摘要:
An air-to-fuel ratio sensor comprising a detecting part constituted by a zirconia solid electrolyte, (20) a first electrode (22) formed on the atmosphere side of said solid electrolyte, a second electrode (23) formed on the exhaust side of said solid electrolyte and a diffusion-resistant body (24) formed on said second electrode and a driving circuit (29) which drives said detecting part, wherein an electric potential of said second electrode is predetermined to be higher than a ground level (26) of said driving circuit and an exciting voltage is subjected to feed-back control by said driving circuit. (29)
摘要:
An air-fuel ratio in the lean range is detected by measuring a limiting current when oxygen diffused to a first electrode (123; 2; 51) is pumped to a second electrode (124; 3; 52) via a solid electrolyte. A stoichiometric air-fuel ratio is detected from electromotive force between first (123; 2; 51) and third electrodes (126; 6; 53) when oxygen is pumped from the first electrode (123; 2; 51) to the third electrode (126; 6; 53). The invention is characterized by use of such three electrodes. Furthermore, an air-fuel ratio in a rich range is detected by either sending oxygen from the first electrode (123; 2; 51) to the third electrode (126; 6; 53) via the solid electrolyte (127; 1; 50) and measuring a current when the electromotive force between the first and third electrodes is controlled to be constant, or measuring a current when the air-fuel ratio range is judged as "rich" from this electromotive force and the polarity of the impressed voltage at the time of lean detection is reversed.
摘要:
A physical quantity detecting apparatus comprises at least one optical fiber (3; 500), at least one light emitting means (1) for emitting an incident light beam on the optical fiber, at least one light receiving means (5) for detecting an outgoing light beam from the optical fiber, physical quantity applied position information generating means (14) for providing information indicative of a position of a portion at which a physical quantity is applied to the optical fiber, and operation means (12; 12a) for receiving signals from the light receiving means and physical quantities applied position information generating means and calculating a change with time in physical quantity at respective positions on the optical fiber.
摘要:
A semiconductor acceleration sensor (1) is formed by a cantilever (4) having a conductive movable electrode (5) of predetermined mass at one end, at least one pair of fixed conductive electrodes (8, 9) which are stationary with respect to the movable electrode (5) located on opposing sides of the movable electrode, and gaps provided between the movable electrode and the fixed electrodes. To prevent the movable electrode becoming fused to the contacted fixed electrode, in a first aspect of this invention, an insulating layer (6) is provided between the movable electrode and fixed electrodes, the layer being either on the movable electrode or on the fixed electrodes and in a second aspect of this invention the movable electrode or, preferably, the fixed electrodes, are formed of a high melting point material. In such a second aspect, to improve adhesion between the high melting point material and a substrate (3a, 3b) to which the fixed electrodes (8′, 9′) are mounted, a lower melting point material is firstly coated on said substrates. In a feature of the invention, a detector unit processing circuit (Figure 20) is described in which the output characteristic of the circuit may be digitally adjusted by suitable switching of a plurality of resistors (Rs, Rf), and in a second feature, the sensor chip and the detector unit integrated circuit are located on a common base (303) and mounted in a hermetically sealed chamber to prevent adverse environmental effects affecting operation of the sensor and detector unit assembly. A gas having a dew point of -40°C or lower is, advantageously, charged into the hermetically sealed chamber.
摘要:
The invention relates to a capacitance type accelerometer and a method of manufacturing the same. The capacitance type accelerometer has a first silicon plate (2,7) formed as having a movable electrode part (7) which is moved according to acceleration, two second silicon plates (1, 3) which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films (4, 5) which are respectively disposed between the first silicon plate except the movable electrode part (7) and the two second silicon plates (1, 3) and stick the first silicon plate (2) except the movable electrode and the two second silicon plates together. The process of manufacturing the capacitance type accelerometer is made by processing and cutting a wafer by dicing saw without coming into the accelerometer of cutting chips or cutting water.