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    VACUUM PUMP
    15.
    发明公开
    VACUUM PUMP 审中-公开
    真空泵

    公开(公告)号：EP3252314A1

    公开(公告)日：2017-12-06

    申请号：EP16743177.4

    申请日：2016-01-19

    申请人： Edwards Japan Limited

    发明人： OHTACHI Yoshinobu ,  MAEJIMA Yasushi ,  TAKAADA Tsutomu

    IPC分类号： F04D19/04

    CPC分类号： F04D29/083 ,  F04D17/168 ,  F04D19/042 ,  F04D19/046 ,  F04D29/403 ,  F04D29/4206

    摘要： Provided is a vacuum pump having a stator disc having a divided structure, in which gaps or misalignments that occur between connection surfaces at which the divided structure is connected are reduced. In a turbo-molecular pump according to this embodiment, a mating relationship between a stator disc and a stator member for alignment (center-alignment) is opposite from that of the related art. Specifically, in a structure in which a base and the stator disc are fitted together, center alignment (positioning/centering) is performed through a structure in which an outer peripheral surface of the stator disc is held (restrained from an outer side) by an inner peripheral surface of the base to be connected thereto. Further, the mating structure of the stator disc includes an integral component. Moreover, the mating position of a stator blade and the mating position of the stator disc having a Siegbahn structure are provided separately.

    摘要翻译： 本发明提供一种具有分割结构的定子盘的真空泵，其中在分割结构连接的连接表面之间发生的间隙或错位减少。 在根据该实施例的涡轮分子泵中，定子盘和用于对准的定子构件（中心对准）之间的配合关系与现有技术的相反。 具体而言，在将基座和定子盘嵌合的结构中，通过将定子盘的外周面从外侧保持（从外侧被限制）的结构，进行中心对准（定位/定心） 基座的内周表面与其连接。 此外，定子盘的配合结构包括一体式部件。 此外，静叶片的配合位置和具有Siegbahn结构的定子盘的配合位置分开设置。

    MOLECULAR PUMP
    16.
    发明授权
    MOLECULAR PUMP 有权
    分子泵

    公开(公告)号：EP2894346B1

    公开(公告)日：2017-08-16

    申请号：EP13833701.9

    申请日：2013-08-27

    申请人： Osaka Vacuum, Ltd.

    发明人： YAMATO, Yukio ,  OBAYASHI, Tetsuro

    IPC分类号： F04D19/04 ,  H05K7/20 ,  F04D29/58 ,  F04D27/02

    CPC分类号： F04D19/042 ,  F04D25/068 ,  F04D27/00 ,  F04D29/58 ,  F04D29/5813 ,  F04D29/584

    摘要： A molecular pump (1A) includes a pump body (2) provided with a turbo molecular pump portion (2a), a control unit (4) provided with a control portion and a power supply portion, and a cooling unit (3) for cooling the pump body (2) and the control unit (4). A first temperature detecting portion (90) is provided in a first position, which is a position inside the control unit (4) and has a low temperature. A second temperature detecting portion (80) also serving as a humidity detecting portion is provided in a second position, which is a position inside the control unit (4) and has a high temperature. The control portion controls the operation of the cooling unit (3) in accordance with a relative humidity in the first position, calculated based on temperature information detected by the first temperature detecting portion (90) and based on temperature information and humidity information detected by the second temperature detecting portion (80) also serving as a humidity detecting portion.

    摘要翻译： 本发明提供一种分子泵（1A），其包括具备涡轮分子泵部（2a）的泵主体（2），具备控制部和电源部的控制部（4），以及用于冷却的冷却部（3） 泵体（2）和控制单元（4）。 第一温度检测部分（90）设置在第一位置，该第一位置是控制单元（4）内的位置并且具有低温。 另外，作为湿度检测部的第2温度检测部（80）设置在控制部（4）的内部且温度高的第2位置。 控制部分根据基于第一温度检测部分（90）检测到的温度信息计算的第一位置中的相对湿度并且基于由第一位置检测到的温度信息和湿度信息来控制冷却单元（3）的操作 第二温度检测部分（80）也用作湿度检测部分。

    VACUUM PUMP
    18.
    发明公开
    VACUUM PUMP 审中-公开
    VAKUUMPUMPE

    公开(公告)号：EP2019208A4

    公开(公告)日：2017-04-26

    申请号：EP07743281

    申请日：2007-05-14

    申请人： EDWARDS JAPAN LTD

    发明人： SHI YONGWEI ,  TAKAHASHI YUJI

    IPC分类号： F04D19/04 ,  F04D29/54 ,  F04D29/64

    CPC分类号： F04D19/042 ,  F04D29/542 ,  F04D29/644 ,  Y10T29/49323

    摘要： [Problem to be Solved] Stator blade wheels and rotor blade wheels do not interfere with each other using lower-cost but wider cutting-width cutting or grinding for half-cutting-off of the stator blade wheels and not using expensive but narrower cutting-width wire electric discharge machining. [Solution] The distance h between a base end face 12ta (12tb) of a stator-blade-wheel outer ring part 12a and the corresponding rotor-blade end face 4aa (4ab), is set at a value larger than the maximum deformation of the running rotor blade wheel 4a during the pump operation. The larger distance h keeps perfectly stator-rotor separation, while the outer ring part 12a of a stator blade wheel 12 goes, in assembling, into the rotor area on account of large shift of any half of stator blade wheels owing to the wide cutting width. It makes also easy stator blade wheel assembling of the pump, as it is allowable to arrange half stator blade wheels with some eccentricity.

    摘要翻译： [要解决的问题]定子叶片轮和转子叶片轮不会相互干扰，因为使用成本更低但切割宽度更宽的切割或研磨来切割定子叶片轮的半切割并且不使用昂贵但更窄的切​​割轮。 宽幅线材放电加工。 [解决方案]将定子叶轮外圈部12a的基端面12ta（12tb）与对应的动叶片端面4aa（4ab）之间的距离h设定为大于最大变形量 在泵操作期间运行的转子叶轮4a。 更大的距离h保持完美的定子 - 转子分离，同时由于宽的切割宽度，定子叶轮12的外环部分12a由于任何一半的定子叶轮的大的偏移而在组装时进入转子区域 。 它还使得泵的定子叶轮组装也变得容易，因为允许以偏心的方式布置半定子叶轮。