公开(公告)号：EP1422063A1

公开(公告)日：2004-05-26

申请号：EP03257345.3

申请日：2003-11-20

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Song, Hoon ,  Park, Jun-hyub ,  Oh, Yong-soo ,  Lee, Chang-Seung ,  Kim, Young-jae ,  Lim, Ji-hyuk ,  Kuk, Keon

IPC分类号： B41J2/14 ,  B41J2/16

CPC分类号： B41J2/1404 ,  B41J2/1412 ,  B41J2/14129 ,  B41J2/1603 ,  B41J2/1625 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2002/1437 ,  B41J2002/14467 ,  Y10T29/49083 ,  Y10T29/49128 ,  Y10T29/49401

摘要： A monolithic ink-jet printhead and a method for manufacturing the same are provided. The monolithic ink-jet printhead includes a heater disposed between two ink chambers. In the monolithic ink-jet printhead, a lower ink chamber filled with ink to be ejected is formed on the upper surface of a substrate, and a manifold for supplying ink to the lower ink chamber is formed on the bottom surface of the substrate. An ink channel is disposed between the lower ink chamber and the manifold and perpendicularly penetrates the substrate. A nozzle plate has a plurality of passivation layers stacked on the substrate and a metal layer stacked on the passivation layers. In the nozzle plate, an upper ink chamber is formed on the bottom surface of the metal layer, and a nozzle connected to the upper ink chamber is formed on the upper surface of the metal layer, and a connection hole connecting the upper ink chamber and the lower ink chamber is formed in and penetrates the passivation layers. A heater is provided between the passivation layers and is located between the upper ink chamber and the lower ink chamber for heating ink contained in the ink chambers. A conductor is provided between the passivation layers and is electrically connected to the heater to apply a current to the heater. Since most of heat energy generated from the heater is transferred to ink and a rise in the temperature of the printhead is suppressed, energy efficiency and operating frequency can be increased and the printhead can operate in a stable manner for a long time.

摘要翻译： 本发明提供一种整体的喷墨打印头及其制造方法。 该整体式喷墨打印头包括两个油墨室之间设置的加热器。 在该整体式喷墨打印头中，填充有墨的下部墨室要喷射形成在基板的上表面，并且供墨到下部墨室的歧管是形成在基片的底表面上。 墨通道在下部墨室和所述歧管之间设置并垂直穿过基材。 喷嘴板具有堆叠在衬底和堆叠在所述钝化层的金属层的钝化层上的多个。 在喷嘴板到上墨室中形成金属层的底表面上，并且连接到上部墨水室的喷嘴被形成在金属层的上表面上，和一个连接孔连接上部墨室和 下部墨室设置在形成并穿透钝化层。 在钝化层之间设置有加热器和位于上墨室和容纳在墨水室用于加热墨水的较低的油墨室之间。 在钝化层之间设置导体和电连接到所述加热器的电流施加到加热器上。 由于大多数从加热器产生热能被传递到油墨和打印头的温度的上升被抑制，能效和操作频率可以增加和打印头能够以稳定的方式很长时间操作。

公开(公告)号：EP1216837A1

公开(公告)日：2002-06-26

申请号：EP01310421.1

申请日：2001-12-13

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Lee, Sang-wook ,  Oh, Yong-soo ,  Kim, Hyeon-cheol

IPC分类号： B41J2/16

CPC分类号： B41J2/14137 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/1437

摘要： A method for manufacturing an ink-jet printhead having a hemispherical ink chamber is provided. A nozzle plate (120) is formed on the surface of substrate (110). A ring-shaped heater (130) is formed on the nozzle plate. A manifold (112) for supplying ink is formed by etching the substrate. An electrode (150) is formed on the nozzle plate to be electrically connected to the heater. A nozzle (122), through which ink will be ejected, is formed by etching the nozzle plate inside the heater to have a diameter smaller than the diameter of the heater. A groove (124) for forming an ink channel is formed to expose the substrate by etching the nozzle plate so that the groove extends from the outside of the heater toward the manifold. An ink chamber is formed to have a diameter greater than the diameter of the heater and be almost hemispherical by etching the substrate exposed by the nozzle. An ink channel is formed to connect the ink chamber and the manifold by isotropically etching the substrate exposed by the groove. The groove is closed by forming a first material layer (180) on the nozzle plate. Here, the first material layer is introduced to prevent ink from leaking out through the groove and may be a silicon nitride layer or a silicon oxide layer.

