IMAGING DEVICE AND METHOD
    141.
    发明公开
    IMAGING DEVICE AND METHOD 审中-公开
    成像装置和方法

    公开(公告)号:EP3161433A2

    公开(公告)日:2017-05-03

    申请号:EP15735749.2

    申请日:2015-06-17

    Inventor: OZAWA, Ken

    Abstract: An imaging device and method are provided. Light from an object is provided as a plurality of sets of light beams to a phase difference array having a plurality of elements. The phase difference array is configured to provide different optical paths for light included within at least some of a plurality of sets of light beams. The light from the phase difference array is received at an imaging element array. The imaging element array includes a plurality of imaging elements. Information obtained from hyperspectral imaging data based on output signals of the imaging element array can be displayed.

    Abstract translation: 提供了一种成像装置和方法。 来自物体的光被提供为具有多个元件的相位差阵列的多组光束。 相位差阵列被配置为为包括在多组光束中的至少一些光束内的光提供不同的光路。 来自相位差阵列的光在成像元件阵列处被接收。 成像元件阵列包括多个成像元件。 可以显示从基于成像元件阵列的输出信号的高光谱成像数据获得的信息。

    TERAHERTZ ELLIPSOMETER SYSTEM, AND METHOD OF USE
    143.
    发明公开
    TERAHERTZ ELLIPSOMETER SYSTEM, AND METHOD OF USE 审中-公开
    太赫兹椭偏仪及其使用方法

    公开(公告)号:EP2798322A4

    公开(公告)日:2015-06-17

    申请号:EP12861672

    申请日:2012-04-06

    CPC classification number: G01J4/00 G01N21/211 G01N21/3581

    Abstract: A terahertz ellipsometer, the basic preferred embodiment being a sequential system having a backward wave oscillator (BWO); a first rotatable polarizer that includes a wire grid (WGP1); a rotating polarizer that includes a wire grid (RWGP); a stage (STG) for supporting a sample (S); a rotating retarder (RRET) comprising first (RP), second (RM1), third (RM2) and fourth (RM3) elements; a second rotatable polarizer that includes a wire grid (WGP2); and a Golay cell detector (DET).

    System and method for measuring the rotation angle of optical active substance
    144.
    发明公开
    System and method for measuring the rotation angle of optical active substance 审中-公开
    系统和Verfahren zur Messung des Rotationswinkels einer optisch aktiven Substanz

    公开(公告)号:EP2738545A1

    公开(公告)日:2014-06-04

    申请号:EP13156249.8

    申请日:2013-02-21

    Abstract: A system for measuring the rotation angle of optical active substances (15) has a light source (10), a polarization generation unit (11), a polarization analyzing unit (12), a signal generating unit (13), respectively and electrically coupled to the polarization generation unit (11) and the polarization analyzing unit (12), a signal processing unit (14), electrically coupled to the electric signal generating unit (13), wherein the light source (10) is enabled to emit a beam (100) toward the polarization generation unit (11) for enabling the beam (100) to be polarized into an incident polarized beam (110) while being projected and travelled in an optical path passing through an optical active substance (15) so as to be converted into a emerging beam (150); and the polarization analyzing unit (12) is positioned to receive and analyze the emerging beam (150) so as to generate a signal to be received and processed by the signal processing unit (14).

    Abstract translation: 用于测量光学活性物质(15)的旋转角度的系统具有光源(10),偏振光生成单元(11),偏振分析单元(12),信号发生单元(13),并且电耦合 向所述偏振光生成单元(11)和所述偏振光分析单元(12)提供电耦合到所述电信号发生单元(13)的信号处理单元(14),其中所述光源(10)能够发射光束 (100)朝向极化发生单元(11),用于使光束(100)在通过光学活性物质(15)的光路中被投射和行进时被极化成入射偏振光束(110),以便 转换成新兴的梁(150); 并且偏振分析单元(12)被定位成接收和分析出射光束(150),以便产生要由信号处理单元(14)接收和处理的信号。

    DISPOSITIF ET PROCEDE POUR CARACTERISER UN FAISCEAU LASER

    公开(公告)号:EP2612158A1

    公开(公告)日:2013-07-10

    申请号:EP11749458.3

    申请日:2011-09-02

    Abstract: The invention relates to a device (1) and a method for measuring a magnetization generated within an active medium (10) or characterizing a linearly polarized electromagnetic wave when said active medium exhibits an inverse Cotton-Mouton effect, characterized in that it includes, in combination, at least one of the following elements: an active medium (10) in which a linearly polarized electromagnetic wave propagates; a means (11, 12) for producing a transverse magnetic field B
    t relative to the propagation direction D
    1 of said electromagnetic wave; and a device (2) for measuring the electrical signal appropriate for translating the magnetization generated within said active medium (10) by said electromagnetic wave.

