CLEANING AGENT FOR METAL WIRING SUBSTRATE, AND METHOD FOR CLEANING SEMICONDUCTOR SUBSTRATE
    11.
    发明公开
    CLEANING AGENT FOR METAL WIRING SUBSTRATE, AND METHOD FOR CLEANING SEMICONDUCTOR SUBSTRATE 审中-公开
    用于金属接线基板的清洁剂及清洁半导体基板的方法

    公开(公告)号:EP2985783A1

    公开(公告)日:2016-02-17

    申请号:EP14782453.6

    申请日:2014-04-09

    IPC分类号: H01L21/304 C11D7/32

    摘要: It is a subject of the present invention to provide a cleaning agent for a substrate having a metal wiring, and a cleaning method for a semiconductor substrate comprising that the cleaning agent is used, by which following effects (1) to (5) are obtained, in a cleaning process after chemical mechanical polishing (CMP) in a manufacturing process of a semiconductor device. (1) Residues of fine particles (polishing agents) used in the CMP process, fine particles (metal particles) derived from a polished metal, an anticorrosive, and the like, can be removed sufficiently. (2) A coating film (protective film: oxidation resistant film) on a surface of the metal wiring, containing a complex between an anticorrosive, such as benzotriazole or quinaldic acid, and a surface metal of the metal wiring, formed in the CMP process, can be removed (stripped) sufficiently. (3) An oxide film containing a metal oxide can be formed after removal (stripping) of the coating film. (4) A semiconductor substrate can be obtained stably for a long period of time, without impairing flatness of the surface of the metal wiring (the surface of the oxide film containing the metal oxide), even leaving a substrate after the cleaning process after the CMP. (5) It is hard to deteriorate even after using the cleaning agent for a long period of time.
    The present invention relates to a cleaning agent for a substrate having a metal wiring, comprising an aqueous solution containing (A) carboxylic acid having a nitrogen-containing heterocyclic ring and (B) alkylhydroxylamine, and having a pH of 10 or higher, as well as a cleaning method for a semiconductor substrate, comprising that the cleaning agent is used.

    摘要翻译: 本发明的课题在于提供具有金属布线的基板用清洗剂和使用了该清洗剂的半导体基板的清洗方法,从而获得下述效果(1)〜(5) 在半导体装置的制造工序中的化学机械研磨(CMP)后的清洗工序中进行。 (1)能够充分地除去CMP工序中使用的微粒(研磨剂),来自研磨金属的微粒(金属粒子),防腐蚀剂等。 (2)在CMP工艺中形成的包含苯并三唑或喹哪啶酸等防腐蚀剂与金属布线的表面金属之间的络合物的金属布线表面上的涂膜(保护膜:抗氧化膜) ,可以被充分去除(剥离)。 (3)可以在去除(剥离)涂膜后形成含有金属氧化物的氧化物膜。 (4)在不损害金属布线的表面(包含金属氧化物的氧化物膜的表面)的平坦性的情况下,可以长时间稳定地获得半导体基板,甚至在清洁处理后留下基板 CMP。 (5)即使长时间使用清洁剂也不易劣化。 本发明涉及一种具有金属配线的基板用清洗剂,其包含含有(A)具有含氮杂环的羧酸和(B)烷基羟胺并且pH为10以上的水溶液 作为用于半导体衬底的清洁方法,包括使用清洁剂。

    METHOD FOR DETERMINING BREAST CANCER
    12.
    发明公开
    METHOD FOR DETERMINING BREAST CANCER 审中-公开
    VERFAHREN ZUM NACHWEIS VON BRUSTKREBS

    公开(公告)号:EP2894477A1

    公开(公告)日:2015-07-15

    申请号:EP13835821.3

    申请日:2013-09-03

    摘要: The present invention relates to: a breast cancer marker which is selected from the group consisting of carboxypeptidase N subunit 2, extracellular matrix protein 1, serum amyloid P component, nebulin, complement component C8 α chain, apolipoprotein L1, flavin reductase, catalase, carbonic anhydrase 2, apolipoprotein C-I, nuclear pore glycoprotein 210, superoxide dismutase [Cu-Zn], bisphosphoglycerate mutase, carbonic anhydrase 1 and peroxiredoxin-2; a method for determining breast cancer, which comprises detecting the breast cancer marker in a sample and determining breast cancer on the basis of the results of the detection; and a kit for use in the method.

