公开(公告)号：EP2889603A1

公开(公告)日：2015-07-01

申请号：EP13846617.2

申请日：2013-08-30

Applicant: Sony Corporation

Inventor： TAKEUCHI Taichi ,  IMANISHI Shingo

IPC: G01N15/14 ,  G01N21/21 ,  G01N21/49

CPC classification number: G01N15/1436 ,  G01N15/1429 ,  G01N15/1434 ,  G01N15/1459 ,  G01N21/21 ,  G01N21/47 ,  G01N21/49 ,  G01N21/53 ,  G01N21/645 ,  G01N2015/0065 ,  G01N2015/1006 ,  G01N2021/6478 ,  G01N2201/06113 ,  G01N2201/0638 ,  G01N2201/0683

Abstract: A microparticle measuring apparatus for highly accurately detecting the position of a microparticle flowing through a flow channel includes a light irradiation unit for irradiating a microparticle flowing through a flow channel with light, and a scattered light detection unit for detecting scattered light from the microparticle, including an objective lens for collecting light from the microparticle, a light splitting element for dividing the scattered light from the light collected by the objective lens, into first and second scattered light, a first scattered light detector for receiving an S-polarized light component, and an astigmatic element disposed between the light splitting element and the first scattered light detector, and making the first scattered light astigmatic. A relationship between a length L from a rear principal point of the objective lens to a front principal point of the astigmatic element, and a focal length f of the astigmatic element satisfies the following formula I. 1.5 ⁢ f ≤ L ≤ 2.5 ⁢ f

Abstract translation: 用于高精度地检测流过流路的微粒的位置的微粒测量装置包括用于照射流过流道的微粒的光照射单元，以及用于检测来自微粒的散射光的散射光检测单元，包括 用于从微粒收集光的物镜，将从物镜收集的光中散射的光分成第一和第二散射光的分光元件，用于接收S偏振光分量的第一散射光检测器，以及 设置在所述分光元件和所述第一散射光检测器之间并且使所述第一散射光散光的像散元件。 从物镜的后方主点到散光元件的前主点的长度L与散光元件的焦距f之间的关系满足下列公式I. 1.5 ¢‰¤L‰2.5 ¢f

公开(公告)号：EP2004040A2

公开(公告)日：2008-12-24

申请号：EP07758327.6

申请日：2007-03-12

Applicant: Zuckerman, Ralph

Inventor： Zuckerman, Ralph

IPC: A61B5/00

CPC classification number: A61B5/0071 ,  A61B5/14546 ,  A61B5/1455 ,  A61B5/14555 ,  A61B5/14556 ,  A61B5/4842 ,  A61B5/7246 ,  A61B5/7278 ,  G01N21/6445 ,  G01N21/645 ,  G01N2021/6484 ,  G01N2201/0683 ,  G01N2201/12

Abstract: A non-invasive measurement of biological tissue reveals information about the function of that tissue. Polarized light is directed onto the tissue, stimulating the emission of fluorescence, due to one or more endogenous fluorophors in the tissue. Fluorescence anisotropy is then calculated. Such measurements of fluorescence anisotropy are then used to assess the functional status of the tissue, and to identify the existence and severity of disease states. Such assessment can be made by comparing a fluorescence anisotropy profile with a known profile of a control.

公开(公告)号：EP3371656A1

公开(公告)日：2018-09-12

申请号：EP16794539.3

申请日：2016-10-25

Applicant: Carl Zeiss SMT GmbH

Inventor： STIEPAN, Hans-Michael

IPC: G03F7/20 ,  G01N21/47 ,  G01N21/95

CPC classification number: G03F7/70633 ,  G01B11/02 ,  G01B11/272 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/8848 ,  G01N2201/0683 ,  G03F7/705 ,  G03F7/70508 ,  G03F7/70625

Abstract: The invention relates to a method and an apparatus for characterizing a wafer structured by at least one lithography step. In the method according to the invention, at least one parameter which is characteristic for the structured wafer is ascertained on the basis of a plurality of measurements of the intensity of electromagnetic radiation after the diffraction thereof at the structured wafer, wherein these intensity measurements are carried out for at least two different orders of diffraction, wherein, for at least two regions on the wafer (150, 450, 550, 650, 750, 850, 950), in each case a value of the parameter assigned to the respective region is determined on the basis of a comparison of the measurement values obtained in the intensity measurements for the at least two orders of diffraction, and wherein the intensity measurements for determining the parameter are carried out simultaneously for the at least two regions on the wafer.

