公开(公告)号：EP2888569A1

公开(公告)日：2015-07-01

申请号：EP13750329.8

申请日：2013-08-16

申请人： Pyreos Ltd.

发明人： WOJTCZUK, Piotr ,  GIEBELER, Carsten ,  BINNIE, David

IPC分类号： G01J5/08 ,  G01J5/34 ,  G01J5/00 ,  G01J1/06 ,  G01J1/02

CPC分类号： G06F3/0325 ,  G01J1/0266 ,  G01J1/06 ,  G01J5/0025 ,  G01J5/0831 ,  G01J5/0875 ,  G01J5/089 ,  G01J5/34 ,  G01S17/66

摘要： A sensor system for detecting a movement of an Infrared light source (29) in a predetermined direction of movement (30) has at least one pair of infrared light sensors consisting of two infrared light sensors (4, 5; 36, 37) which are arranged beside one another with respect to the direction of movement (30) and thereby define a sensor coverage section (17), which is determined by the distance between the ends (16) of the infrared light sensors (4, 5; 36, 37) which face away from one another with respect to the direction of movement (30), and are set up in such a manner that, during irradiation with the infrared light source (29), said sensors provide electrical signals, the charge signs of which are opposing, for detecting the movement of the infrared light source (29) in a manner such that said signals can be tapped off, wherein the sensor system (1) has a window (7) between the infrared light sensors (4, 5; 36, 37) and the infrared light source (29), through which window the infrared light from the infrared light source (29) can be beamed onto the infrared light sensors (4, 5; 36, 37) and behind which window the infrared light sensors (4, 5; 36, 37) are arranged and the arrangement and extent of which are matched to the width (41) of the window (7) in the direction of movement (30) in such a manner that, beyond a predetermined limit distance (20) away from the window (7), the infrared light sensors (4, 5; 36, 37) each have a full shine area (22, 23) which defines the locations from which the infrared light source (29) fully shines on only one of the infrared light sensors (4, 36 or 5, 37), wherein the full shine areas (22, 23) do not spatially overlap beyond the limit distance (20), and the window width (41) is shorter than the sensor coverage section (17) in the direction of movement (30).

公开(公告)号：EP2453218A1

公开(公告)日：2012-05-16

申请号：EP11008450.6

申请日：2011-10-20

申请人： Ushiodenki Kabushiki Kaisha

发明人： Yamatani, Daiki

IPC分类号： G01J1/06 ,  G01J1/42 ,  G01J1/58 ,  G02B27/09

CPC分类号： G01J1/58 ,  G01J1/06 ,  G01J1/4257 ,  G01J1/429 ,  G02B27/0988 ,  G03F7/70033

摘要： An extreme ultraviolet light source device, comprising a collector mirror focusing extreme ultraviolet radiation at a focal point, wherein a porous plate having a plurality of through holes arranged such that only radiation focusing at said focal point passes is provided insertably between said collector mirror and said focal point on an optical axis of said collector mirror, and a detection means is provided to receive radiation having passed through said porous plate and to detect an intensity of said received radiation, and a method for detecting an irradiance distribution in an extreme ultraviolet light source device.

摘要翻译： 极紫外光源装置，包括一个收集器反射镜聚焦极紫外辐射在焦点处，worin具有通孔布置搜索做仅聚焦在所述焦点的辐射的多遍是在所述收集器反射镜和Said之间插入地设置的多孔板 被设置在到所述收集器反射镜的光轴上，以及检测装置，焦点到接收辐射穿过所述多孔板具有传递和在强度来检测所述接收的辐射，以及用于辐照度分布的检测到极紫外光源的方法 装置。

公开(公告)号：EP2232209A1

公开(公告)日：2010-09-29

申请号：EP08869858.4

申请日：2008-12-26

申请人： NXP B.V.

