公开(公告)号：EP1168401A2

公开(公告)日：2002-01-02

申请号：EP01440179.8

申请日：2001-06-20

申请人： ALCATEL

发明人： Sood, Dinesh Kumar ,  Zmood, Ronald Barry ,  Qin, Lijiang

IPC分类号： H01H61/02

CPC分类号： H01H1/0036 ,  H01H37/58 ,  H01H61/02 ,  H01H67/22 ,  H01H2001/0042 ,  H01H2037/008 ,  H01H2061/006

摘要： A bi-stable microswitch (1) including a pair of contacts (4, 5) and an armature (10,11) movable between a first position and a second position to selectively break or make the pair of contacts, the armature being latched in the second position by a magnetic path including a permanent magnet (3) and a magnetisable element (7) having a first temperature, wherein the armature is resiliently biased towards the first position when latched, and is movable from the second position to the first position upon heating of the magnetisable element to above the first temperature.

摘要翻译： 一种双稳态微动开关（1），包括一对触点（4,5）和电枢（10,11），可在第一位置和第二位置之间移动，以选择性地断开或制造该对触点，电枢被锁定在 所述第二位置包括具有第一温度的永磁体（3）和可磁化元件（7）的磁路，其中所述电枢在被锁定时被弹性偏置到所述第一位置，并且可从所述第二位置移动到所述第一位置 在将可磁化元件加热到高于第一温度时。

公开(公告)号：EP1085219A2

公开(公告)日：2001-03-21

申请号：EP00810798.9

申请日：2000-09-05

申请人： JDS Uniphase Inc. ,  Cronos Integrated Microsystems, Inc.

发明人： Dhuler, Vijayakumar R. ,  Hill, Edward ,  Cowen, Allen

IPC分类号： F15C5/00 ,  H01H37/32

CPC分类号： F16K99/0001 ,  B81B3/0024 ,  B81B2201/031 ,  F03G7/06 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0036 ,  F16K99/0042 ,  F16K2099/0074 ,  F16K2099/008 ,  H01H1/0036 ,  H01H37/32 ,  H01H2037/008 ,  Y10S310/06

摘要： A MEMS thermal actuator device is provided that is capable of providing linear displacement in a plane generally parallel to the surface of a substrate. Additionally, the MEMS thermal actuator of the present invention may provide for a self-contained heating mechanism that allows for the thermal actuator to be actuated using lower power consumption and lower operating temperatures. The MEMS thermal actuator includes a microelectronic substrate having a first surface and at least one anchor structure affixed to the first surface. A composite beam extends from the anchor(s) and overlies the first surface of the substrate. The composite beam is adapted for thermal actuation, such that it will controllably deflect along a predetermined path that extends substantially parallel to the first surface of the microelectronic substrate. In one embodiment the composite beam comprises two or layers having materials that have correspondingly different thermal coefficients of expansion. As such, the layers will respond differently when thermal energy is supplied to the composite. An electrically conductive path may extend throughout the composite beam to effectuate thermal actuation. In one embodiment of the invention a two layer composite beam comprises a first layer of a semiconductor material and a second layer of a metallic material. The semiconductor material may be selectively doped during fabrication so as to create a self-contained heating mechanism within the composite beam. The invention also comprises a MEMS thermal actuator that includes two or more composite beams. The two or more composite beams may be disposed in an array or a ganged fashion, such that the multiple composite beams benefit from overall force multiplication and are therefore capable of greater and more linear displacement distances. The invention is also embodied in a method for fabricating the MEMS thermal actuators of the present invention.

摘要翻译： 提供了一种MEMS热致动器装置，其能够在大致平行于衬底的表面的平面中提供线性位移。 此外，本发明的MEMS热致动器可以提供一种独立的加热机构，其允许使用较低的功率消耗和较低的工作温度来致动热致动器。 MEMS热致动器包括具有固定到第一表面的第一表面和至少一个锚定结构的微电子衬底。 复合梁从锚固体延伸并覆盖在基底的第一表面上。 复合梁适于热致动，使得其可沿着基本上平行于微电子衬底的第一表面延伸的预定路径可控地偏转。 在一个实施例中，复合梁包括具有相应不同热膨胀系数的材料的两层或多层。 因此，当将热能提供给复合材料时，这些层将作出不同的响应。 导电路径可延伸穿过复合梁，以实现热致动。 在本发明的一个实施例中，双层复合束包括第一层半导体材料和第二层金属材料。 半导体材料可以在制造期间被选择性掺杂，以便在复合束内产生独立的加热机构。 本发明还包括包括两个或更多个复合梁的MEMS热致动器。 两个或更多个复合梁可以以阵列或组合的方式设置，使得多个复合梁受益于总的力倍增，因此能够具有更大和更大的线性位移距离。 本发明也体现在本发明的MEMS热致动器的制造方法中。