公开(公告)号：EP2889603B1

公开(公告)日：2018-08-01

申请号：EP13846617.2

申请日：2013-08-30

Applicant: Sony Corporation

Inventor： TAKEUCHI Taichi ,  IMANISHI Shingo

IPC: G01N15/14 ,  G01N21/53

CPC classification number: G01N15/1436 ,  G01N15/1429 ,  G01N15/1434 ,  G01N15/1459 ,  G01N21/21 ,  G01N21/47 ,  G01N21/49 ,  G01N21/53 ,  G01N21/645 ,  G01N2015/0065 ,  G01N2015/1006 ,  G01N2021/6478 ,  G01N2201/06113 ,  G01N2201/0638 ,  G01N2201/0683

Abstract: A microparticle measuring apparatus for highly accurately detecting the position of a microparticle flowing through a flow channel includes a light irradiation unit for irradiating a microparticle flowing through a flow channel with light, and a scattered light detection unit for detecting scattered light from the microparticle, including an objective lens for collecting light from the microparticle, a light splitting element for dividing the scattered light from the light collected by the objective lens, into first and second scattered light, a first scattered light detector for receiving an S-polarized light component, and an astigmatic element disposed between the light splitting element and the first scattered light detector, and making the first scattered light astigmatic. A relationship between a length L from a rear principal point of the objective lens to a front principal point of the astigmatic element, and a focal length f of the astigmatic element satisfies the following formula I. 1.5 �¢ f ‰¤ L ‰¤ 2.5 �¢ f

公开(公告)号：EP3120134B1

公开(公告)日：2018-01-31

申请号：EP15709113.3

申请日：2015-02-18

Applicant: Centre National de la Recherche Scientifique (C.N.R.S.) ,  Ecole Polytechnique

Inventor： PAGNOUX, Dominique ,  VIZET, Jérémy ,  MANHAS, Sandeep ,  VANEL, Jean-Charles ,  DEBY, Stanislas ,  DE MARTINO, Antonello

IPC: G01N21/21 ,  A61B1/07

CPC classification number: G01N21/21 ,  A61B1/07 ,  G01N2201/0636 ,  G01N2201/0683 ,  G01N2201/08 ,  G01N2201/12

公开(公告)号：EP3130909A4

公开(公告)日：2017-12-27

申请号：EP15775982

申请日：2015-02-19

Applicant: MITSUBISHI ELECTRIC CORP

Inventor： NAKAI KENYA ,  TAKESHITA NOBUO

IPC: G01N15/06 ,  G01N15/00 ,  G01N15/02 ,  G01N15/14 ,  G01N21/49 ,  G01N21/53 ,  G01S7/491 ,  G01S7/499 ,  G01S17/95

CPC classification number: G01N15/1434 ,  G01N15/0211 ,  G01N15/06 ,  G01N21/49 ,  G01N21/53 ,  G01N2015/0046 ,  G01N2015/0693 ,  G01N2015/1454 ,  G01N2201/06113 ,  G01N2201/0683 ,  G01S7/4916 ,  G01S7/499 ,  G01S17/95 ,  H01S5/0028 ,  H01S5/0427 ,  H01S5/0617 ,  H01S5/06832

Abstract: A floating particle detection device 1 is capable of accurately identifying the type of a floating particle while achieving simplification of a configuration of the device, the device includes: a laser light irradiator (10) that includes a laser light emitting element (11) and a back-monitor-use light receiving element (12); a scattered light receiver (20) that selectively receives light of a predetermined polarization component among scattered light generated when a floating particle (50) is irradiated and that generates a second detection signal; and an identification processor (30) that identifies the type of the floating particle on the basis of a first detection signal and the second detection signal. Incident light entering the back-monitor-use light receiving element (12) includes: a back-monitor-use laser beam (L0); and backscattered light (Lbs) travelling toward the laser light irradiator (10) among the scattered light (Ls) of an irradiation laser beam (L1) with which the floating particle (50) is irradiated.

公开(公告)号：EP3236242A4

公开(公告)日：2017-12-06

申请号：EP15869789

申请日：2015-12-01

Applicant: KONICA MINOLTA INC

Inventor： NAKAMURA YUKITO ,  NAGAE KOSUKE ,  KAYA TAKATOSHI

IPC: G01N21/64

CPC classification number: G01N21/648 ,  G01J3/0202 ,  G01J3/0224 ,  G01J3/0237 ,  G01J3/18 ,  G01N21/6428 ,  G01N21/6445 ,  G01N33/54373 ,  G01N2021/6439 ,  G01N2021/6463 ,  G01N2201/0683

Abstract: The surface plasmon-enhanced fluorescence measurement device has: a light source that irradiates the diffraction grating with a linearly polarized excitation light; a rotating part that changes the direction of the optical axis of the excitation light with respect to the diffraction grating when seen in plan view, or changes the polarization direction of the excitation light with respect to the diffraction grating; a polarizer that extracts linearly polarized light from the fluorescence emitted from the fluorescent substance; and a light detection unit that detects the linearly polarized light extracted by the polarizer.

公开(公告)号：EP3236242A1

公开(公告)日：2017-10-25

申请号：EP15869789.6

申请日：2015-12-01

Applicant: Konica Minolta, Inc.