    Abstract translation: 本发明涉及一种用于测量在活性介质(10)内产生的磁化或者当所述活性介质显示出逆棉花 - 木顿效应时表征线性极化电磁波的方法,其特征在于,所述装置(1)包括: 结合至少一个以下元件:其中线偏振电磁波传播的有源介质(10) 一个用于产生相对于所述电磁波的传播方向D 1的横向磁场B t的装置(11,12) 以及用于测量适合于通过所述电磁波来平移在所述活性介质(10)内产生的磁化的电信号的装置(2)。

    APPARATUS AND METHOD FOR NAVIGATION
    148.
    发明公开
    APPARATUS AND METHOD FOR NAVIGATION 审中-公开
    用于导航的装置和方法

    公开(公告)号:EP2480869A1

    公开(公告)日:2012-08-01

    申请号:EP10818498.7

    申请日:2010-09-21

    Applicant: VOROTEC LTD.

    CPC classification number: G01J4/04 G01C17/34 G01C21/02 G01J2004/005

    Abstract: An apparatus and system for use in determining location of a celestial body are presented. The apparatus comprises: a polarizer comprising an array of polarized light filter cells and a light sensor array. The array of polarized light filter cells comprises at least a first polarization direction and a second polarization direction different from said first polarization direction. And the polarizer thereby produces polarized light of at least first and second different polarizations. The light sensor array is configured to receive the polarized light from the polarizer and produce data indicative of a pattern of at least one of light polarization intensity and direction. The pattern is indicative of at least one of azimuth and elevation of the celestial body to be located.

    Abstract translation: 1。一种包括偏振光滤波器单元阵列的设备,每个单元具有第一偏振方向的第一偏振滤波器和具有第二偏振方向的第二偏振滤波器,第二偏振方向不同于第一偏振方向; 将光引导到偏振滤光器阵列上的光学系统; 以及第一和第二光传感器,用于分别从通过第一和第二偏振滤光器接收的光产生数据。 另外,一种将光引导到偏振光滤波器单元阵列上的方法,每个单元具有具有第一偏振方向的第一偏振滤波器和具有不同于第一偏振方向的第二偏振方向的第二偏振滤波器; 从各自的第一和第二光传感器通过第一和第二偏振滤光器接收的光产生数据; 并基于该数据导出偏振图案。

    LIQUID CRYSTAL OPTICAL SWITCH CONFIGURED TO REDUCE POLARIZATION DEPENDENT LOSS
    149.
    发明公开
    LIQUID CRYSTAL OPTICAL SWITCH CONFIGURED TO REDUCE POLARIZATION DEPENDENT LOSS 审中-公开
    最小极化造成损失结构的光学液晶开关

    公开(公告)号:EP2425217A1

    公开(公告)日:2012-03-07

    申请号:EP10770435.5

    申请日:2010-04-30

    Abstract: An optical device has the structure to perform switching and attenuation of an optical beam with reduced polarization dependent loss (PDL). The optical device includes a birefringent displacer and two liquid crystal (LC) structures. The first LC structure is used to condition s-polarized components of the optical beam and the second LC structure is used to condition p-polarized components of the optical beam. Each LC structure has a separate control electrode so that the s-polarized components of the optical beam and the p-polarized components of the optical beam can be conditioned differently and in such a manner that reduces PDL. The optical device may be configured for processing multiple input light beams, such as the multiple wavelength channels de-multiplexed from a wavelength division multiplexed (WDM) optical signal.

    POLARIZATION MONITORING RETICLE DESIGN FOR HIGH NUMERICAL APERTURE LITHOGRAPHY SYSTEMS
    150.
    发明公开
    POLARIZATION MONITORING RETICLE DESIGN FOR HIGH NUMERICAL APERTURE LITHOGRAPHY SYSTEMS 有权
    DRAFT极化/监视线程CROSS光刻系统中的高数值孔径

    公开(公告)号:EP2399105A1

    公开(公告)日:2011-12-28

    申请号:EP10744347.5

    申请日:2010-02-19

    CPC classification number: G06F17/50 G01J4/04 G03F1/44 G03F7/70466 G03F7/70566

    Abstract: This invention relates to the manufacture of semiconductor substrates such as wafers and to a method for monitoring the state of polarization incident on a photomask in projection printing using a specially designed polarization monitoring reticle for high numerical aperture lithographic scanners. The reticle measures 25 locations across the slit and is designed for numerical apertures above 0.85. The monitors provide a large polarization dependent signal which is more sensitive to polarization. A double exposure method is also provided using two reticles where the first reticle contains the polarization monitors, clear field reference regions and low dose alignment marks. The second reticle contains the standard alignment marks and labels. For a single exposure method, a tri-PSF low dose alignment mark is used. The reticles also provide for electromagnetic bias wherein each edge is biased depending on that edge's etch depth.

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