公开(公告)号：EP2700985A1

公开(公告)日：2014-02-26

申请号：EP13181074.9

申请日：2013-08-20

申请人： COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

发明人： Rossini, Umberto

IPC分类号： G02B5/09 ,  G02B27/01

CPC分类号： G02B27/0101 ,  G02B3/08 ,  G02B5/09 ,  G02B2027/013 ,  G02B2027/015 ,  G02B2027/0194

摘要： L'invention concerne un viseur tête haute, comprenant une source d'image (14) et un miroir (16) positionnés selon des plans principaux parallèles et séparés d'une première distance (d), le miroir (16) étant conformé pour former des images virtuelles des images fournies par la source d'image (14) à une deuxième distance (D) du miroir, supérieure à la première distance.

公开(公告)号：EP1710613B1

公开(公告)日：2013-08-07

申请号：EP05709415.3

申请日：2005-01-27

申请人： Olympus Corporation

发明人： HIROSE, Kazuya ,  HAGA, Kenji ,  TSUBOUCHI, Isao ,  TAKAHASHI, Toru ,  YAKATA, Katsuaki ,  ORII, Fumito

IPC分类号： G02B5/09 ,  B29C45/00 ,  B29C45/27 ,  B29C45/26

CPC分类号： G02B5/09 ,  B29C45/0046 ,  B29C45/26 ,  B29C45/2701 ,  B29L2011/0058

公开(公告)号：EP2243047A1

公开(公告)日：2010-10-27

申请号：EP09709960.0

申请日：2009-02-06

申请人： Carl Zeiss SMT AG

发明人： DINGER, Udo ,  ENDRES, Martin ,  WERBER, Armin ,  MÜHLBERGER, Norbert ,  BACH, Florian

IPC分类号： G02B5/09 ,  G03F7/20

CPC分类号： G03F7/702 ,  G02B5/09 ,  G02B26/06 ,  G02B26/0816 ,  G02B26/0833 ,  G02B27/0927 ,  G03F7/70075 ,  G03F7/70116

摘要： A facet mirror is to be used as a bundle-guiding optical component in a projection exposure apparatus for microlithography. The facet mirror has a plurality of separate mirrors. For individual deflection of incident illumination light, the separate mirrors are in each case connected to an actuator in such a way that they are separately tiltable about at least one tilt axis. A control device, which is connected to the actuators, is configured in such a way that a given grouping of the separate mirrors can be grouped into separate mirror groups that include in each case at least two separate mirrors. The result is a facet mirror which, when installed in the projection exposure apparatus, increases the variability for setting various illumination geometries of an object field to be illuminated by the projection exposure apparatus. Various embodiments of separate mirrors for forming the facet mirrors are described.

公开(公告)号：EP1922572B1

公开(公告)日：2009-01-21

申请号：EP06808281.7

申请日：2006-09-05

申请人： Thales

发明人： FALZON, Frédéric ,  BLANC, Philippe

IPC分类号： G02B5/09 ,  H01Q1/28 ,  G02B23/00

CPC分类号： G02B5/09 ,  G02B23/00

摘要： The invention relates to a deployable reflector (RP) for a space observation instrument, comprising a selected number of deployable reflective elements (E1a-E3b) which, once deployed in a first position, together define a reflective surface in the form of a Reuleaux triangle (RD) with a closed convex curve having a width that is constant as a function of the direction.

公开(公告)号：EP1922572A1

公开(公告)日：2008-05-21

申请号：EP06808281.7

申请日：2006-09-05

申请人： Alcatel Lucent

发明人： FALZON, Frédéric ,  BLANC, Philippe

IPC分类号： G02B5/09 ,  H01Q1/28 ,  G02B23/00

CPC分类号： G02B5/09 ,  G02B23/00

摘要： The invention relates to a deployable reflector (RP) for a space observation instrument, comprising a selected number of deployable reflective elements (E1a-E3b) which, once deployed in a first position, together define a reflective surface in the form of a Reuleaux triangle (RD) with a closed convex curve having a width that is constant as a function of the direction.

公开(公告)号：EP1825666A1

公开(公告)日：2007-08-29

申请号：EP05824552.3

申请日：2005-12-01

申请人： Desaulniers, Jean-Marc

发明人： Desaulniers, Jean-Marc

IPC分类号： H04N3/08 ,  G02B5/09

CPC分类号： G02B5/09 ,  G02B26/12 ,  H04N3/08 ,  H04N5/74 ,  H04N9/3129

摘要： The invention concerns a system for projecting a digital video image sequence using a light beam capable of being generated by a source (1) on a 3D swivel joint (2), of low/medium power laser type or white light laser type. The system comprises a shutter microdisc (4) with slots (3), two rotary optical discs (5) and (7) digitally interlocked on an axis (12) with 3D swivel joints (6), generating vertical and horizontal scanning of the screen, the whole assembly terminated by a rectangular shutter (8). The display is achieved by successive reflections of the light beam on microscopic reflecting facets arranged on the surface of the discs (5) and (7).

