摘要:
It is a subject of the present invention to provide a cleaning agent for a substrate having a metal wiring, and a cleaning method for a semiconductor substrate comprising that the cleaning agent is used, by which following effects (1) to (5) are obtained, in a cleaning process after chemical mechanical polishing (CMP) in a manufacturing process of a semiconductor device. (1) Residues of fine particles (polishing agents) used in the CMP process, fine particles (metal particles) derived from a polished metal, an anticorrosive, and the like, can be removed sufficiently. (2) A coating film (protective film: oxidation resistant film) on a surface of the metal wiring, containing a complex between an anticorrosive, such as benzotriazole or quinaldic acid, and a surface metal of the metal wiring, formed in the CMP process, can be removed (stripped) sufficiently. (3) An oxide film containing a metal oxide can be formed after removal (stripping) of the coating film. (4) A semiconductor substrate can be obtained stably for a long period of time, without impairing flatness of the surface of the metal wiring (the surface of the oxide film containing the metal oxide), even leaving a substrate after the cleaning process after the CMP. (5) It is hard to deteriorate even after using the cleaning agent for a long period of time. The present invention relates to a cleaning agent for a substrate having a metal wiring, comprising an aqueous solution containing (A) carboxylic acid having a nitrogen-containing heterocyclic ring and (B) alkylhydroxylamine, and having a pH of 10 or higher, as well as a cleaning method for a semiconductor substrate, comprising that the cleaning agent is used.
摘要:
The present invention relates to: a breast cancer marker which is selected from the group consisting of carboxypeptidase N subunit 2, extracellular matrix protein 1, serum amyloid P component, nebulin, complement component C8 α chain, apolipoprotein L1, flavin reductase, catalase, carbonic anhydrase 2, apolipoprotein C-I, nuclear pore glycoprotein 210, superoxide dismutase [Cu-Zn], bisphosphoglycerate mutase, carbonic anhydrase 1 and peroxiredoxin-2; a method for determining breast cancer, which comprises detecting the breast cancer marker in a sample and determining breast cancer on the basis of the results of the detection; and a kit for use in the method.
摘要:
A problem of the present invention is to provide a liquid crystal aligning agent which never deteriorates even in a method where UV is irradiated such as a liquid crystal dropping method or the like, and is capable of forming a liquid crystal alignment film having high UV resistance. The present invention relates to, (I) Compound represented by the following general formula [1]
(wherein n represents an integer of 1 to 6; and R represents an alkyl group having 8 to 20 carbon atoms or a group having a steroid skeleton), (II) Polyamic acid or a polyimide obtained by a reaction of (A) compound represented by the above general formula [1], and the following compounds (B) and (C), (B) compound represented by the following general formula [2],
(wherein R 1 represents an alkyl group having 1 to 6 carbon atoms, or an arylalkyl group having 7 to 12 carbon atoms, p represents an integer of 0 to 4, and Y represents an amino group or a 4-aminophenyl group), (C) compound represented by the following general formula [3] or [4],
(wherein Z represents a tetravalent hydrocarbon group), along with (III) Liquid crystal aligning agent comprising the polyamic acid or the polyimide obtained by a reaction of the above compounds (A), (B) and (C).
摘要:
In the method of assaying an analyte in a sample of the present invention, magnetic silica particles are used. The magnetic silica particles include: silica particles containing 60 to 95% by weight of a superparamagnetic metal oxide that has an average particle size of 1 to 15 nm; and the analyte, an analog of the analyte, or a substance capable of specifically binding to the analyte immobilized on the surface of the silica particles.
摘要:
The present invention discloses an oligonucleotide which comprises a part or the entire sequence of the nucleotide sequence depicted in SEQ ID NO: 1, 2, 3 or 4, or a part or the entire sequence of a nucleotide sequence complementary to the nucleotide sequence, wherein the oligonucleotide is capable of hybridizing with the nucleotide sequence of Mycobacterium kansasii; a primer and a probe for use in the detection of Mycobacterium kansasii comprising the oligonucleotide; and a method for detecting Mycobacterium kansasii using the primer and/or probe. The method for detecting Mycobacterium kansasii enables the detection of M . kansasii more rapidly and with higher accuracy compared with a conventional bacterium identification method performed by culture examination on a bacterium. Further, the method can exclude any false positive result for the diagnosis and can also detect and diagnose M. kansasii with higher accuracy compared with a diagnosis method performed by PCR using a conventional primer and/or probe. Still further, the method can quantify a M. kansasii cell.
摘要:
The present invention discloses an oligonucleotide which comprises a part or the entire sequence of the nucleotide sequence depicted in SEQ ID NO: 1, 2, 3 or 4, or a part or the entire sequence of a nucleotide sequence complementary to the nucleotide sequence, wherein the oligonucleotide is capable of hybridizing with the nucleotide sequence of Mycobacterium kansasii ; a primer and a probe for use in the detection of Mycobacterium kansasii comprising the oligonucleotide; and a method for detecting Mycobacterium kansasii using the primer and/or probe. The method for detecting Mycobacterium kansasii enables the detection of M. kansasii more rapidly and with higher accuracy compared with a conventional bacterium identification method performed by culture examination on a bacterium. Further, the method can exclude any false positive result for the diagnosis and can also detect and diagnose M. kansasii with higher accuracy compared with a diagnosis method performed by PCR using a conventional primer and/or probe. Still further, the method can quantify a M. kansasii cell.
摘要翻译:本发明光盘上的寡核苷酸松散含有一部分或所述核苷酸序列的整个序列中的SEQ ID NO:1所示,2,3或4,或者一部分或一个核苷酸序列的核苷酸序列,worin全部用序列 所述寡核苷酸能够与堪萨斯分枝杆菌的碱基序列杂交的; 的引物和用于在检测堪萨斯分枝杆菌,其包括寡核苷酸的使用的探针; 以及使用该引物和/或探针检测堪萨斯分枝杆菌的方法。 用于检测堪萨斯分枝杆菌的方法,使M的检测堪萨斯更加迅速且以较高的精度与执行者培养检查上的细菌一个常规的细菌鉴定方法相比。 此外,该方法可以排除诊断任何假阳性结果,因此可以检测并以更高的精度诊断堪萨斯分枝与使用常规的引物和/或探针,通过PCR进行的诊断方法相比。 更进一步地,该方法可以定量堪萨斯分枝杆菌细胞。
摘要:
The purpose of the present invention to provide: a composition which can be used for water-repellent treating of the entire surface of a semiconductor substrate having a pattern formed by laminating a Si-containing insulating layer and a metal layer, at one time; and a method for water-repellent treatment of the semiconductor substrate surface using the composition. The present invention relates to: (1) a composition for water-repellent treatment of a semiconductor substrate surface comprising a) at least one kind of a compound selected from the group consisting of a long-chain alkyl tertiary amine and a long-chain alkyl ammonium salt, b) a base or an acid generating agent, having a condensed ring structure or forming a condensed ring structure by generating a base or an acid and c) a polar organic solvent, and (2) a method for water-repellent treatment of the semiconductor substrate surface having the pattern formed by laminating the Si-containing insulating layer and the metal layer, using the composition.