Inventor： NAKAMURA, Yukito ,  NAGAE, Kosuke ,  KAYA, Takatoshi

IPC: G01N21/64

CPC classification number: G01N21/648 ,  G01J3/0202 ,  G01J3/0224 ,  G01J3/0237 ,  G01J3/18 ,  G01N21/6428 ,  G01N21/6445 ,  G01N33/54373 ,  G01N2021/6439 ,  G01N2021/6463 ,  G01N2201/0683

Abstract: The surface plasmon-enhanced fluorescence measurement device has: a light source that irradiates the diffraction grating with a linearly polarized excitation light; a rotating part that changes the direction of the optical axis of the excitation light with respect to the diffraction grating when seen in plan view, or changes the polarization direction of the excitation light with respect to the diffraction grating; a polarizer that extracts linearly polarized light from the fluorescence emitted from the fluorescent substance; and a light detection unit that detects the linearly polarized light extracted by the polarizer.

Abstract translation: 该表面等离子体增强荧光测量装置具有：光源，其用线偏振激发光照射衍射光栅; 旋转部分，其在平面图中观察时改变激发光的光轴相对于衍射光栅的方向，或者改变激发光相对于衍射光栅的偏振方向; 偏振器，其从荧光物质发出的荧光中提取线性偏振光; 以及检测由起偏器提取的线偏振光的光检测单元。

公开(公告)号：EP3066455A4

公开(公告)日：2017-07-05

申请号：EP14858305

申请日：2014-11-04

Applicant: AGENCY SCIENCE TECH & RES

Inventor： WONG CHI LOK ,  OLIVO MALINI

IPC: G01N21/552 ,  G01N21/21

CPC classification number: G01N21/553 ,  G01N21/21 ,  G01N2201/0683 ,  G01N2201/12

Abstract: An optical sensing device is provided, including a first polarizer, a second polarizer, wherein the first polarizer and the second polarizer have respective transmission axes aligned in orthogonal directions, an SPR sensor arrangement including an SPR sensing surface, the SPR sensor arrangement arranged to receive an incident light beam passed through a polarizer to be reflected at the SPR sensing surface and transmitted through a second polarizer to provide a transmitted light beam, a detector arrangement configured to detect the transmitted light beam, the transmitted light beam including a sensing signal and a reference signal, and a processor electrically coupled to the detector arrangement, the processor configured to perform a subtraction operation between the sensing signal and the reference signal. The optical sensing is based on a differential measurement scheme. The subtraction between the sensing signal and the reference signal cancels the common path noise and enhances the sensor resolution.

Abstract translation: 提供了一种光学感测设备，其包括第一偏振器，第二偏振器，其中第一偏振器和第二偏振器具有在正交方向上对准的相应透射轴，包括SPR感测表面的SPR传感器布置，SPR传感器布置被布置为接收 入射光束穿过偏振器以在SPR感测表面处反射并透射通过第二偏振器以提供透射光束;检测器装置，配置为检测透射光束;透射光束包括感测信号;和 参考信号以及电耦合到所述检测器装置的处理器，所述处理器被配置为执行所述感测信号和所述参考信号之间的减法操作。 光学传感基于差分测量方案。 感测信号和参考信号之间的相减抵消了公共路径噪声并提高了传感器分辨率。

公开(公告)号：EP3153843A1

公开(公告)日：2017-04-12

申请号：EP15802877.9

申请日：2015-06-03

Applicant: University of Tsukuba

Inventor： YASUNO, Yoshiaki ,  KASARAGOD, Deepa Kamath

IPC: G01N21/17 ,  G01N21/21

CPC classification number: G01N21/21 ,  A61B3/102 ,  G01B9/02044 ,  G01B9/02083 ,  G01B9/02091 ,  G01B2290/70 ,  G01N21/17 ,  G01N21/4795 ,  G01N2201/0683 ,  G01N2201/12

Abstract: Polarization-sensitive optical image measurement is subject to a non-negligible bias, and consequent deviation in birefringence, in a surrounding range of low SN ratios (signal-to-noise ratios) and low signal strengths; however, this deviation in birefringence is removed to make accurate quantitative measurement possible. Noise-containing OCT signals obtained by polarization OCT are processed using a birefringence calculation algorithm, to obtain measured birefringence, after which noise is statistically adjusted to simulate a measured birefringence distribution and determine the noise characteristics of the measured birefringence values, and then Monte Carlo calculations are repeated by assuming different values for the noise level and the true birefringence value, respectively, to form three-dimensional histogram of combinations of true birefringence values, SN ratios, and measured birefringence values, after which specified measured birefringence values and SN ratios are assumed from the three-dimensional histogram information to obtain a true birefringence probability density distribution, and true birefringence values are estimated from the true birefringence probability density distribution.

Abstract translation: 在低SN比（信噪比）和低信号强度的周围范围内，极化敏感的光学图像测量受到不可忽视的偏差和双折射的偏差， 然而，这种双折射偏差被去除以使得可以进行准确的定量测量。 使用双折射计算算法处理通过偏振OCT获得的含噪声的OCT信号，以获得测量的双折射，之后统计地调整噪声以模拟测量的双折射分布并确定测量的双折射值的噪声特性，然后进行蒙特卡洛计算 通过分别假设噪声水平和真实双折射值的不同值来重复，以形成真双折射值，SN比和测量的双折射值的组合的三维直方图，之后假设指定的测量双折射值和SN比 从三维直方图信息获得真正的双折射概率密度分布，并且从真双折射概率密度分布估计真正的双折射值。