公开(公告)号：EP1761806A1

公开(公告)日：2007-03-14

申请号：EP05746266.5

申请日：2005-06-10

申请人： Koninklijke Philips Electronics N.V.

发明人： VAN GORKOM, Ramon, P. ,  DUINE, Peter, A. ,  DE ZWART, Siebe, T. ,  BERGMAN, Anthonie, H. ,  VISSENBERG, Michel, C., J., M. ,  DONA, Marinus, J., J. ,  VAN DEN HEUVEL, Cornelius, A.

IPC分类号： G02B5/26 ,  G02B5/09 ,  G02B5/04 ,  G02B27/14 ,  G02B27/28

CPC分类号： G02B27/102 ,  G02B5/045 ,  G02B5/09 ,  G02B5/26 ,  G02B27/142 ,  G02B27/143 ,  G02B27/283 ,  G02F1/133514 ,  G02F1/133536

摘要： An optical separating filter separates impinging light into a first and a second part having different properties. The separating filter comprises reflective filters (FR) arranged in funnel shaped structures (F1). Each one of the structures (F1) have an inlet area (IA1) to receive the impinging light (IL) and an outlet area (OA1) smaller than the inlet area. (IA1) to converge reflected impinging light (RL) towards the outlet area (OA1). The structures (F1) comprise a first group of funnel shaped structures (F1) constructed to reflect light which has a first property (C1) towards their respective first outlet areas (OA1) and for transmitting light which has a second property (C2) towards respective second outlet areas (OA2).

公开(公告)号：EP1192484B1

公开(公告)日：2007-03-14

申请号：EP00936037.1

申请日：2000-05-17

申请人： Toolz, Ltd.

发明人： TACKLIND, Christopher, A. ,  CARLSEN, William ,  DUVAL, Eugene ,  BUTLER, Andrew G. ,  Zimmermann, Thomas

IPC分类号： G01C15/00 ,  G02B5/09 ,  G02B27/10 ,  G02B27/14

CPC分类号： G02B27/106 ,  G01C15/004 ,  G02B27/1073 ,  G02B27/1093 ,  G02B27/143 ,  G02B27/144 ,  G02B27/648

摘要： A multi-beam tool is disclosed which can perform square, plumb, and level function which may be required in a construction environment. The tool can generate in a preferred embodiment up to five orthogonal beams with two beams being plumb and three beams being leveled. The tool includes in a preferred arrangement a self-leveling pendulum (80) to which a laser (4) and quad-mirror arrangement (8a-8d) is secured.

公开(公告)号：EP1296162A4

公开(公告)日：2007-02-28

申请号：EP02700713

申请日：2002-02-22

申请人： NIPPON KOGAKU KK

发明人： TAKINO HIDEO

IPC分类号： G02B5/09 ,  G02B5/08 ,  G02B7/182 ,  G02B26/08 ,  G03F7/20 ,  G21K1/06

CPC分类号： G03F7/70141 ,  G02B5/08 ,  G02B5/09 ,  G02B7/182 ,  G02B7/1828 ,  G02B26/085 ,  G03F7/702 ,  G03F7/70958 ,  G03F7/70975 ,  G21K1/06 ,  Y10S359/903

摘要： A multifaceted reflecting mirror is provided with a plurality of reflecting mirror elements 10 and a base plate 13 for magnet, each of the plurality of reflecting mirror elements 10 comprising a reflecting surface 19 and a magnetic film 17 formed on a bottom surface. The respective reflecting mirror elements 10 can be positioned highly accurately on the base plate 13 by using a positioning guide 15. The maintenance operation is easily performed as well, because the respective reflecting mirror elements 10 are detachable. When the multifaceted reflecting mirror is used in combination with another multifaceted reflecting mirror for an illumination optical system of a reflection type exposure apparatus which uses, as an exposure light beam, a light beam having a short wavelength such as soft X-ray, it is possible to illuminate an exposure area on a substrate with the light beam having an extremely uniform illumination intensity.

公开(公告)号：EP1553431A4

公开(公告)日：2006-12-13

申请号：EP03751412

申请日：2003-10-09

申请人： FURUKAWA ELECTRIC CO LTD

发明人： NOUSOU YOSHIYUKI ,  MORITA NOBUYUKI ,  NAGASHIMA KAZUYA ,  KEMMOTSU TAKAAKI

IPC分类号： G02B5/08 ,  B29C53/06 ,  B29L7/00 ,  F21V7/10 ,  G02B5/02 ,  G02B5/09

CPC分类号： G02B5/08 ,  F21V7/10

摘要： The object of the invention is to provide an optical reflection plate having the following merits A - D. A. There is no need for expensive initial cost for a mold and the like for making a three-dimensional shape. B. Processing is simple and processing cost is low. C. The reflection plate shape after bending can be accurately retained and moreover the reflection plate is superior in dimensional stability even under endurance conditions. D. The attachment processing method for shape retention is simple, and the cost is low. To achieve the above object, the invention intermittently forms narrow cuts, along straight lines, that pass through from one-side surface to the other-side surface in a light-reflecting foamed plastic film or sheet. Thereafter, the film or sheet is bent along the cuts.