Photosensitive resin composition
    15.
    发明公开
    Photosensitive resin composition 失效
    Photoempfindliche Harzzusammensetzung。

    公开(公告)号:EP0642057A1

    公开(公告)日:1995-03-08

    申请号:EP94306413.9

    申请日:1994-08-31

    IPC分类号: G03F7/037 G03F7/038 G03F7/075

    摘要: There are disclosed a photosensitive resin composition which comprises

    (A) a polyamic acid having recurring units represented by the formula (I):
       wherein R¹ represents
    and R²
       represents a divalent organic group, and
    (B) an acryl compound having an amino group,
       and also a photosensitive resin composition for an i-line stepper which further comprises a photoinitiator in addition to the photosensitive resin composition.

    摘要翻译: 公开了一种光敏树脂组合物,其包含(A)具有式(I)表示的重复单元的聚酰胺酸:其中R 1表示且R 2表示二价有机基团的CHEM>, (B)具有氨基的丙烯酸类化合物,以及除了感光性树脂组合物之外还含有光引发剂的i线步进机用感光性树脂组合物。