    摘要翻译: 本发明涉及:选自羧肽酶N亚基2,细胞外基质蛋白1,血清淀粉样蛋白P成分,神经蛋白,补体成分C8±链,载脂蛋白L1,黄素还原酶,过氧化氢酶,碳酸的乳腺癌标志物 脱水酶2,载脂蛋白CI,核孔糖蛋白210,超氧化物歧化酶[Cu-Zn],双磷酸甘油酸变位酶,碳酸酐酶1和过氧氧化还原酶-2; 一种确定乳腺癌的方法,其包括检测样品中的乳腺癌标志物并基于检测结果确定乳腺癌; 以及用于该方法的试剂盒。

    LIQUID CRYSTAL ALIGNING AGENT
    14.
    发明公开
    LIQUID CRYSTAL ALIGNING AGENT 审中-公开
    MITTEL ZUR AUSRICHTUNG VONFLÜSSIGKRISTALLEN

    公开(公告)号:EP2803672A1

    公开(公告)日:2014-11-19

    申请号:EP13736389.1

    申请日:2013-01-07

    IPC分类号: C07J9/00 C08G73/10 G02F1/1337

    摘要: A problem of the present invention is to provide a liquid crystal aligning agent which never deteriorates even in a method where UV is irradiated such as a liquid crystal dropping method or the like, and is capable of forming a liquid crystal alignment film having high UV resistance.
    The present invention relates to,
    (I) Compound represented by the following general formula [1]

    (wherein n represents an integer of 1 to 6; and R represents an alkyl group having 8 to 20 carbon atoms or a group having a steroid skeleton),
    (II) Polyamic acid or a polyimide obtained by a reaction of
    (A) compound represented by the above general formula [1], and the following compounds (B) and (C),
    (B) compound represented by the following general formula [2],

    (wherein R 1 represents an alkyl group having 1 to 6 carbon atoms, or an arylalkyl group having 7 to 12 carbon atoms, p represents an integer of 0 to 4, and Y represents an amino group or a 4-aminophenyl group),
    (C) compound represented by the following general formula [3] or [4],


    (wherein Z represents a tetravalent hydrocarbon group), along with
    (III) Liquid crystal aligning agent comprising the polyamic acid or the polyimide obtained by a reaction of the above compounds (A), (B) and (C).

    摘要翻译: 本发明的问题在于,提供即使在液晶滴加法等照射紫外线的方法中也不会劣化的液晶取向剂,能够形成具有高耐紫外线性的液晶取向膜 。 本发明涉及(I)由以下通式[1]表示的化合物(其中n表示1〜6的整数,R表示碳原子数8〜20的烷基或具有类固醇骨架的基团) ,(II)通过(A)由上述通式[1]表示的化合物与下列化合物(B)和(C)反应得到的聚酰胺酸或聚酰亚胺,(B)由下列通式 [2](其中R 1表示碳原子数1〜6的烷基或碳原子数7〜12的芳烷基,p表示0〜4的整数,Y表示氨基或4-氨基苯基 基团),(C)由以下通式[3]或[4]表示的化合物(其中Z表示四价烃基),以及(III)包含聚酰胺酸或聚酰亚胺的液晶取向剂 上述化合物(A),(B)和(C)的反应。

    Primer and probe for use in detection of mycobacterium kansasii and method for detection of mycobacterium kansasii using the same
    16.
    发明授权
    Primer and probe for use in detection of mycobacterium kansasii and method for detection of mycobacterium kansasii using the same 有权
    引物和探针用于检测堪萨斯分枝杆菌的方法和使用用于检测堪萨斯分枝杆菌,以便

    公开(公告)号:EP2284263B1

    公开(公告)日:2013-12-18

    申请号:EP10178349.6

    申请日:2006-05-11

    IPC分类号: C12N15/09 C12Q1/04 C12Q1/68

    摘要: The present invention discloses an oligonucleotide which comprises a part or the entire sequence of the nucleotide sequence depicted in SEQ ID NO: 1, 2, 3 or 4, or a part or the entire sequence of a nucleotide sequence complementary to the nucleotide sequence, wherein the oligonucleotide is capable of hybridizing with the nucleotide sequence of Mycobacterium kansasii; a primer and a probe for use in the detection of Mycobacterium kansasii comprising the oligonucleotide; and a method for detecting Mycobacterium kansasii using the primer and/or probe. The method for detecting Mycobacterium kansasii enables the detection of M . kansasii more rapidly and with higher accuracy compared with a conventional bacterium identification method performed by culture examination on a bacterium. Further, the method can exclude any false positive result for the diagnosis and can also detect and diagnose M. kansasii with higher accuracy compared with a diagnosis method performed by PCR using a conventional primer and/or probe. Still further, the method can quantify a M. kansasii cell.

