Optical element, projection optical system, and object detector
    41.
    发明公开
    Optical element, projection optical system, and object detector 审中-公开
    Optisches Elements,Optiches Projektionssystem und Objektdetektor

    公开(公告)号:EP2808708A1

    公开(公告)日:2014-12-03

    申请号:EP14170143.3

    申请日:2014-05-28

    Abstract: Provided is an optical element (L11, L21) including an incidence plane (S11, S21), and an exit plane (S12, S22) including a plurality of planes that are jointed together. The incidence plane (S11, S21) has a shape based on an angle of divergence of light beam incident upon the incidence plane (S11, S21) and irradiation coverage of light beam exiting from the exit plane (S12, S22).

    Abstract translation: 本发明提供一种包括入射面(S11,S21)的光学元件(L11,L21)以及包含多个被连接在一起的平面的出射平面(S12,S22)。 入射面(S11,S21)具有基于入射面入射的光束的发散角(S11,S21)和从出射面出射的光束的照射覆盖的形状(S12,S22)。

    ELECTROMAGNETIC WAVE BEAM SPLITTER
    43.
    发明公开
    ELECTROMAGNETIC WAVE BEAM SPLITTER 审中-公开
    电磁波束分裂器

    公开(公告)号:EP2711743A1

    公开(公告)日:2014-03-26

    申请号:EP11865702.2

    申请日:2011-11-21

    Abstract: Embodiments of the present invention relate to an electromagnetic wave beam splitter, comprising a functional layer made of at least one metamaterial sheet, wherein different metamaterial sheets have the same refractive index distribution; the metamaterial sheet may be divided into a circular region and an annular region concentric to the circular region; a refractive index increases continuously as a radius increases and refractive indices at the same radius are the same within the circular region; and a refractive index decreases continuously as a radius increases and refractive indices are the same at the same radius within the annular region. The circular region of the functional layer of the beam splitter according to the present invention has the function of diverging an electromagnetic wave; the annular region has the function of converging an electromagnetic wave; the electromagnetic wave incident on the circular region of the functional layer deflects toward edges on two sides of the functional layer respectively; the electromagnetic wave incident on the annular region deflects in a direction toward a circle center; and after an electromagnetic wave emitted by a signal source is incident on the beam splitter, an emergent electromagnetic wave forms an annular radiation region. This can satisfy the requirements of, for example, avoiding an obstacle and interference.

    Abstract translation: 本发明的实施例涉及一种电磁波分束器,其包括由至少一个超材料片制成的功能层,其中不同的超材料片具有相同的折射率分布; 超材料片可以被分成圆形区域和与圆形区域同心的环形区域; 随着半径的增加折射率连续增加,并且在圆形区域内相同半径处的折射率相同; 并且折射率随着半径增加而连续减小,并且在环形区域内的相同半径处的折射率相同。 根据本发明的分束器的功能层的圆形区域具有发散电磁波的功能; 环形区域具有会聚电磁波的功能; 入射在功能层的圆形区域上的电磁波分别向功能层两侧的边缘偏转; 入射在环形区域上的电磁波在朝向圆心的方向上偏转; 在信号源发出的电磁波入射到分束器上后,出射的电磁波形成环状的放射区域。 这可以满足例如避免障碍和干扰的要求。

    ILLUMINATION DEVICE, PROJECTION-TYPE IMAGE DISPLAY DEVICE, AND OPTICAL DEVICE
    44.
    发明公开
    ILLUMINATION DEVICE, PROJECTION-TYPE IMAGE DISPLAY DEVICE, AND OPTICAL DEVICE 有权
    照明装置,投影型图像显示装置以及光学装置

    公开(公告)号:EP2708948A1

    公开(公告)日:2014-03-19

    申请号:EP12782132.0

    申请日:2012-04-23

    Abstract: To provide an illumination device and a projection type image display device that illuminate an area to be illuminated (image formation area) under conditions where speckle noise is less noticeable.
    An illumination device according to the present invention includes: a light source 11 that emits coherent light; an optical scanning section 15 that scans the coherent light emitted from the light source 11; a lens array 22 including a plurality of element lenses and configured to diverge the light scanned by the optical scanning section; an optical path conversion system 23 configured to control a diverging angle of the diverging light to be emitted from respective points of the lens array 22 and to allow the diverging light whose diverging angle has been controlled to illuminate an area to be illuminated sequentially in an overlapping manner.