发明人： SOUCHKOV, Vitali ,  VAN DALEN, Robert ,  O'MATHUNA, Padraig

IPC分类号： G01J1/02 ,  G01J1/04 ,  G01J1/06 ,  G01J1/16

CPC分类号： G01J1/1626 ,  G01J1/02 ,  G01J1/0209 ,  G01J1/0219 ,  G01J1/0228 ,  G01J1/0266 ,  G01J1/04 ,  G01J1/0407 ,  G01J1/0437 ,  G01J1/06 ,  G01J1/4228 ,  G01J1/4257 ,  G01S3/784 ,  G02F1/13318 ,  H01L27/14623 ,  H01L31/02024 ,  H01L31/02164

摘要： A light sensor and light sensing system to detect an intensity of incident light and an angle of incidence of the incident light. The light sensor includes a dielectric layer, a plurality of photo detectors coupled relative to the dielectric layer, and a plurality of stacks of opaque slats embedded within the dielectric layer. The dielectric layer is substantially transparent to the incident light. The photo detectors detect the incident light through the dielectric layer. The stacks of opaque slats are approximately parallel to an interface between the dielectric layer and the photo detectors. The stacks of opaque slats define light apertures between adjacent stacks of opaque slats. At least some of the stacks of opaque slats are arranged at a non-zero angle relative to other stacks of the opaque slats.

公开(公告)号：EP1031122B1

公开(公告)日：2004-09-22

申请号：EP98957838.0

申请日：1998-11-12

申请人： Control Devices, Inc.

发明人： HILL, Jonathan, W. ,  COOK, Richard ,  COTE, Mark

IPC分类号： G08B17/12 ,  G08B17/00 ,  B60Q1/00 ,  G01J1/00 ,  B60H1/00 ,  G01J1/06

CPC分类号： G01J1/04 ,  G01J1/0271 ,  G01J1/0422 ,  G01J1/0474 ,  G01J1/4228 ,  G01J2001/4266

摘要： A sensor (50) for determining the magnitude and intensity of solar radiation. The apparatus includes a diffuser (2) which provides radiation through channels (60a, 60b, 60c, 60d) within an elongated channeled member (5) onto photodiodes (54a, 54b, 54c, 54d). Each photodiode (54a, 54b, 54c, 54d) is optically isolated from other photodiodes. The diffuser (2) is arranged and constructed so as to receive radiation within 360 degrees of the surrounding environment.

公开(公告)号：EP0866345B1

公开(公告)日：2003-09-03

申请号：EP96916349.2

申请日：1996-06-07

申请人： Nihon Shingo Kabushiki Kaisha

发明人： ASADA, Norihiro

IPC分类号： G01V8/10 ,  G01J1/06 ,  H04N1/028 ,  G01J1/04

CPC分类号： G01J1/04 ,  G01J1/0204 ,  G01J1/0266 ,  G01J1/0403 ,  G02B26/085

公开(公告)号：EP1092965A1

公开(公告)日：2001-04-18

申请号：EP00303988.0

申请日：2000-05-11

申请人： ELOP ELECTRO-OPTICS INDUSTRIES LTD.

发明人： Shechterman,Mark

IPC分类号： G01J1/06 ,  G01J5/08

CPC分类号： G01J1/04 ,  G01J1/0407 ,  G01J1/0422 ,  G01J1/06 ,  G01J5/08 ,  G01J5/0803 ,  G01J5/0815 ,  G01J2005/0077

摘要： A numerical-aperture limiter for an optical imaging system, comprising at least one pair of wedge-like prisms made of a transparent material of a known index of refraction, the prisms of said pair being disposed in close mutual proximity and in opposite orientation, with the narrow end of one prism adjacent to the wide end of the other prism, the prism surfaces, facing one another, of each prism of said pair of prisms being spaced apart from one another by a distance at least equal to the wavelength of the light used by said imaging system, with a vertex angle of each one of said prisms being a function of the desired numerical aperture and the index of refraction of said material.