    Primer and probe for use in detection of mycobacterium kansasii and method for detection of mycobacterium kansasii using the same
    17.
    发明公开
    Primer and probe for use in detection of mycobacterium kansasii and method for detection of mycobacterium kansasii using the same 有权
    引物和探针用于检测堪萨斯分枝杆菌和相关方法的用途,用于检测堪萨斯分枝杆菌

    公开(公告)号:EP2623597A1

    公开(公告)日:2013-08-07

    申请号:EP13166253.8

    申请日:2006-05-11

    IPC分类号: C12N15/09 C12Q1/04 C12Q1/68

    摘要: The present invention discloses an oligonucleotide which comprises a part or the entire sequence of the nucleotide sequence depicted in SEQ ID NO: 1, 2, 3 or 4, or a part or the entire sequence of a nucleotide sequence complementary to the nucleotide sequence, wherein the oligonucleotide is capable of hybridizing with the nucleotide sequence of Mycobacterium kansasii ; a primer and a probe for use in the detection of Mycobacterium kansasii comprising the oligonucleotide; and a method for detecting Mycobacterium kansasii using the primer and/or probe.
    The method for detecting Mycobacterium kansasii enables the detection of M. kansasii more rapidly and with higher accuracy compared with a conventional bacterium identification method performed by culture examination on a bacterium. Further, the method can exclude any false positive result for the diagnosis and can also detect and diagnose M. kansasii with higher accuracy compared with a diagnosis method performed by PCR using a conventional primer and/or probe. Still further, the method can quantify a M. kansasii cell.

    摘要翻译: 本发明光盘上的寡核苷酸松散含有一部分或所述核苷酸序列的整个序列中的SEQ ID NO:1所示,2,3或4,或者一部分或一个核苷酸序列的核苷酸序列,worin全部用序列 所述寡核苷酸能够与堪萨斯分枝杆菌的碱基序列杂交的; 的引物和用于在检测堪萨斯分枝杆菌,其包括寡核苷酸的使用的探针; 以及使用该引物和/或探针检测堪萨斯分枝杆菌的方法。 用于检测堪萨斯分枝杆菌的方法,使M的检测堪萨斯更加迅速且以较高的精度与执行者培养检查上的细菌一个常规的细菌鉴定方法相比。 此外,该方法可以排除诊断任何假阳性结果,因此可以检测并以更高的精度诊断堪萨斯分枝与使用常规的引物和/或探针,通过PCR进行的诊断方法相比。 更进一步地,该方法可以定量堪萨斯分枝杆菌细胞。

    COMPOSITION FOR WATER-REPELLENT TREATMENT OF SURFACE, AND METHOD FOR WATER-REPELLENT TREATMENT OF SURFACE OF SEMICONDUCTOR SUBSTRATE USING SAME
    18.
    发明公开
    COMPOSITION FOR WATER-REPELLENT TREATMENT OF SURFACE, AND METHOD FOR WATER-REPELLENT TREATMENT OF SURFACE OF SEMICONDUCTOR SUBSTRATE USING SAME 审中-公开
    组合物技术表面的半导体衬底和方法,就水面的半导体基板的防水处理防泼水处理SO

    公开(公告)号:EP2615633A1

    公开(公告)日:2013-07-17

    申请号:EP11823588.6

    申请日:2011-09-07

    IPC分类号: H01L21/304 C09K3/18

    摘要: The purpose of the present invention to provide: a composition which can be used for water-repellent treating of the entire surface of a semiconductor substrate having a pattern formed by laminating a Si-containing insulating layer and a metal layer, at one time; and a method for water-repellent treatment of the semiconductor substrate surface using the composition.
    The present invention relates to: (1) a composition for water-repellent treatment of a semiconductor substrate surface comprising a) at least one kind of a compound selected from the group consisting of a long-chain alkyl tertiary amine and a long-chain alkyl ammonium salt, b) a base or an acid generating agent, having a condensed ring structure or forming a condensed ring structure by generating a base or an acid and c) a polar organic solvent, and (2) a method for water-repellent treatment of the semiconductor substrate surface having the pattern formed by laminating the Si-containing insulating layer and the metal layer, using the composition.

    摘要翻译: 本发明的目的在于提供:哪些可用于防水性处理患有由层叠含有Si-绝缘层和金属层,在同一时间形成图案的半导体衬底的整个表面上的组合物; 和用于防水处理使用该组合物的半导体衬底表面的方法。 本发明涉及:(1)一种半导体衬底表面,其包括a)至少一种的化合物的选自长链烷基叔胺和长链烷基中选择的斥水处理的组合物 铵盐,b)一种用于防水处理的碱或酸生成剂的,具有稠环结构或通过产生或酸,和c)极性有机溶剂中与碱形成的稠环结构,和(2)的方法 的具有通过层叠含有Si-绝缘层和金属层,使用该组合物形成的图案的半导体衬底表面。