公开(公告)号：EP1027714A1

公开(公告)日：2000-08-16

申请号：EP98951901.2

申请日：1998-10-29

申请人： Andersson, Gert ,  Westberg, David

发明人： Andersson, Gert ,  Westberg, David

IPC分类号： H01H9/20 ,  H01H37/52

CPC分类号： H01H1/0036 ,  H01H1/50 ,  H01H37/52 ,  H01H61/00 ,  H01H2001/0047 ,  H01H2001/0057 ,  H01H2001/0063 ,  H01H2037/008 ,  H01H2061/006

摘要： The invention refers to a micromechanical switching device including at least two contact elements (11, 12, 31, 32), which are provided at least partly movable relative each other and via thermal actuation can be closed and opened, whereby the contact elements (11, 12, 31, 32) at least partly are comprised of at least two materials (14, 15, 16, 17, 34-37) with essentially different thermal expansion coefficients. The contact elements (11, 12, 31, 32) at excitation are arranged to displace essentially in same level and in different directions.

公开(公告)号：EP0928446A1

公开(公告)日：1999-07-14

申请号：EP98941413.0

申请日：1998-07-22

申请人： ALCATEL

发明人： JOHAN, Ron

IPC分类号： B81B7 ,  B81B3 ,  H01H67 ,  H04Q1 ,  H04Q3 ,  H01H1 ,  H01H37 ,  H01H61

CPC分类号： H01H67/22 ,  H01H1/0036 ,  H01H37/58 ,  H01H61/02 ,  H01H2001/0042 ,  H01H2037/008 ,  H01H2061/006 ,  H04Q1/145 ,  H04Q3/0012 ,  H04Q2213/13003 ,  H04Q2213/1302 ,  H04Q2213/1304 ,  H04Q2213/13302

摘要： A line multiplier is formed of n upstream lines and m downstream lines where m > n by providing a micro-technology array of m x n crosspoints switches using, e.g., magnetic latching, wherein the latching magnets are heated to the Curie temperature to cause the state of a switch to change.

公开(公告)号：EP0764336A4

公开(公告)日：1999-04-07

申请号：EP95923778

申请日：1995-06-09

申请人： UNIV CASE WESTERN RESERVE

发明人： MEHREGANY MEHRAN ,  GOLDMAN KENNETH G ,  DHULER VIJAYAKUMAR R

IPC分类号： G01L1/18 ,  B81B3/00 ,  G01D9/18 ,  G01D15/00 ,  G01K5/60 ,  G01P15/08 ,  H01H1/00 ,  H01H9/00 ,  H01H35/14 ,  H01H35/34 ,  H01H37/52 ,  H01H37/74 ,  H01H61/02 ,  H01L29/84 ,  H01H9/20 ,  G01P15/00 ,  G01P15/13 ,  G01P15/135 ,  H01H35/24 ,  H01H35/28 ,  H01H37/10 ,  H01H37/70

CPC分类号： G01P15/0891 ,  G01P15/0802 ,  G01P2015/0814 ,  H01H1/0036 ,  H01H35/14 ,  H01H35/34 ,  H01H37/52 ,  H01H37/74 ,  H01H61/02 ,  H01H2001/0047 ,  H01H2037/008 ,  H01H2061/006

摘要： A micromechanical memory sensor includes a latch member assembly (20, 30) mechanically latching upon detection of a threshold value of a variable condition (ambient temperature, acceleration, pressure). The mechanical latching is detected by circuitry of a readout mechanism (21, 22). The sensor further includes a resetting mechanism such as a thermal resistor (24), proof mass (52, 101) or electrostatic combing drive (170, 175) for electrically unlatching the latch member assembly whereby the sensor is latched purely mechanically in its operative states and is electrically reset for repeat use.

公开(公告)号：EP1799612B1

公开(公告)日：2014-07-02

申请号：EP05791710.6

申请日：2005-09-29

申请人： International Business Machines Corporation

发明人： DESPONT, Michel ,  DÜRIG, Urs, T. ,  GOTSMANN, Bernd, W.

IPC分类号： B81B3/00

CPC分类号： B81B3/0018 ,  F03G7/06 ,  F03G7/065 ,  H01H2037/008

公开(公告)号：EP1525595B1

公开(公告)日：2008-12-31

申请号：EP03756515.7

申请日：2003-07-30

申请人： COMMISSARIAT A L'ENERGIE ATOMIQUE ,  CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) ,  INSTITUT NATIONAL POLYTECHNIQUE DE GRENOBLE

发明人： ROSTAING, Hervé ,  DELAMARE, Jérôme ,  CUGAT, Orphée ,  DIEPPEDALE, Christel

IPC分类号： H01F7/16 ,  H01H50/00 ,  F15C5/00

CPC分类号： H01F7/1646 ,  H01F7/122 ,  H01F7/124 ,  H01H3/24 ,  H01H37/58 ,  H01H50/005 ,  H01H51/22 ,  H01H67/22 ,  H01H2037/008