摘要翻译： 一种用于光学成像系统的数字孔径限制器，包括由已知折射率的透明材料制成的至少一对楔形棱镜，所述对的棱镜以相互靠近的方式并且以相反的方向被布置成与 与另一棱镜的宽端相邻的一个棱镜的窄端，所述一对棱镜的每个棱镜彼此面对的棱镜表面彼此间隔开至少等于光的波长的距离 由所述成像系统使用，每个所述棱镜的顶角是所述数值孔径的函数和所述材料的折射率。

公开(公告)号：EP0801319A4

公开(公告)日：1998-04-29

申请号：EP96935518

申请日：1996-10-31

申请人： MATSUSHITA ELECTRIC IND CO LTD

发明人： SHIONO TERUHIRO ,  UEDA MICHIHITO ,  ITO TATSUO ,  YOKOYAMA KAZUO

IPC分类号： G01J1/00 ,  G02B3/00 ,  G02B26/08 ,  G02F1/01 ,  G02B26/00 ,  G01J1/02 ,  G01J1/04 ,  G01J1/06 ,  G01J1/08 ,  G02B26/02 ,  G02B26/04 ,  G02B26/06

CPC分类号： G02F1/0102 ,  G02B3/0018 ,  G02B3/0056

摘要： Micro-lenses (3a and 3b) are formed on the first surface of a transparent substrate and an outgoing efficiency control device (2) for modulating quantity of incident light is disposed on the second surface opposite to the first surface. Incident light (4) is allowed to be incident obliquely with respect to the optical axis of the micro-lens (3a) and is condensed on the outgoing efficiency control device (2). The outgoing efficiency control device (2) modulates quantity of light of incident light and outputs it as outgoing light (5). This construction can make the size of the outgoing efficiency control device (2) smaller than the beam diameter and the aperture of the micro-lenses.

摘要翻译： 微透镜3a和3b形成在透明基板的第一表面上，并且在与第一表面相对的第二表面上设置调制入射光量的输出效率控制装置2。 入射光4被倾斜地入射到微透镜3a的光轴上以聚焦在输出效率控制装置2上。输出效率控制装置2调制入射光的光量，并将出射光5作为输出光5输出 微电机3b。 由于这样的结构，与光束的直径和微透镜的孔径相比，输出效率控制装置2的尺寸可以减小。

公开(公告)号：EP0357555B1

公开(公告)日：1994-06-01

申请号：EP89810627.3

申请日：1989-08-23

申请人： Riemenschneider, Werner

发明人： Blaser, Peter

IPC分类号： G01J1/42 ,  G01J1/06

CPC分类号： G01J1/06 ,  G01J1/42 ,  G01J2001/0481

公开(公告)号：EP0306124B1

公开(公告)日：1993-03-17

申请号：EP88303935.6

申请日：1988-04-29

申请人： LUTRON ELECTRONICS CO., INC.

发明人： Jacoby, Elliot ,  Yuhasz, Stephen J. ,  Mayo, Noel

IPC分类号： G01J1/06 ,  G08B13/18 ,  G01V9/04

CPC分类号： H04B10/60 ,  G01J1/0266 ,  G01J1/0295 ,  G01J1/04 ,  G01J1/0407 ,  G01J1/0418 ,  G08B13/19 ,  G08C23/04 ,  Y10S250/01

公开(公告)号：EP0152597A2

公开(公告)日：1985-08-28

申请号：EP84115444.6

申请日：1984-12-14

申请人： SONY CORPORATION

发明人： Yamamoto, Koichi ,  Fujioka, Yoshihisa

IPC分类号： G01J1/06 ,  G02B6/00 ,  H04B10/00 ,  H03J9/06

CPC分类号： H04B10/801 ,  G02B6/243 ,  G02B6/4246 ,  G02B6/4295

摘要： There serves to emit light signals, more particularly infrared signals, and to receive such signals, an apparatus in which a light emitting arrangement (15) and a light receiving arrangement (20) are arranged in or behind a plate (32) which is translucent or transparent to said light signals or infrared signals. At least one surface of the plate (32) has such a finish between the light emitting arrangement (15) and the light receiving arrangement (20) that light rays are impeded or prevented from being passed on within the plate (32).