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    APPARATUS AND METHOD FOR INSPECTING A SAMPLE USING A PLURALITY OF CHARGED PARTICLE BEAMS
    21.
    发明公开
    APPARATUS AND METHOD FOR INSPECTING A SAMPLE USING A PLURALITY OF CHARGED PARTICLE BEAMS 有权
    装置和方法用于分析样品的具有多带电粒子束

    公开(公告)号：EP3140848A1

    公开(公告)日：2017-03-15

    申请号：EP15726384.9

    申请日：2015-04-23

    申请人： Technische Universiteit Delft

    发明人： KRUIT, Pieter ,  ZONNEVYLLE, Aernout Christiaan ,  REN, Yan

    IPC分类号： H01J37/28

    CPC分类号： H01J37/28 ,  H01J37/141 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/24495 ,  H01J2237/2802 ,  H01J2237/2808

    摘要： An apparatus for inspecting a sample includes a sample holder for holding the sample; a multi beam charged particle generator for generating an array of primary charged particle beams; an electro-magnetic lens system for directing the array of primary charged particle beams into an array of separate focused primary charged particle beams on the sample; a multi-pixel photon detector arranged for detecting photons created by the focused primary charged particle beams when the primary charged particle beams impinge on the sample or after transmission of said primary charged particle beams through the sample; and an optical assembly for conveying photons created by at least two adjacent focused primary charged particle beams of the array of separate focused primary charged particle beams to distinct and/or separate pixels or to distinct and/or separate groups of pixels of the multi-pixel photon detector.

    摘要翻译： 用于检查的样品的装置，包括用于保持所述样品的样品保持器; 多波束的带电粒子发生器，用于在初级带电粒子束的阵列生成; 于电磁透镜系统，用于初级带电粒子束的阵列引导到在单独的主聚焦在样品的带电粒子束的阵列; 布置成用于检测由聚焦初级带电粒子束创建当一次带电粒子束对样品或通过样品所述主带电粒子束的传输之后撞击光子的多像素光子检测器; 并用于传送由单独的聚焦初级带电粒子束以不同和/或独立的像素或所述多像素的像素的不同的和/或单独的组的所述阵列的至少两个相邻的聚焦初级带电粒子束产生的光子的光学组件 光子检测器。

    PROCESS FOR THE PREPARATION OF 2,5-FURANDICARBOXYLIC ACID
    25.
    发明公开
    PROCESS FOR THE PREPARATION OF 2,5-FURANDICARBOXYLIC ACID 有权
    VERFAHREN ZUR HERSTELLUNG VON 2,5-FURANDICARBONSÄURE

    公开(公告)号：EP3013969A1

    公开(公告)日：2016-05-04

    申请号：EP14737042.3

    申请日：2014-06-20

    申请人： Technische Universiteit Delft

    发明人： VAN SPRONSEN, Jacob ,  WITKAMP, Geert-Jan ,  DE GRAAFF, Bart

    IPC分类号： C12P17/04 ,  C07D307/68

    CPC分类号： C12P17/04 ,  C07D307/68

    摘要： The invention is directed to a process for the preparation of 2,5-furandicarboxylic acid (FDCA) by fermentation comprising fermenting a suitable starting compound to produce an aqueous solution of a salt of FDCA having a pH of at least 7, optionally removing solids from said solution, e.g. by filtration, subsequently freeze crystallizing the said salt of FDCA from said solution at said pH, isolating the said FDCA salt in the form of solid crystals, preparing an aqueous solution of said salt and crystallizing FDCA as the free acid from said solution at an acidic pH.

    摘要翻译： 本发明涉及通过发酵制备2,5-呋喃二羧酸（FDCA）的方法，包括发酵合适的起始化合物以产生pH至少为7的FDCA盐的水溶液，任选地从 所说的解决方案，例如 通过过滤，随后在所述pH下将所述FDCA盐从所述溶液中冷冻结晶，将所述FDCA盐以固体晶体的形式分离，制备所述盐的水溶液，并在酸性条件下从所述溶液中结晶FDCA作为游离酸 pH值。

    DEVICE WITH IMPROVED ACTUATING MEANS AND METHOD FOR USE THEREOF
    26.
    发明公开
    DEVICE WITH IMPROVED ACTUATING MEANS AND METHOD FOR USE THEREOF 审中-公开
    有使用改进的控制装置及方法DEVICE

    公开(公告)号：EP3007868A2

    公开(公告)日：2016-04-20

    申请号：EP14737336.9

    申请日：2014-06-11

    申请人： Technische Universiteit Delft

    发明人： GENANI, Gaurav

    IPC分类号： B25J19/00 ,  B25J9/00

    CPC分类号： B25J9/0006 ,  B25J13/08 ,  B25J19/0012 ,  F16M13/04 ,  Y10S901/02

    摘要： The present invention relates to a device, comprising: a main body, an arm assembly comprising: a first arm member, a first joint, a second arm member, a second joint, orientation control means for adjusting the orientation of the arm members and/or joints of the arm assembly relative to the main body, one or more passive actuating means for counterbalancing at least a part of the weight of the arm assembly, wherein an adjustable lever mechanism is arranged between the main body and the arm assembly, drive means configured for adjusting the lever arm, one or more orientation sensors for determining the orientation of the arm members and/or joints of the arm assembly relative to the main body, and lever arm control means for adjusting the lever arm of the adjustable lever mechanism with the drive means. The invention further relates to a method of adjusting a lever arm of such a device.

    APPARATUS AND METHOD FOR INSPECTING A SURFACE OF A SAMPLE
    28.
    发明公开
    APPARATUS AND METHOD FOR INSPECTING A SURFACE OF A SAMPLE 有权
    用于检查样本的表面的装置和方法

    公开(公告)号：EP2864997A1

    公开(公告)日：2015-04-29

    申请号：EP13733082.5

    申请日：2013-06-12

    申请人： Technische Universiteit Delft

    发明人： KRUIT, Pieter ,  GHEIDARI, Ali Mohammadi ,  REN, Yan

    IPC分类号： H01J37/244 ,  H01J37/28

    CPC分类号： H01J37/244 ,  H01J37/14 ,  H01J37/28 ,  H01J2237/2446 ,  H01J2237/2448

    摘要： The invention relates to an apparatus for inspecting a surface of a sample, wherein the apparatus comprises : at least one charged particle source for generating an array of primary charged particle beams, a condenser lens for directing all charged particle beams to a common cross-over, a lens system for directing the primary charged particle beams from the common cross-over towards the sample surface and for focusing all primary charged particle beams into an array of individual spots on the sample surface, and a position sensitive secondary electron detector positioned at least substantially in or near a plane comprising said common cross-over.

    摘要翻译： 本发明涉及一种用于检查样品表面的设备，其中该设备包括：至少一个带电粒子源，用于产生初级带电粒子束阵列;聚光透镜，用于将所有带电粒子束引导至公共交叉点 ，用于将来自公共交叉的初级带电粒子束引向样品表面并用于将所有初级带电粒子束聚焦成样品表面上的单独斑点阵列的透镜系统，以及位置敏感二次电子探测器 基本上在包括所述公共交叉的平面中或附近。