公开(公告)号：EP3612000A1

公开(公告)日：2020-02-19

申请号：EP18785237.1

申请日：2018-04-03

Applicant: NHK Spring Co., Ltd.

Inventor： HANAMACHI, Toshihiko ,  SEKIYA, Kenji ,  TAKAHARA, Go ,  AIKAWA, Naoya ,  KISARA, Yuta ,  TATSUMI, Arata

IPC: H05B3/72 ,  H05B3/20 ,  H05B3/30 ,  H05B3/48

Abstract: A heater unit including a small diameter sheath heater with improved reliability is provided. The heater unit includes a first substrate and a second substrate joined together, a groove arranged on at least one join surface of the first substrate and the second substrate, and a sheath heater arranged inside the groove. The sheath heater includes a metal sheath, a heating wire having a band shape, the heating wire arranged with a space within the metal sheath so as to rotate with respect to an axis direction of the metal sheath, an insulating material arranged in the space, and connection terminals arranged at one end of the metal sheath, connection terminals electrically connected with both ends of the heating wire respectively.

公开(公告)号：EP3869909A1

公开(公告)日：2021-08-25

申请号：EP19873637.3

申请日：2019-10-01

Applicant: NHK Spring Co., Ltd.

Inventor： HANAMACHI, Toshihiko ,  TATSUMI, Arata ,  SEKIYA, Kenji ,  AIKAWA, Naoya ,  TAKANASHI, Masaya

IPC: H05B3/48 ,  C23C14/50 ,  C23C16/46 ,  H01L21/3065 ,  H01L21/31 ,  H05B3/02

Abstract: A heater comprises a folded heater wire, a first insulator provided on the folded heater wire, a metal sheath in contact with a part of the first insulator, a first insulating member arranged in parallel to a part of a first end of the folded heater wire taken out from a first end of the metal sheath, a second insulating member arranged in parallel to a part of the first insulating member and parallel to a part of a second end of the folded heater wire taken out from the first end of the metal sheath, a third insulating member arranged in parallel to a part of the first insulating member and the second insulating member, and bundle the first insulating member and the second insulating member, and a cylindrical member arranged in parallel to a part of the metal sheath and the third insulating member.

公开(公告)号：EP3866565A1

公开(公告)日：2021-08-18

申请号：EP19870485.0

申请日：2019-10-01

Applicant: NHK Spring Co., Ltd.

Inventor： HANAMACHI, Toshihiko ,  TATSUMI, Arata ,  SEKIYA, Kenji ,  AIKAWA, Naoya ,  TAKANASHI, Masaya

IPC: H05B3/68 ,  C23C14/50 ,  C23C16/46 ,  H01L21/31 ,  H05B3/48 ,  H01L21/3065

Abstract: Disclosed is a stage including a first supporting plate, a second supporting plate under the first supporting plate, a shaft under the second supporting plate and overlapping with the first supporting plate and the second supporting plate, and at least one sheath heater passing through the second supporting plate. The at least one sheath heater is arranged so as to extend on a first surface and a second surface which are parallel to an upper surface of the second supporting plate and which are different in distance from the first supporting plate from each other.

公开(公告)号：EP4009740A1

公开(公告)日：2022-06-08

申请号：EP20850532.1

申请日：2020-07-06

Applicant: NHK Spring Co., Ltd.

Inventor： KIDA, Naoya ,  TATSUMI, Arata ,  SEKIYA, Kenji ,  AIKAWA, Naoya ,  TAKANASHI, Masaya

IPC: H05B3/10 ,  H05B3/18 ,  H05B3/48 ,  H05B3/68 ,  H01L21/205 ,  H01L21/3065 ,  H01L21/31 ,  C23C14/50 ,  C23C16/46

Abstract: A heater includes a folded heater wire, a first insulator provided on the heater wire, a metal sheath provided so as to be in contact with the first insulator, a first insulating member arranged parallel to one of the heater wire taken out from a first end part of the metal sheath, a second insulating member arranged parallel to the first insulating member and parallel to the other of the heater wire taken out from the first end part of the metal sheath, a second insulator in contact with the first and the second insulating members and the metal sheath, and a lid member covering the first insulating member, the lid member being in contact with the metal sheath, the first and the second insulating members via the second insulator, and arranged parallel to the first and the second insulating members and the metal sheath.

公开(公告)号：EP4009024A1

公开(公告)日：2022-06-08

申请号：EP20849555.6

申请日：2020-07-27

Applicant: NHK Spring Co., Ltd.

Inventor： KIDA, Naoya ,  TATSUMI, Arata ,  SEKIYA, Kenji ,  AIKAWA, Naoya ,  TAKANASHI, Masaya

IPC: G01K1/16 ,  G01K7/02

Abstract: A temperature sensor includes a block body, a first thermocouple, and a second thermocouple. The first thermocouple includes a first strand, a second strand, a first insulator surrounding the first strand and the second strand, and a first metal sheath surrounding the first insulator. The second thermocouple includes a third strand, a fourth strand, a second insulator surrounding the third strand and the fourth strand, and a second metal sheath surrounding the second insulator. An end portion of each of the first thermocouple and the second thermocouple is buried in the block body.

公开(公告)号：EP3611999A1

公开(公告)日：2020-02-19

申请号：EP18784228.1

申请日：2018-04-03

Applicant: NHK Spring Co., Ltd.

Inventor： HANAMACHI, Toshihiko ,  SEKIYA, Kenji ,  HASHIMOTO, Daisuke ,  HIRANO, Satoshi ,  TAKIMOTO, Masaru ,  TAKAHARA, Go ,  ARAKI, Yoshihito ,  TATSUMI, Arata ,  KAWASAKI, Takashi ,  TOYAMA, Yuki ,  ANZAI, Satoshi

IPC: H05B3/48 ,  H05B3/10

Abstract: A small diameter sheath heater with improved reliability is provided. The sheath heater according to one embodiment of the present invention includes a metal sheath, a heating wire having a band shape, the heating wire arranged with a space within the metal sheath so as to rotate with respect to an axis direction of the metal sheath, an insulating material arranged in the space, and connection terminals arranged at one end of the metal sheath, the connection terminals electrically connected with both ends of the heating wire respectively.