Solvent blend for use in high purity precursor removal
    45.
    发明公开
    Solvent blend for use in high purity precursor removal 有权
    Lösungsmittelmischungzur Anwendung bei der Entfernung hochreinerVorläufer

    公开(公告)号:EP1193309A1

    公开(公告)日:2002-04-03

    申请号:EP01122661.0

    申请日:2001-09-28

    IPC分类号: C11D7/50 C11D11/00 B08B9/027

    摘要: The present invention is a process for cleaning a manifold which delivers high purity source chemical from a high purity source chemical container to a point of use after delivery of the high purity source chemical through the manifold is discontinued, comprising; evacuating the manifold by connection to a source of vacuum, terminating the evacuation, introducing at least one solvent for the high purity source chemical into the manifold from at least one source of the at least one solvent, dissolving any residual high purity source chemical in the manifold into the at least one solvent, venting a resulting mixture of residual high purity source chemical and solvent from the manifold, purging such as by pressurizing the manifold by connection to a source of preferably elevated pressure inert gas and terminating the purging i.e. pressurizing, before reintroducing high purity source chemical into the manifold.

    摘要翻译: 本发明是一种用于清洗歧管的方法,其将高纯度源化学物质从高纯度源化学品容器输送到中止使用的高纯度源化学品输送点之后,其包括: 通过连接到真空源排出歧管,终止排气,从至少一种溶剂的至少一个源将至少一种用于高纯度源化学品的溶剂引入歧管中,将任何残留的高纯度源化学物质溶解在 歧管进入至少一种溶剂,从歧管排出残留的高纯度源化学品和溶剂的混合物,清洗,例如通过连接到优选高压惰性气体源并通过加压来终止吹扫,即加压,在 将高纯度源化学品重新引入歧管。

    PROCESS FOR CLEANING ARTICLES
    46.
    发明公开
    PROCESS FOR CLEANING ARTICLES 失效
    清洁制品的过程

    公开(公告)号:EP0913464A1

    公开(公告)日:1999-05-06

    申请号:EP97924236.9

    申请日:1997-05-28

    摘要: In a cleaning process comprising (1) a step of cleaning an article with a cleaning solvent predominantly comprised of a hydrocarbon, (2) a step of rinsing the article having attached thereto the cleaning solvent, with a rinsing solvent predominantly comprised of a hydrofluorocarbon, and (3) a step of separating into two layers the hydrocarbon-containing rinsing solvent discharged from the rinsing step (2); a cyclic hydrofluorocarbon, in which the number of fluorine atoms is larger than the number of hydrogen atoms, is used as the rinsing solvent.

    摘要翻译: 在清洗过程中,包括(1)用主要由烃组成的清洗溶剂清洗物品的步骤,(2)用主要由氢氟烃组成的冲洗溶剂冲洗附着有清洗溶剂的物品的步骤, (3)将从漂洗步骤(2)排出的含烃清洗溶剂分成两层的步骤; 使用其中氟原子数大于氢原子数的环状氢氟烃作为冲洗溶剂。

    METHOD FOR CLEANING
    49.
    发明授权
    METHOD FOR CLEANING 失效
    清洁方法

    公开(公告)号:EP0496899B1

    公开(公告)日:1996-10-16

    申请号:EP91914665.4

    申请日:1991-08-22

    IPC分类号: C23G5/028 C23G5/04 C11D7/50

    摘要: A method and device for cleaning, in which an object to be cleaned is washed or rinsed with cleaning or rinsing agent constituted mainly of non-aqueous solvent and hydrophilic solvent and is dried after removing cleaning or rinsing agent sticking to the surface of said object with the application of cleansing agent constituted mainly of perfluorocarbon or vapor thereof. In another way, the object, after washed with aqueous cleaning agent or in water, is cleaned and dried with the application of cleaning agent constituted mainly of perfluorocarbon or vapor thereof. Cleansing agent constituted mainly of perfluorocarbon or vapor thereof is also applicable to cleaning and rinsing of an object to be cleaned.

    摘要翻译: 一种清洁方法和装置,其中用主要由非水溶剂和亲水性溶剂构成的清洁或冲洗剂清洗或冲洗待清洁物体,并且在去除粘附在所述物体表面上的清洁剂或漂洗剂后干燥 主要由全氟化碳或其蒸气构成的清洁剂的应用。 另一方面,在用含水清洁剂清洗或在水中清洗后,通过施用主要由全氟化碳或其蒸气构成的清洁剂来清洁和干燥物体。 主要由全氟化碳或其蒸汽构成的清洁剂也适用于清洁和清洗待清洁物体。