Abstract:
A spectral sensor 1A includes a Fabry-Perot interference filter 10 which is provided with an opening 50a to pass light transmitted according to a distance between a first mirror 31 and a second mirror 41 along a facing direction D; a light detector 3 which has a light reception unit 3 a to receive the light having passed through the opening 50a; a wiring substrate 2 on which the light detector 3 is mounted; and a plurality of spacers 4 which support the filter 10 on the wiring substrate 2, such that a second space S2 continuous with a first space S1 in the opening 50a and including the first space S1 when viewed from the facing direction D is formed between the filter 10 and the wiring substrate 2. The light detector 3 is disposed in the second space S2. The light reception unit 3a is disposed in a region corresponding to the first space S1 in the second space S2, when viewed from the facing direction D.
Abstract:
A SERS element 2 comprises a substrate 21 having a front face 21 a; a fine structure part 24 formed on the front face 21a and having a plurality of pillars 27; and a conductor layer 23 formed on the fine structure part 24 and constituting an optical function part 20 for generating surface-enhanced Raman scattering. The conductor layer 23 has a base part 28 formed along the front face 21 a and a plurality of protrusions 29 protruding from the base part 28 at respective positions corresponding to the pillars 27. The base part 28 has a thickness greater than the height of the pillars 27.