Abstract:
The invention concerns an irradiation device for testing objects coated with light-sensitive paint, comprising a EUV radiation source, an optical system for filtering the radiation of the EUV radiation source, a chamber for receiving the object, as well as systems for intersecting the trajectory of the rays on the object. The invention also concerns a method for operating such a device. The invention aims at obtaining as quickly as possible an illumination at least partly simultaneous of several irradiation fields, with different doses, by using an inexpensive laboratory radiation source without resorting to complex optical systems. Therefor, the invention provides a device comprising a simplified and compact optical system, with closable diaphragm apertures located in front of the object to be irradiated and at least one control sensor placed on the trajectory of the rays and enabling the radiation dose to be measured.
Abstract:
A sensing device comprising an electromagnetic sensor (104, 118) having a surface with a plurality of different electromagnetic radiation interception areas arranged one above the other, one or more controllable flaps (112) adapted to cover one or more of the different electromagnetic radiation interception areas preventing the electromagnetic sensor from intercepting electromagnetic radiation on the covered electromagnetic radiation interception areas, at least one control mechanism adapted to maneuver the controllable flaps so as to change the covered electromagnetic radiation interception areas and a plurality of lenses (114) located in front of the electromagnetic sensor, each having a different focal length (116). One of the lenses has a certain focal length and focuses electromagnetic radiation to at least one of the different electromagnetic radiation interception areas, and another of the lenses has a different focal length and focuses electromagnetic radiation to another electromagnetic radiation interception area.
Abstract:
A method and apparatus are provided for processing light from a light source. The method includes the steps of measuring a predetermined set of characteristics of the light source and detecting flicker when the predetermined set of characteristics exceed a corresponding flicker fusion threshold value.
Abstract:
The invention relates to a radiation measuring device, especially for measuring high power radiation (10), comprising a measuring window (12) and a deflecting unit which can guide at least one part of the radiation which is to be measured (10) from the measuring window (12) to a sensor unit (14). According to the invention, the deflecting unit comprises at least one bar (16) into which the radiation (10) is injected via the measuring window (12), parallel to the longitudinal extension (18) thereof, via a side (70). The radiation is retransmitted along the longitudinal extension of the surface (18) bar to the sensor unit (14).
Abstract:
Strahlungsempfänger mit einem Photodetektor und einem Sensor, wobei der Sensor (11) die Strahlungsintensität aufnimmt und ein vor dem Photodetektor (22) angeordneter Shutter (19) in Abhängigkeit von der detektierten einfallenden Strahlungsintensität angesteuert wird. Dabei wird die einfallende Strahlung über eine vor dem Shutter (19) angeordnete Verzögerungseinrichtung (15) dem Photodetektor (22) zugeführt wird, so daß aufgrund der Ansteuerung des Shutters keine den Shutter zerstörende Strahlung den Shutter erreichen kann und gegebenenfalls vom Shutter abgehalten bzw. absorbiert wird..
Abstract:
1. Equipment for the measurement of the electromagnetic radiation coming from the half-space (corresponding to a solid angle of 2 pi) with the aid of a highly sensitive detector of low inertia arranged under a radiation-permeable dome (K), characterised thereby, that above the radiation-permeable dome (K), under which at least the one highly sensitive detector (D) of low inertia is housed, there are provided two identically or differently constructed modulators (M1, M2), which are of dome segment shape, are arranged one inside the other and which rotate at different speed in like or opposite direction about the common vertical axis (A) of both the modulators (M1, M2).
Abstract:
The present invention relates to an apparatus for detecting photons according to an atmospheric condition, using a function of adjusting light quantity that can significantly improve reliability of an atmospheric condition analysis result by minimizing noise in a spectrum by maintaining the quantity of incident light uniform within a predetermined range regardless of atmospheric conditions and changes, and to a method of adjusting light quantity. The apparatus for detecting photons in accordance with atmospheric conditions using a function of adjusting light quantity includes: an apparatus case having a light inlet; a light quantity adjuster disposed under the light inlet and adjusting quantity of incident light such that a predetermined quantity of light travels inside; and a controller controlling operation of the light quantity adjuster in accordance with intensity of light detected by the light quantity adjuster.