CONVEYANCE DEVICE
    15.
    发明公开
    CONVEYANCE DEVICE 审中-公开
    输送装置

    公开(公告)号:EP3078461A1

    公开(公告)日:2016-10-12

    申请号:EP14868275.0

    申请日:2014-11-27

    摘要: Conveyance equipment 10 for conveying a plate-like member includes plural items of liquid discharging equipment that hold the member by discharging liquid to generate a negative pressure between the liquid discharging equipment and the member. Each of the plural items of liquid discharging equipment includes a columnar main body, a flat end face formed at the main body, which faces the member, a concave part formed at the end face, and one or more liquid passages that discharge liquid into the concave part at a peripheral edge of the concave part. The one or more liquid passages are arranged so that a direction in which a liquid flows out of the concave part along the end face and a direction from a center of gravity of the member toward a position of the member, opposite the liquid discharging equipment, form an angle smaller than or equal to 90 degrees.

    摘要翻译: 用于输送板状部件的输送设备10包括多个液体排出设备,其通过排出液体来保持该部件以在液体排出设备和该部件之间产生负压。 多个液体排出设备中的每一个包括柱状主体,形成在主体处的平坦端面,该平坦端面面向该构件,形成在该端面处的凹入部分以及将液体排出到该入口中的一个或多个液体通道 凹部的周缘具有凹部。 所述一个或多个液体通道布置成使得液体从所述凹部沿所述端面流出的方向和从所述构件的重心到所述构件的与所述液体排放设备相对的位置的方向, 形成小于或等于90度的角度。