摘要： The invention relates to a magnetic actuator comprising a mobile magnetic part (4), a fixed magnetic part (5) and means for starting the displacement of the mobile magnetic part (4) with respect to the fixed magnetic part (5). The inventive actuator comprises at least two amagnetic supports (1, 2) arranged on the different planes, whereby forming a space (3) therebetween. The fixed magnetic part (5) is connected at least to one of the supports (1, 2). Each support (1, 2) is provided with a stop area (10, 20) for the mobile magnetic part (4) which is separated from the fixed magnetic part (5). The mobile magnetic part (4) is in levitation in the space (3) between two supports (1,2) as a result of a magnetic guidance produced by the fixed magnetic part (5) when it is not abutted against the stop area (10,20) of the supports (1, 2). The mobile magnetic part (4) is enable to take several stable magnetic positions when it is abutted against the supports (1, 2).

摘要翻译： 磁性致动器本发明涉及一种磁性致动器，其包括可移动磁性部件（4），固定磁性部件（5）和用于开始可移动磁性部件（4）相对于固定磁性部件（5）的位移的装置。 本发明的致动器包括布置在不同平面上的至少两个磁性支撑件（1,2），由此在其间形成空间（3）。 固定磁性部件（5）至少连接到支撑件（1,2）中的一个。 每个支撑件（1,2）设置有用于与固定磁性部件（5）分离的可移动磁性部件（4）的止动区域（10,20）。 当固定磁性部件（5）未抵靠止动区域（5）时，由于固定磁性部件（5）产生的磁性引导，可动磁性部件（4）悬浮在两个支撑件（1,2）之间的空间（3） 10,20）的支撑件（1,2）。 当移动磁性部件（4）抵靠在支撑件（1,2）上时能够取得几个稳定的磁性位置。

公开(公告)号：EP1979939A1

公开(公告)日：2008-10-15

申请号：EP07709423.3

申请日：2007-01-18

申请人： ÅSTC Aerospace AB

发明人： STENMARK, Lars

IPC分类号： H01L23/427 ,  B81B3/00 ,  B81B7/00 ,  H01H1/00

CPC分类号： H01H37/36 ,  H01H37/46 ,  H01H2037/008

摘要： The present invention is a thermally controlled switch with high thermal or electrical conductivity. Microsystems Technology manufacturing methods are fundamental for the switch that comprises a sealed cavity 213 formed within a stack of bonded wafers 201 , 202, wherein the upper wafer 202 comprises a membrane assembly 205 adapted to be arranged with a gap 21 1 to a receiving structure 210. A thermal actuator material 215, which preferably is a phase change material, e.g. paraffin, adapted to change volume with temperature, fills a portion of the cavity 213. A conductor material, providing a high conductivity transfer structure 216 between the lower wafer 201 and the rigid part 208 of the membrane assembly 205, fills another portion of the cavity 213. Upon a temperature change, the membrane assembly 205 is displaced and bridges the gap 21 1 , providing a high conductivity contact from the lower wafer 201 to the receiving structure 210.

公开(公告)号：EP1597192A1

公开(公告)日：2005-11-23

申请号：EP04713719.5

申请日：2004-02-23

申请人： Honeywell International Inc.

发明人： KANG, Joon-Won

IPC分类号： B81B3/00

CPC分类号： H01H1/0036 ,  H01H37/52 ,  H01H61/00 ,  H01H2037/008

摘要： A Micro Electro-Mechanical Systems (MEMS) thermal switch. The switch includes a FET having a source and drain in a substrate and a beam isolated from the substrate, wherein the beam is a monolithic beam. The beam is positioned over the source and the drain and spaced by a predefined gap. When the thermal set point is reached, the beam moves to electrically connect the source to the drain.

摘要翻译： 微电子机械系统（MEMS）热敏开关。 开关包括FET，其具有在衬底中的源极和漏极以及与衬底隔离的束。 光束定位在源极和漏极之上并且隔开预定的间隙。 当达到热设定点时，梁移动以将源极电连接到漏极。

公开(公告)号：EP1529301A2

公开(公告)日：2005-05-11

申请号：EP03759192.2

申请日：2003-08-13

申请人： INTEL CORPORATION

发明人： MA, Qing

IPC分类号： H01H61/00

CPC分类号： H01H1/0036 ,  H01H37/5409 ,  H01H2001/0042 ,  H01H2037/008

摘要： A microelectromechanical system (MEMS) that includes a first electro-thermal actuator, a second electro-thermal actuator and a beam having a first side and a second side. The first electro-thermal actuator applies a force to the first side of the beam as current passes through the first electro-thermal actuator and the second electro-thermal actuator applies a force to the second side of the beam as current passes through the second electro-thermal actuator.