公开(公告)号：EP4557887A1

公开(公告)日：2025-05-21

申请号：EP23839270.8

申请日：2023-04-26

Applicant: NHK Spring Co., Ltd.

Inventor： AIKAWA, Naoya ,  KIDA, Naoya ,  FUTAKUCHIYA, Jun ,  FUJINO, Daisuke ,  TAKANASHI, Masaya

IPC: H05B3/48

Abstract: A sheath heater includes a metal sheath, a heater wire disposed in the metal sheath, an insulating material filled in the metal sheath so as to separate the metal sheath and the heater wire, a lead wire for supplying power to the heater wire, a crimp sleeve connecting the heater wire extending from an end of the metal sheath with the lead wire, a cylindrical member covering the end of the metal sheath, and a lid member engaging with the cylindrical member and including an opening into which the lead wire is inserted. The crimp sleeve is disposed in the cylindrical member. The end of the metal sheath includes a first insulating tube including a first through hole into which the heater wire is inserted and a sealing material filling a gap between the metal sheath and the first insulating tube. The sealing material includes a ceramic binder.

公开(公告)号：EP4319482A1

公开(公告)日：2024-02-07

申请号：EP22779521.8

申请日：2022-02-04

Applicant: NHK Spring Co., Ltd.

Inventor： KIDA, Naoya ,  FUTAKUTIYA, Jun ,  FUJINO, Daisuke ,  AIKAWA, Naoya ,  WADA, Keiko ,  NAKAJIMA, Aya

IPC: H05B3/10 ,  H05B3/72 ,  H01L21/683

Abstract: A placement board according to the present invention includes: a main body unit is configured to form a flow channel for circulation of a medium for heat exchange and place a workpiece thereon, the main body unit being made of a metallic material; and a heater provided in an outer edge region of the main body unit. In a state where the heater has been driven and the medium has been caused to circulate through the flow channel, a temperature difference between the outer edge region and an inner region of the main body unit at a surface of the main body unit where the workpiece is placed is 20°C or more.

公开(公告)号：EP4009740A1

公开(公告)日：2022-06-08

申请号：EP20850532.1

申请日：2020-07-06

Applicant: NHK Spring Co., Ltd.

Inventor： KIDA, Naoya ,  TATSUMI, Arata ,  SEKIYA, Kenji ,  AIKAWA, Naoya ,  TAKANASHI, Masaya

IPC: H05B3/10 ,  H05B3/18 ,  H05B3/48 ,  H05B3/68 ,  H01L21/205 ,  H01L21/3065 ,  H01L21/31 ,  C23C14/50 ,  C23C16/46

Abstract: A heater includes a folded heater wire, a first insulator provided on the heater wire, a metal sheath provided so as to be in contact with the first insulator, a first insulating member arranged parallel to one of the heater wire taken out from a first end part of the metal sheath, a second insulating member arranged parallel to the first insulating member and parallel to the other of the heater wire taken out from the first end part of the metal sheath, a second insulator in contact with the first and the second insulating members and the metal sheath, and a lid member covering the first insulating member, the lid member being in contact with the metal sheath, the first and the second insulating members via the second insulator, and arranged parallel to the first and the second insulating members and the metal sheath.