摘要:
A system and method for forming a wafer level package (WLP) (12) (i.e., wafer level chip size package) is disclosed. The WLP (12) includes a silicon integrated circuit (IC) substrate (10) having a plurality of die pads (22) formed on a top surface thereof and a plurality of polymer laminates (16) positioned thereon. Each of the polymer laminates (16) is comprised of a separate pre-formed laminate sheet and has a plurality of vias (20) formed therein that correspond to a respective die pad (22). A plurality of metal interconnects (26) are formed on each of the plurality of polymer laminates (16) so as to cover a portion of a top surface of a polymer laminate (16) and extend down through the via (20) and into contact with a metal interconnect (26) on a neighboring polymer laminate positioned below (16). An input/output (I/O) system interconnect (34) is positioned on a top surface of the wafer level package (12) and is attached to the plurality of metal interconnects (26).
摘要:
A system and method of forming a patterned conformal structure (10) for an electrical system (12) is disclosed. The conformal structure (10) includes a dielectric coating (18) positioned on an electrical system (12) having circuit components (16) mounted thereon, the dielectric coating (18) shaped to conform to a surface of the electrical system (12) and having a plurality of openings (20) therein positioned over contact pads (22) on the surface of the electrical system. The conformal structure (10) also includes a conductive coating (24) layered on the dielectric coating (18) and on the contact pads (22) such that an electrical connection is formed between the conductive coating (24) and the contact pads (22). The dielectric coating (18) and the conductive coating (24) have a plurality of overlapping pathway openings (27) formed therethrough to isolate a respective shielding area (26) of the conformal structure over desired circuit components (16) or groups of circuit components.
摘要:
Multiple microelectromechanical systems (MEMS) on a substrate (20) are capped with a cover (28) using a layer that may function as a bonding agent, separation layer, and hermetic seal. A substrate (20) has a first side (20A) with multiple MEMS devices. A cover (28) is formed with through-holes (40) for vias (40), and with standoff posts (34) for layer registration and separation. An adhesive sheet (42) is patterned with cutouts (44) for the MEMS devices, vias (40), and standoff posts (34). The adhesive sheet (42) is tacked to the cover (28), then placed on the mems substrate (20) and heated to bond the layers. The via holes (40) may be metalized with leads for circuit board (58) connection. The mems units (22) may be diced from the substrate (20) after sealing, thus protecting them from contaminants.