    Abstract translation: 提供一种照明装置和投影型图像显示装置,其在斑点噪声较不明显的情况下照射待照射区域(图像形成区域)。 根据本发明的照明装置包括:发射相干光的光源11; 扫描从光源11发射的相干光的光学扫描部分15; 透镜阵列22,其包括多个元件透镜并且被配置为使由光学扫描部分所扫描的光发散; 光路转换系统23,其被配置为控制将从透镜阵列22的各个点发射的发散光的发散角,并且允许发散角已被控制的发散光以重叠的方式依次照明待发光的区域 方式。

    PROJECTION-TYPE DISPLAY DEVICE
    48.
    发明公开
    PROJECTION-TYPE DISPLAY DEVICE 有权
    投影式显示装置

    公开(公告)号:EP2634628A1

    公开(公告)日:2013-09-04

    申请号:EP11836034.6

    申请日:2011-10-13

    Abstract: It is to provide a projection type display apparatus which enhances the contrast performance while minimizing a reduction in the brightness by blocking a light beam which would decrease the contrast through the use of diaphragms provided in both of an illumination optical system and a projection lens.
    [Solution] A light source portion 1 and 2, a first lens array 4, a second lens array 5, and a superposition lens 7 constitute an illumination optical system. An illumination diaphragm 8 located in the vicinity 7 of the second lens array becomes a diaphragm aperture in a rectangular shape when being narrowed, wherein a side of the diaphragm aperture in the rectangular shape and longer side directions of the lens cells of the second lens array 5 are perpendicular or parallel to each other. A liquid crystal display device 17 modulates incident light. A projection lens 19 enlarges and projects modulation light. A projection lens diaphragm 20 becomes a diaphragm aperture in a rhombus shape when being narrowed, wherein a diagonal line of the diaphragm aperture in the rhombus shape and directions of sides of lens cells in a pupil image of the second lens array 5 which is formed in a pupil position of the projection lens are perpendicular or parallel to each other.

    Abstract translation: 提供一种投影型显示装置,其通过使用设置在照明光学系统和投影透镜两者中的光阑来阻挡会降低对比度的光束,从而提高对比度性能同时最小化亮度降低。 解决方案光源部分1和2,第一透镜阵列4,第二透镜阵列5和叠加透镜7构成照明光学系统。 位于第二透镜阵列附近7的照明光阑8在变窄时成为矩形形状的光阑孔径,其中第四透镜阵列的矩形光阑开口的边长和透镜单元的长边方向 5彼此垂直或平行。 液晶显示装置17调制入射光。 投影透镜19放大并投射调制光。 当缩小投影透镜光阑20时,成为菱形形状的光阑开口,其中形成在第二透镜阵列5的瞳孔图像中的菱形形状的光阑开口的对角线和透镜单元的边的方向 投影透镜的瞳孔位置彼此垂直或平行。

    Illumination optical system, configuration and illumination methods
    49.
    发明公开
    Illumination optical system, configuration and illumination methods 有权
    Belichtungssystem,Belichtungsmethod und Konfigurationsmethod

    公开(公告)号:EP2631699A1

    公开(公告)日:2013-08-28

    申请号:EP13156736.4

    申请日:2008-09-10

    Inventor: Tanitsu, Osamu

    Abstract: An illumination optical system which illuminates a surface to be illuminated on the basis of light from a light source (1) has a first optical path in which a diffractive optical element (6) can be arranged at a first position thereof; a second optical path in which a spatial light modulator (3) with a plurality of optical elements (3 a) arrayed two-dimensionally and controlled individually can be arranged at a second position thereof; and a third optical path which is an optical path of light having passed via at least one of the first optical path and the second optical path and in which a distribution forming optical system (11) is arranged. The distribution forming optical system (11) forms a predetermined light intensity distribution on an illumination pupil located in the third optical path, based on the light having passed via at least one of the first and second optical paths.

    Abstract translation: 基于来自光源(1)的光照射要照明的表面的照明光学系统具有第一光路,其中衍射光学元件(6)可以布置在其第一位置; 可以在其第二位置布置具有排列成二维并且被单独控制的多个光学元件(3a)的空间光调制器(3)的第二光路; 以及第三光路,其是通过了所述第一光路和所述第二光路中的至少一个的光的光路,并且其中布置有分布形成光学系统(11)。 分布形成光学系统(11)基于通过第一和第二光路中的至少一个的光而在位于第三光路中的照明光瞳上形成预定的光强度分布。

    Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
    50.
    发明公开
    Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method 审中-公开
    光学单元,照明光学装置,曝光装置和装置制造方法

    公开(公告)号:EP2620801A2

    公开(公告)日:2013-07-31

    申请号:EP12197228.5

    申请日:2008-10-23

    Inventor: Tanitsu, Osamu

    Abstract: An illumination optical apparatus has an optical unit (3). The optical unit has a light splitter (35) to split an incident beam into two beams; a first spatial light modulator (33) which can be arranged in an optical path of a first beam; a second spatial light modulator (34) which can be arranged in an optical path of a second beam; and a light combiner (36) which combines a beam having passed via the first spatial light modulator, with a beam having passed via the second spatial light modulator; each of the first spatial light modulator and the second spatial light modulator has a plurality of optical elements (33a, 34a) arranged two-dimensionally and controlled individually.

    Abstract translation: 照明光学设备具有光学单元(3)。 光学单元具有分光器(35)以将入射光束分成两个光束; 第一空间光调制器(33),其可以布置在第一光束的光路中; 可以布置在第二光束的光路中的第二空间光调制器(34) 以及合光器(36),其将已经经过所述第一空间光调制器的光束与已经经过所述第二空间光调制器的光束组合; 第一空间光调制器和第二空间光调制器中的每一个具有多个光学元件(33a,34a),所述多个光学元件被二维地布置并且被单独地控制。

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