vehicle includes a flexible arm and a power generating element coupled to the flexible arm for generating electrical energy. One end of the flexible arm is coupled to a rim of the tire. The opposing end of the flexible arm is configured to be in contact with the inside tread surface of the tire. The flexible arm is capable of deformation in response to a variability of distance between the rim and the inside tread surface during rolling movement of the tire, and the power generating element generates the electrical energy in response to deformation of the flexible arm. The apparatus may be combined with a tire pressure sensor module as a system so as to provide electrical energy for powering the tire pressure sensor module.

    摘要翻译: 用于安装在用于车辆的轮胎内的装置包括柔性臂和耦合到柔性臂的发电元件,用于产生电能。 柔性臂的一端连接到轮胎的边缘。 柔性臂的相对端构造成与轮胎的内胎面接触。 柔性臂能够在轮胎的滚动运动期间响应于轮辋和内胎面之间的距离的变化而变形,并且发电元件响应于柔性臂的变形而产生电能。 该装置可以与作为系统的轮胎压力传感器模块组合,以便为轮胎压力传感器模块供电提供电能。

    PIEZOELECTRIC THIN FILM AND METHOD FOR PRODUCING SAME
    117.
    发明公开
    PIEZOELECTRIC THIN FILM AND METHOD FOR PRODUCING SAME 有权
    VERFAHREN ZUR HERSTELLUNG DAVON的PIEZOELEKTRISCHEDÜNNSCHICHT

    公开(公告)号:EP3007242A4

    公开(公告)日:2017-02-01

    申请号:EP14804218

    申请日:2014-05-22

    摘要: A piezoelectric thin film (1) is formed through sputtering and consists essentially of scandium aluminum nitride. The carbon atomic content is 2.5 at% or less. When producing the piezoelectric thin film (1), scandium and aluminum are sputtered simultaneously on a substrate (21) from a scandium aluminum alloy target material (10) having a carbon atomic content of 5 at% or less in an atmosphere where at least nitrogen gas exists. The sputtering may be conducted also by applying an ion beam (31) on an opposing surface of the alloy target material at an oblique angle. Moreover, aluminum and scandium may be also sputtered simultaneously on the substrate from an Sc target material and an Al target material. As a result, a piezoelectric thin film which exhibits excellent piezoelectric properties and a method for the same can be provided.

    摘要翻译: 通过溅射形成压电薄膜(1),并且基本上由氮化钪组成。 碳原子含量为2.5原子%以下。 在制造压电薄膜(1)时,在碳原子含量为5at%以下的钪铝合金靶材(10)的基板(21)上同时溅射钪和铝,在至少氮 气体存在。 也可以通过在合金靶材的相对表面上以倾斜角施加离子束(31)来进行溅射。 此外,也可以从Sc靶材料和Al靶材料在基板上同时溅射铝和钪。 结果,可以提供压电性能优异的压电薄膜及其制造方法。

    ELECTRIC GENERATOR
    119.
    发明公开
    ELECTRIC GENERATOR 审中-公开
    电动发电机

    公开(公告)号:EP3093979A1

    公开(公告)日:2016-11-16

    申请号:EP16168996.3

    申请日:2016-05-10

    IPC分类号: H02N1/04 H02N1/08

    摘要: An element (1) including: electrodes (11, 21); and intermediate layers (2, 3), each being sandwiched between any pair of the electrodes, wherein the intermediate layers include at least two selected from the group consisting of: intermediate layer (2) that can be elongated and deformed in direction not parallel to direction in which external force is applied, when the external force is applied to the intermediate layer (2); intermediate layer (3) that can be compressed and deformed in direction parallel to direction in which external force is applied, when the external force is applied to the intermediate layer (3); and intermediate layer that can be elongated and deformed in direction not parallel to direction in which external force is applied, and can be compressed and deformed in direction parallel to the direction in which the external force is applied, when the external force is applied to the intermediate layer (2, 3).

    摘要翻译: 元件(1)包括:电极(11,21); 和中间层(2,3),每个中间层夹在任何一对电极之间,其中所述中间层包括选自以下的至少两种:中间层(2),其可以在不平行的方向上伸长和变形 当外力施加到中间层(2)时,施加外力的方向; 当外力施加到中间层(3)时,可沿与施加外力的方向平行的方向压缩和变形的中间层(3); 以及中间层,该中间层可以在不平行于施加外力的方向上伸长和变形,并且可以在外力施加于外力时沿与施加外力的方向平行的方向压缩和变形 中间层(2,3)。