摘要翻译： 提供一种用于制造具有半球形墨水室的喷墨打印头的方法。 在基板（110）的表面上形成喷嘴板（120）。 在喷嘴板上形成环状加热器（130）。 用于供应墨水的歧管（112）通过蚀刻基底而形成。 电极（150）形成在喷嘴板上以电连接到加热器。 通过将加热器内部的喷嘴板蚀刻成具有小于加热器直径的直径，形成通过其喷射墨水的喷嘴（122）。 形成用于形成油墨通道的槽（124）形成为通过蚀刻喷嘴板而使基板暴露，使得槽从加热器的外部朝向歧管延伸。 形成油墨室，其直径大于加热器的直径，并且通过蚀刻由喷嘴暴露的基板而几乎为半球形。 形成油墨通道，通过各向同性蚀刻由凹槽暴露的基材来连接油墨室和歧管。 通过在喷嘴板上形成第一材料层（180）来封闭凹槽。 这里，引入第一材料层以防止墨通过凹槽泄漏出来，并且可以是氮化硅层或氧化硅层。

公开(公告)号：EP1174268A1

公开(公告)日：2002-01-23

申请号：EP01306039.7

申请日：2001-07-13

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Lee, Chang-seung ,  Na, Kyoung-won ,  Lee, Sang-wook ,  Kim, Hyun-cheol ,  Oh, Yong-soo

IPC分类号： B41J2/14 ,  B41J2/16 ,  B41J2/055

CPC分类号： B41J2/1629 ,  B41J2/055 ,  B41J2/1404 ,  B41J2/14137 ,  B41J2/1601 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/1437

摘要： A bubble-jet type ink-jet printhead, and a manufacturing method thereof are provided. The printhead includes a substrate integrally having an ink supply manifold (102), an ink chamber (200), and an ink channel (106), a nozzle plate (110) having a nozzle (160), a heater (120), and an electrode (140) for applying current to the heater. In particular, the ink chamber is formed in a substantially hemispherical shape on a surface of the substrate, a manifold is formed from its bottom side toward the ink chamber, and the ink channel linking the manifold and the ink chamber is formed at the bottom of the ink chamber. This simplifies the manufacturing process and facilitates high integration and high volume production. Furthermore, a doughnut-shaped bubble is formed to eject ink in the printhead, thereby preventing a back flow of ink as well as formation of satellite droplets which may degrade image resolution.

摘要翻译： 提供了一种气泡喷墨式喷墨打印头及其制造方法。 打印头包括一体地具有供墨歧管（102），墨水室（200）和墨水通道（106）的基板，具有喷嘴（160），加热器（120）的喷嘴板（110）和 用于向加热器施加电流的电极（140）。 特别地，墨水室在基板的表面上形成为大致半球形状，从其底侧朝向墨水室形成歧管，并且连接歧管和墨水室的墨水通道形成在 墨水室。 这简化了制造过程，并促进了高集成度和大批量生产。 此外，形成环形气泡以将墨水喷射到打印头中，从而防止墨水的反向流动以及可能降低图像分辨率的卫星墨滴的形成。

公开(公告)号：EP0840092A3

公开(公告)日：1999-02-17

申请号：EP97308763.8

申请日：1997-10-31

申请人： Samsung Electronics Co., Ltd.

发明人： Lee, Byeung-Leul, 325-702 Woosung Apt. ,  Oh, Yong-soo ,  Song, Ci-moo

IPC分类号： G01C19/56

CPC分类号： G01C19/5755 ,  G01C19/5726 ,  H02N1/008

摘要： An electrostatic driving apparatus for a microactuator is provided in which to prevent an excitation signal from being mixed with a sensing signal via the parasitic path formed of parasitic capacitance according to the structure of the microactuator and vibration characteristics thereof, which cause noise, signals having opposite polarities are applied to activating vibration plates (21a,21b) using an inverter (27) such that the activating vibration signals of each plate, which cause noise, are offset, thereby improving the signal-to-noise ratio.